双转子平面微电机定子制作工艺研究

为减小平面微电机轴向尺寸，解决轴向单边拉力问题，制作了双转子平面微电机。定子采用平面结构，双面各呈辐射状均布平面线圈，正、反面相对应的线圈由穿过基底的引线相连。采用以准许LIGA技术为基础的制作方法。在双面线圈定子制作工艺中，通过设计适当的工艺步骤，并控制甩胶、前烘与曝光条件，在已腐蚀出引线通孔的衬底上完成双面光刻并电铸孔引线的工艺过程。定子直径为23mm，孔引线边长500μm，深约400μm，线圈线宽100μm，高度35μm。装配后的电机测试结果表明电机运行平稳，力矩波动小。     

电磁型微电机定子绕组的研制

本文主要阐述应用微细加工技术研究和开发电磁型微电机定子绕组的制备工艺，重点介绍制备定子绕组所涉及到的各种材料及其用途。采用掩模电镀技术解决了平面工艺难以解决的线圈绕组。本研究结果为双层十七圈三对六组绕组系统。最小线宽为３μｍ，微电机直径为２ｍ，最大工作电流１２０ｍＡ，电阻值在２４－２５Ω之间。输出力矩为１．５μＮＭ，转子转速每分钟可达５００转。     

嵌入式电磁型微电机定子绕组的研制

阐述了采用ＮｉＦｅ 合金作为微电机定子绕组的铁芯材料，完成了电磁型微电机从非嵌入式向常规的嵌入式定子绕组的转变，无论是从定性分析还是从最后的测量结果都证明在相同的条件下，嵌入式电磁型微电机定子绕组的输出力矩要大大高于非嵌入式定子绕组的输出力矩，由原来的１－５μＮｍ 提高到４μＮｍ 。     

一种圆筒型转子的中空型超声电机的研制

针对某些飞行器舵机控制系统需要旋转型超声电机具有中空结构、转子与负载结构融合以及具备一定的保持力矩等特定工程技术需求,该文提出了一种圆筒型转子与舵翼结构一体设计(外圈输出)的中空型超声电机,开展了该型电机的结构及预压力施加方案的设计和试验研究。建立了电机定子的有限元模型,分析了不同结构尺寸对定子模态的影响,进行了结构尺寸的灵敏度分析,优化了定子的结构,计算出其共振频率、振动幅值。最后试制出了原理样机。实验表明,在激励电压为450 V,激励频率为40.2 kHz时,样机的空载转速可达208 r/min,堵转力矩可达0.35 N·m。     

微马达结构、气隙磁场和绕组层数对微马达输出力矩的影响

电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。从微马达结构1气隙磁场、转子厚度、转子写入磁极数和定子绕组的层数对微马达输出力矩的影响进行了分析和讨论。     

异步电动机为什么会转起来？

目前,农村和城市用的电动机,一大半是三相异步电动机,与其它的电动机相比,具有结构简单、运行可靠、价格便宜、转换效率高、使用维护方便等一系列优点,故应用极为广泛。为更深入地了解电动机,现介绍如下。一、三相异步电动机的构造要了解电动机为什么会转动起来,就应先了解其结构和构造。三相异步电动机由轴承盖、端盖、接线盒、定子铁芯、定子绕组、转轴、转子、风扇、塑壳等组成。其主体包括定子和转子两大部分。定子结构如图1所示。它由机座和装在机座内的圆筒状铁芯以及嵌放在铁芯槽内的三相定子线圈组成。机座是用铸铁或铸钢浇注加工制成,铁芯是用冲压成型的硅钢片压叠加工制成,其结构如图2所示。转子由转轴、转子铁芯和转子绕组等构成,其结构如图3所示。转子铁芯呈圆柱形,     

平面微电机定子线圈制作工艺研究

为了在平面微电机有限大尺寸的定子上制作高深宽比结构的绕组线圈,对高深宽比微结构的制作工艺进行了研究,综合比较各方面因素,从中找出了成品率高、可重复性好、工艺步骤尽量简单的平面线圈制作工艺,即在硅沟槽里通过微电铸得到高深宽比平面铜线圈的深刻蚀成型电铸工艺,并分析了光刻工艺关键参数之间的关系及对后续工艺的影响。通过该工艺制作的直径为10 mm的定子线圈深宽比大(宽40μm、深80μm),无空洞,并且在工艺上还有很大的深宽比挖掘潜力。该工艺亦可应用于其他需要高深宽比平面线圈的微执行器的制作中。     

圆柱-球体三自由度超声电机的研究

从实现圆柱-球体多自由度超声电机的运动原理和提高其输出性能的角度出发，提出了该种电机设计的基本要求。在此基础上，设计了一种新的电机定子结构，并用有限元法对该定子进行了模态分析和设计计算。依据设计结果，制作了样机。实验结果表明，定子的工作模态基本上满足其设计要求，电机的输出性能较以前有了大幅度的提高。同时也证明所采用的设计方法是正确的。     

平面电磁型微电机定转子制作工艺

为了在平面微电机有限大尺寸的定子上制作大深宽比结构的绕组线圈,对大深宽比微结构的制作工艺进行了研究,综合比较各方面因素,从中找出了成品率高、可重复性好、工艺步骤简单的平面线圈的制作工艺,即在Si沟槽里通过微电铸得到大深宽比平面铜线圈的深刻蚀成型电铸工艺;分析了光刻工艺关键参数之间的关系及对后续工艺的影响。通过该工艺制作的直径10mm定子线圈深宽比较大(宽40μm、深80μm),且无空洞。该工艺有很大的深宽比挖掘潜力,也可应用在其他需要较大深宽比平面线圈的微执行器的制作中。     

基于EKF的异步电机直接转矩控制系统仿真研究

为了提高直接转矩控制(DTC)系统定子磁链估计精度,降低电流、电压测量的随机误差,提出了一种基于扩展卡尔曼滤波(EKF)实现异步电机转子位置和速度估计的方法.扩展卡尔曼滤波器是建立在基于旋转坐标系下由定子电流、电压、转子转速和其它电机参量所构成的电机模型上,将定子电流、定子磁链、转速和转子角位置作为状态变量,定子电压为输入变量,定子电流为输出变量,通过对磁链和转速的闭环控制提高定子磁链的估计精度,实现了异步电机的无速度传感器直接转矩控制策略,仿真结果验证了该方法的可行性,提高了直接转矩的控制性能.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.     

社长序言（英文）

正Happy New Year!As we step into a new year,we take a look back at the key feature topics covered in China Communications over the past 12 months and set out our expecta-     

Call for Papers

正Introduction Jointly sponsored by the China Institute of Communications(CIC)and the IEEE Communications Society(IEEE ComSoc)since the year 2013,China Communications,currently,is aiming to gradually realise the transition from journal to magazine content and style.     

INTEGRATION OF OPTICAL AND WIRELESS NETWORKS

正For a long time,optical and wireless systems/net-works are developed in separate communities witha few attempts for in-depth convergence.In fact,it prom-ises many advantages to combine the optical and wire-less technologies in the levels of systems and networks.Recently,both academia and industry have made manyefforts to enter a new phase of development to take op-tical and wireless systems as fully integrated networks.To provide high bandwidth and reliable service for bothfixed and mobile users,a well-designed network must     

Call for Papers—Feature Topic,Vol.12,No.3,2015

正Smart Grid Communications The electric power industry is undergoing profound changes as the industry aims to capture the promise of a smart grid for a sustainable energy future.Enabled by the advanced sensing devices such as Phasor Measurement Units(PMUs),increasingly powerful