压缩六角格子[A(BC)]m结构光子晶体禁带特性

通过引入缺陷和色散介质方法,调控光子的运动状态,研究一种压缩[A(BC)]m结构负折射率光子晶体的TE波和TM波的传输特性和色散特性,研究发现两种模的禁带特性随入射角和色散介质折射率的变化而变化,并且其带隙比普通光子晶体的大,而透射带要窄,这为高品质低损耗的谐振腔、微波天线、透射光栅、光波导等新器件的研制提供理论依据.     

入射角度对一维光子晶体禁带的调制研究

利用特征矩阵法,分别研究了不同偏振方式的波入射到光子晶体时,光子晶体的禁带随入射角度的变化.结果表明:不论是TM波入射还是TE波入射,随着入射角度的增大,光子晶体的带隙都向短波方向移动;TM波入射时,光子晶体的带隙随入射角度的增大而减小,而以TE波入射光子晶体时,随着入射角度的增大,光子晶体的带隙逐渐增大.     

一维光子晶体中偏振态的色散特性

利用介质材料的色散关系和特征矩阵法研究了一维光子晶体中TE波和TM波两种偏振态的带隙随色散的变化特征。得出：介质材料的色散会对一维光子晶体中砸波和TM波两种偏振态的带隙结构产生明显的影响,并且TE波和TN波的一级和二级禁带随色散强度的变化特征有所不同。这些研究结果扩展了对一维光子晶体中TE波和TM波带隙结构的认识。     

复合周期特异介质光子晶体异质结的谐振模

一维异质结光子晶体包含两个基本单元结构,其中每个单元都由一种特异介质和常规介质层叠构成.利用传输矩阵法,通过数值模拟得出两种不同异质结光子晶体的透射谱.在1.0 ～ 10.0 GHz频率范围内,(AB)6(CD)4结构的透射谱中出现了三个光子带隙,但带隙中没有谐振模;而在(《AB)6(CD)4)2结构的透射谱中,在三个光子带隙内均出现谐振模.在第一带隙内,随着入射角的增大,TE波和TM波的谐振模数目均减少且谐振模发生频移.其中对于TE波,在2.40 GHz附近出现了全向谐振模.     

〔A（BC）〕^m结构光子晶体光纤传输特性

通过引入缺陷和色散介质方法,调控光子的运动状态,研究一种〔A（BC）〕m结构负折射率光子晶体的TE波和TM波的传输特性和色散特性,得到两种模的色散特性随入射角变化而变化规律,并且其带隙比普通光子晶体的大,而透射带要窄。通过运用传统计算电磁场与电磁波传播的FDTD方法及PML边界条件来仿真〔A（BC）〕m结构光子晶体光纤...     

一种基于光子晶体的中远红外双波段兼容伪装材料

光子晶体作为一种新型人工结构功能材料,基于其光子禁带的高反射特性可以实现热红外伪装。选择红外波段透明的薄膜材料A、B,设计出在中远红外波段具有高反射禁带的光子晶体,利用薄膜光学理论的特征矩阵法计算了反射光谱。通过构造异质结构光子晶体,实现了光子带隙的展宽,该结构光子晶体基本上实现了中远红外双波段的高反射,在2.94~5.06μm和7.66~11.98μm波段的光谱反射率接近为1;在2.91~5.12μm和7.62~12.29μm波段的光谱反射率大于95%,较好地满足了中远红外双波段兼容伪装的要求。倾斜入射时光子晶体的TM波和TE波的反射光谱是不同的,随着入射角度的增加,TM波的带隙逐渐变窄,而TE波的带隙逐渐变宽。     

一维光子晶体禁带反射率随结构的变化

用特征矩阵方法得出了一维光子晶体的反射率计算公式,以/4波片堆为例,计算了当两种介质采用不同折射率的物质时,在第一光子禁带TE波及TM波的反射率随入射角的变化。结果显示,TE波与TM波的情况不完全相同。总的来说,增大两种介质折射率的差别,或者同时提高两种介质的折射率,或者增加周期数都有利于制造出具有完全光子禁带的一维光子晶体。     

一种基于光子晶体的红外伪装材料

光子晶体作为一种新型人工结构功能材料,基于光子禁带的高反射特性可以实现热红外伪装.选择红外波段透明的常用薄膜材料CdSe、SiO2设计出在中远红外波段具有高反射禁带的光子晶体,利用薄膜光学理论的特征矩阵法计算了反射光谱.通过构造异质结光子晶体,实现了光子带隙的展宽,设计的双周期CdSe/SiO2异质结光子晶体基本上实现了中远红外双波段的高反射,其中在3.14～5.57μm和8.16～13.96 μm的光谱反射率都大于95%,较好地满足了中远红外双波段伪装兼容的要求.倾斜入射时光子晶体的TM波和TE波的反射光谱是不同的,TM波的带隙较之于垂直入射时减小,TE波的带隙较之于垂直入射时增大,TE波在中远红外波段具有高反射的连续区域明显比TM波的大得多.     

一维平板光子晶体中电磁波的模式和带隙

利用特征矩阵法研究了一维平板光子晶体中电磁波的模式及其带隙结构。推导出一维平板光子晶体中电磁波各个模式满足的条件,计算出TE波和TM波各模式的禁带随模式量子数、平板厚度以及入射角的变化规律。得出了一些不同于一维非受限光子晶体禁带的新结构。     

用平面波展开法计算二维方形光子晶体的带隙结构

用平面波展开法计算二维正方晶格光子晶体的带隙结构,对二维光子晶体的电磁波理论及周期介质中的Bloch波解进行了详细的推导,得出TE模和TM模下无缺陷时光子晶体的色散曲线,并设计了低频区域内具有较大带隙宽度的两种二维光子晶体的空间周期结构.经过大量的计算,发现硅中的空气柱型光子晶体在红外波段TE模和TM模存在重叠的绝对光子带隙,并分别研究了空气中的硅介质柱和硅中的空气柱的TM模带隙宽度随空气柱半径和填充比变化的规律.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.