基于1-3压电复合材料宽带超声换能器研究

电声转换效率与换能器带宽是评价聚焦超声换能器性能的重要指标。传统压电陶瓷制备的聚焦超声换能器,其电声转换效率与换能器带宽偏低。该文采用实验结合仿真模拟的方式,通过研究1-3压电复合材料中压电相的体积比、环氧相改性、调控匹配层阻抗与匹配层厚度对换能器性能的影响,开发了一种基于1-3压电复合材料的聚焦超声换能器,实现了82.3%的电声转换效率与140 kHz的换能器带宽。结果表明,与同等规格的传统压电陶瓷聚焦超声换能器相比,该超声换能器的两项指标分别提升了105%与250%,这为大功率聚焦超声换能器的设计开发提供了参考与指导。     

基于PZFlex的1-3压电复合材料横向振动模仿真

1-3型压电复合材料具有高机电耦合系数和低声阻抗,适用于制作水声和医疗超声换能器,但是1-3型压电复合材料的横向振动模会降低换能器的性能,限制换能器的小型化和高频化。该文设计了一组具有矩形压电陶瓷柱的1-3型压电复合材料,复合材料的厚度为0.32 mm,陶瓷柱宽度为0.08 mm,长度为0.10~0.25 mm,刀缝宽度为0.05 mm。利用有限元软件PZFlex进行了建模计算,仿真结果表明,复合材料的厚度谐振频率和反谐振频率分别为4.5 MHz、6 MHz,随着陶瓷柱长度的增大,横向谐振频率逐渐向低频处移动,当陶瓷柱长度和高度比值大于0.69时,横向谐振和厚度谐振发生模式耦合。该文基于复合材料设计了换能器,利用PiezoCAD软件计算得到换能器的中心频率为4.7 MHz。     

3-2型压电复合材料参数对厚度振动模的影响

3-2型压电复合材料在水声换能器应用中主要工作于厚度振动模态。应用切割填充法制备了四种3-2型压电复合材料,并通过改变复合材料中压电陶瓷的体积分数,实验测得了四种3-2型压电复合材料厚度谐振频率随体积分数增加而升高的速率,并分析了不同压电陶瓷与环氧树脂对样品厚度谐振频率变化率的影响。同时分析了复合材料反对称体振动模与厚度振动模的耦合,并提出了避免这种耦合的方法。     

3-2型压电复合材料参数对厚度振动模的影响

3-2型压电复合材料在水声换能器应用中主要工作于厚度振动模态.应用切割填充法制备了四种3-2型压电复合材料,并通过改变复合材料中压电陶瓷的体积分数,实验测得了四种3-2型压电复合材料厚度谐振频率随体积分数增加而升高的速率,并分析了不同压电陶瓷与环氧树脂对样品厚度谐振频率变化率的影响.同时分析了复合材料反对称体振动模与厚度振动模的耦合,并提出了避免这种耦合的方法.     

3-2型压电复合材料参数对厚度振动模的影响

3-2型压电复合材料在水声换能器应用中主要工作于厚度振动模态。应用切割填充法制备了四种3-2型压电复合材料，并通过改变复合材料中压电陶瓷的体积分数，实验测得了四种3-2型压电复合材料厚度谐振频率随体积分数增加而升高的速率，并分析了不同压电陶瓷与环氧树脂对样品厚度谐振频率变化率的影响。同时分析了复合材料反对称体振动模与厚度振动模的耦合，并提出了避免这种耦合的方法。     

串叠复合材料圆环阵水声换能器设计及制备

提出了一种新型高频宽带压电复合材料圆环阵换能器,综合采用了压电复合材料和多模耦合振动来拓展换能器带宽。通过ANSYS软件对其进行有限元建模仿真,得到了该换能器谐振频率和带宽随压电陶瓷圆环厚度、高度和平均半径的变化规律,并根据仿真结果确定了换能器敏感元件最优设计方案。由最优参数加工得到用于叠堆的两个压电复合材料圆环,并将两压电复合材料圆环轴向叠堆,最终制作了双圆环叠堆压电复合材料水声换能器。经测试,该新型换能器形成了明显的双模耦合振动,其-3dB工作带宽为320~410kHz,最大发送电压响应达147.8dB。研究结果表明,利用复合材料和多模耦合振动可以大幅度拓展高频换能器的带宽。     

一种改进型1-3-2压电复合材料的研究

高质量的压电换能器需要具备较高的机电耦合系数和灵敏度。该文在传统型1-3-2压电复合材料的基础上提出了一种改进型1-3-2压电材料,提高了压电换能器的机电耦合系数和换能器的接收灵敏度。通过有限元仿真分析了不同间距对改进型1-3-2压电材料敏感元件的谐振频率、反谐振频率及机电耦合系数的影响,并与传统1-3-2型压电复合材料进行了对比。结果表明,与传统型1-3-2压电复合材料相比,在相同间距条件下,改进型压电材料的机电耦合系数约大0.03。制做的3种不同间距改进型压电材料表明,间距为1 mm的改进型压电材料的机电耦合系数较大,约为0.68。     

有限元法分析1-3型压电复合材料换能器

1-3型压电复合材料圆柱型换能器由薄片状1-3型压电复合材料沿金属薄壁圆管周期排列粘贴而成。根据换能器实际结构和1-3型压电复合材料等效参数模型,利用有限元法在ANSYS中分别建立了两种仿真模型。为验证等效参数模型的可靠性,实验通过改变模型结构尺寸,使换能器内半径从20mm变化到50mm,每5mm作为一个数据点进行建模。仿真计算相同结构尺寸下两种模型的径向振动频率,比较显示两种模型仿真结果接近,平均相对误差仅2.3%。因此,可利用模型II代替模型I对1-3型压电复合材料圆柱型换能器进行仿真分析,从而简化建模和计算。在此基础上,利用模型II分别模拟了该种换能器在空气和水中径向振动频率附近的导纳、发射电压响应和接收电压灵敏度等性能。     

1-3-2压电复合材料机电理论分析和频率仿真

该文研究了1-3-2压电复合材料的厚度振动谐振频率与尺寸的关系。应用压电学和弹性动力学理论建立了机电等效图,对1-3-2压电复合材料的厚度振动模态进行了机电理论分析,并对其谐振频率进行了计算。利用有限元仿真软件分析了在厚度振动模态下,1-3-2压电复合材料谐振频率、反谐振频率与尺寸变化的关系。结果表明,纵向尺寸比变大时,频率曲线呈下降趋势;横向尺寸比变大时,频率曲线呈上升趋势;横纵尺寸比变大时,频率曲线呈缓慢下降趋势;基底厚度变大时,频率曲线呈先减小后增大趋势。4种情况中,纵向尺寸比对于整体的谐振和反谐振频率影响最显著。     

超声轴承用压电换能器结构设计与有限元分析

提出了一种超声轴承用新型径向挤压式压电换能器,对换能器的机电特性进行了有限元分析。明确了有限元建模方法,从模态分析角度分析压电换能器的谐振频率和径向最大振幅,依据模态分析结果对压电换能器的幅频特性进行谐响应分析,采用正交试验法对换能器结构进行优化设计,制作最佳结构压电换能器样机,并进行工作频率测试。实验结果表明,换能器径向振动谐振频率的有限元计算值与实验结果具有良好的一致性,证明了有限元计算的正确性,为超声轴承用压电换能器的设计研究提供重要价值。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.