90°离轴角红外滚仰式导引头光学系统

介绍了一种光机一体化结构的滚仰式红外导引头光学系统。光学系统的部分组件通过四块反射镜嵌入万向节支架,万向节支架由N360运动的滚转框架和90运动的俯仰框架组成,双框架结构进行滚仰式运动,使光学系统具有前半球的观察视场。光学系统为二次成像结构,由前组一次成像物镜、中继镜和后组倒像物镜三部分构成。由于导引头内部存在大的热梯度,前组需要单独消热差,而中继和后组共同消热差。利用热差互补原理的消热差设计方法获得各个透镜初始的光焦度,再由ZEMAX光学设计软件进行像差校正。分析结果表明,当环境热沉浸温度或热梯度温度从-40~80 ℃变化时,成像质量保持稳定,调制传递函数（MTF）接近衍射极限。光学系统满足光、机、热一体化设计要求。     

大视场小型无热化长波红外镜组设计

跟随红外镜头小型化、大视场化的趋势,利用ZEMAX设计了一款大视场无热化小型长波红外镜组。系统匹配384×288@17μm的非制冷型长波红外探测器,工作波段为8～12μm。系统F数为1.6,相比于传统红外镜头,视场角更大,全视场达72°,尺寸更小,总长仅为6.96 mm。主镜头仅用3片镜片,通过两种红外光学材料的搭配以及6面非球面实现像差的校正和光学系统的无热化,工作温度范围覆盖-40～60℃。仿真结果表明,在空间频率15 lp/mm处,全视场的调制传递函数大于0.5,空间频率30 lp/mm处,全视场调制传递函数大于0.15。同时为了增大红外探测器的填充因子,提高能量利用率,在系统中搭配设计了放置于红外传感器前的微透镜阵列。实现了红外光学系统的小型化,为红外热像仪在智能手机上的应用提供了解决方案。     

自由曲面在制冷型离轴三反光学系统的应用

研究了制冷型红外离轴三反光学系统成像原理和优化设计方法。给出了一个应用自由曲面的制冷型离轴三反射镜光学系统的设计。系统采用两个自由曲面反射镜和一个偶次非球面反射镜组成二次成像的结构形式,将制冷型红外探测器的冷光阑作为系统的孔径光阑,得到100%的冷光阑效率。第二和第三反射镜将孔径光阑成像在第一反射镜的位置,显著减小第一反射镜的口径。通过调整每个反射镜的偏心与倾斜,实现系统的无遮拦,使用自由曲面增大视场、校正像差、保证系统的成像质量。该系统的工作波段为3~5 m,焦距为450 mm,F数为2,视场为3.6622.931,各视场的调制传递函数在环境温度为-40~60℃的范围内均高于0.5,实现系统的无热化,并且结构紧凑。     

机械补偿式红外温度自适应光机系统的设计

总结了红外温度自适应光学系统的实现方式,理论分析了机械补偿法的设计过程,研制了一种机械补偿式红外温度自适应光机系统。其光学指标焦距f=50 mm,相对孔径1/1.2,适配长波非制冷红外焦平面探测器,其像素为640×480,像元大小17 m,工作温度:―40℃～+80℃。设计结果表明,各个温度参考点各个参考视场的弥散斑半径均小于系统艾里斑,并且像面照度均匀。在空间频率20 lp/mm处,光学系统的调制传递函数接近衍射极限。利用机械补偿方式实现了系统各项技术指标。     

温度对红外光学系统的影响分析及消热差设计

分析了温度对红外光学系统结构参数的影响,计算了温度变化引起系统的离焦量和调制传递函数,给出了红外光学系统消热差设计的基本原理;利用ZEMAX光学设计分析软件,结合实际的长波红外光学系统,分析其在20℃,－40℃和60℃时的成像质量。分析结果表明,该系统在常温时成像质量接近衍射极限,系统全视场调制传递函数在特征频率20 lp／mm处达0.6,87.6％的能量集中在探测器的一个像元内,成像质量优良;但是当温度在－40～60℃变化时,系统成像质量急剧恶化,不再满足使用要求,在分析的基础上采用折衍射混合光学被动式消热差技术中对其进行进一步设计,经消热差设计后该红外光学系统的成像质量得到了极大的改善,全视场调制传递函数在特征频率20 lp／mm处达0.55以上,且能量分布集中,满足红外探测系统的使用要求。     

反射式自由曲面头盔显示器光学系统设计

头盔显示器（HMD）作为一种头戴目视设备,具有小型化、轻量化的特点,同时为了获得良好的佩戴体验,要求合理的出瞳距、出瞳直径以及视场。为了同时满足头盔显示器的上述要求,采用紧凑的双反射镜结构来满足头盔显示器对体积和重量的要求,应用自由曲面增加设计自由度来校正大视场和非旋转对称结构引入的像差,并阐述了自由曲面补偿非旋转对称光学系统像差的基本原理以及该光学系统的设计方法与过程。该光学系统无色差,视场为5025,出瞳大小为8 mm,出瞳距大于27 mm。在奈奎斯特频率处全视场的调制传递函数大于0.4,可应用于新一代头盔显示技术。     

小型折反式短波红外光学系统设计

为解决纯折射式光学系统不易实现长焦小型化设计以及纯反射式光学系统不易实现较大视场的技术问题,采用折反式光学结构形式设计了一种焦距为500 mm、工作波段为0.9～1.7■m、F数为5的短波红外成像光学系统。该系统由抛物面主镜、二次曲面次镜以及后组透镜组成,光学系统总长度小于138 mm。设计结果表明,该系统结构紧凑、体积小、成像质量良好,在探测器对应的特征频率33 lp/mm处的调制传递函数(Modulation Transfer Function, MTF)值大于0.55,接近衍射极限。整机装配完成后进行了MTF测试及外景成像测试。实际测试结果与设计分析一致,满足应用需求。     

一种轴向变倍四视场中波红外光学系统

设计了一款长焦距大变倍比轴向变倍四视场中波红外光学系统.该光学系统由前固定组、变倍调焦组、中间补偿组、后固定组、反射镜一、反射镜二、中继组组成.光学系统采用光学补偿叠加机械补偿方式克服单一光学补偿或机械补偿变焦方式无法同时满足光学系统长焦距、大变倍比、光学系统小型化、光学系统宽温度范围(-40℃~70℃)温度补偿等问题,实现了兼具长焦距和大变倍比的轴向变倍四视场中波红外光学系统.设计结果表明该光学系统像质良好,满足热象仪整机使用要求.     

制冷型大面阵自由曲面离轴三反光学系统设计(特邀)EI北大核心CSCD

针对超大面阵红外遥感探测的需求,设计了一个基于自由曲面的超大矩形视场制冷型离三反光学系统。系统采用一个偶次非球面反射镜和两个自由曲面反射镜组成二次成像的结构,具有实出瞳并与冷光阑匹配,能够实现100%的冷光阑效率。与其他离轴三反系统相比,该系统最大特点在于其适配了4 k分辨率的大面阵红外探测器,具有视场大、无遮拦、成像质量好等技术特点。系统焦距为150 mm,工作波段为1.5~5μm,工作F数为5,视场为30°×25°。结构上,主镜采用偶次非球面,次镜和三镜采用XY多项式自由曲面,以校正大视场下的各种像差,系统在各个视场下调制传递函数在25 lp/mm处均大于0.4,满足大面阵红外探测器的成像质量要求。     

中波红外三视场变焦光学系统设计

三视场变焦光学系统相对于其他形式的变焦系统具有机械结构简单、可靠性高、变焦时间短等优点。采用320240分辨率、像元尺寸30 m30 m制冷型探测器,二次成像方式设计了一种工作于3～5 m中波制冷型三视场红外光学系统,系统视场角1.4～23.8,F数为４,可实现焦距为30mm/100mm/500mm。设计中采用了硅和锗两种材料校正谱段内色差,采用了一个非球面校正系统球差,两个反射镜折转光路的方式实现系统轴向尺寸的缩减,整个系统外形尺寸小于210 mm160 mm120 mm,系统具有外形尺寸小、变焦结构简单、成像质量高等特点,在空间频率17 lp/mm处,系统调制传递函数（MTF）均在0.5以上,能量集中度大于70%。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.