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1.
提出并制作了转动竖直微镜的微机械光开关,采用曲线形状的电极设计,有效地减低了悬臂梁驱动器的吸合电压,采用体硅深刻蚀技术结合(110)硅的各向异性腐蚀技术制备了光开关芯片和耦合对准的U形槽和卡簧。芯片经初步封装后进行了电学测试和光学测试,测得吸合电压78.5V,谐振频率2.3kHz,光开关损耗5dB,隔离度45dB。  相似文献   

2.
MOEMS阵列光开关的微反射镜的制作   总被引:2,自引:0,他引:2  
通过各向异性湿法腐蚀工艺利用 (110 )硅片制作了 8× 8阵列光开关的微反射镜阵列 ,反射镜面为 { 111}面 ,表面粗糙度低于 10nm ,垂直度好于用同样的方法在 (10 0 )硅片上制作的反射镜。  相似文献   

3.
提出了一种新型的腔体式共面波导型微机械射频开关的结构,可动的金属/电介质的复合膜结构的共面波导既可作射频开关,同时也构成微波信号的传输路径。在普通电阻率(4-8Ω·cm)的硅片上,采用表面微机械加工技术制作出体积大小为:1000μm×600μm×300μm的射频开关,驱动电压为35V,在射频信号频率为50MHz到10GHz的范围内,该开关的插入损耗低于2dB,隔离度高于40dB。  相似文献   

4.
本文设计并制作了一种用于Ka波段分布式MEMS传输线(DMTL)移相器的MEMS电容式并联开关.通过理论计算和工程经验,大致定义了开关的结构尺寸.采用HFSS软件建立了开关的三维电磁场模型并优化了关键结构参数.仿真表明:开关在Ka波段插入损耗小于0.15 dB,回波损耗大于15 dB.采用CoventorWare软件进行了开关的机电耦合仿真,得出其驱动电压为2.1 V.为了满足流片单位表面微加工工艺的约束,对开关的设计版图和微加工工艺进行了多轮改进,得到初步的MEMS电容式并联开关工艺样品.单个MEMS开关的动态特性测试结果表明:施加36 V驱动电压时,微桥下拉的高度约为2μm.测得的36 V驱动电压与初始设计的2.1 V有较大的差异,原因在于限于流片单位的工艺约束,临时修改了结构设计,主要变化是增加了微桥的高度以及微桥(即上电极)与下电极之间的初始间距.  相似文献   

5.
李九生 《光电工程》2005,32(10):54-57
提出一种新型LiNbO3光纤型电光调制器。用LiNbO3光纤制成的M-Z干涉计置于SiO2基体上,在铌酸锂光纤上部制作电极完成该调制器制作。利用有限元法对非对称共面带线(ACPS)和对称共面带线(SCPS)两种电极的光纤型调制器微波等效折射率、调制带宽和特性阻抗进行分析。在工作波长1.5μm下,SCPS电极光纤型调制器宽带74.03GHz,半波电压为2.29V;ACPS电极光纤型调制器宽带可达82.25GHz,半波电压为1.37V。结果表明,后者性能优于前者,但两种电极的光纤型调制器都可获得大带宽、低半波电压和良好的阻抗匹配。  相似文献   

6.
非对称光纤反射镜的可调谐光纤激光器   总被引:1,自引:0,他引:1  
提出一种非对称窄带光纤环形反射镜结构的可调谐掺铒光纤激光器。980nm泵浦光对掺铒有源光纤进行抽运,高双折射光纤、偏振控制器(PC)和光纤耦合器构成窄带光纤反射镜,窄带光纤反射镜和普通光纤反射镜组成激光谐振腔,利用窄带光纤反射镜工作带宽纳米量级的特性得到单纵模激光。调整偏振控制器改变反射镜对不同波长的反射率,实现可变波长的激光输出。实验表明,该激光器的工作带宽为8nm,120mW泵浦光条件下最大输出功率为4mW,3dB带宽(脉冲的半高宽度)小于0.2nm,边模抑制比为20dB以上,在1527nm~1535nm的波长范围内观察到稳定激光输出。  相似文献   

7.
一种新型微变形镜键合技术   总被引:1,自引:1,他引:0  
对一种新型可变形反射镜加工中的硅-玻璃阳极键合工艺进行了研究。设计了一种通过导线将压焊点引至键合区的特殊结构,使得键合过程中台柱与驱动电极保持等电势,从而有效避免了电极和结构之间的相互作用所引入的缺陷,使得最终获得的驱动电极的有效面积接近100%。针对键合前后气体体积收缩导致的镜面凹陷问题,提出在玻璃上加工出贯穿器件的浅槽结构。实验结果表明,在380C,1atm的环境下施加-1000V电压进行阳极键合时,当浅槽深度大于200nm时,将获得较好的镜面质量。  相似文献   

8.
FGQF2 0 0 0A型前置放大器是哈尔滨电影机械厂研制生产的产品,具有低失真、低噪声、工艺结构合理等特点。它与CPA4 0 1功率放大器、PS L型激励灯电源(或FH 2 0 1型双红光电源)、机柜及PS4 2 0 8型扬声器系统一起配套用于松花江5 5 1 5B30 0 0型放映机的电影还音。一、技术指标①、输入信号电压:≤5mV。②、额定输出信号电压:0dB (即0 .775V)。③、谐波失真系数:≤0 .1 5 % (1KHz)。④、输入过激励能力:≥2 0dB (即≥7.75V)。⑤、频率特性:4 0Hz~1 2 .5KHz±1 .5dB。⑥、信号噪声比:>6 5dB (线性)。⑦、电源电压:AC2 2 0V±1 0…  相似文献   

9.
刘国祥  胡力  叶昆珍 《光电工程》2006,33(2):65-68,144
利用耦合模理论对光纤熔锥声光器件进行了数值模拟,得到了全光纤声光衰减器传输谱和可调谐性。分析了带宽与声波长、耦合长度的关系。数值分析结果表明,声波在光纤熔锥中引起的轴向电介质微扰、耦合长度和工作波长都会对器件的传输谱产生影响,选择合适的设计参数可以制作较为理想的声光衰减器。实验上获得了损耗小于0.2dB,带宽大于200nm,动态范围为20dB的单模光纤熔锥可变衰减器,所得结果与理论分析相符合。这种器件可用于光纤通信及光纤传感。  相似文献   

10.
大位移自对准光开关微动作器的模拟和制作   总被引:1,自引:0,他引:1  
报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。模拟结果表明,该微动作器的第一模态频率远低于第二模态,镜子的位移由梁的扭转引起。在32.8V的电压驱动下,上电极的前端位移是69.6μm,镜子的有效位移是57μm。测到第一模态频率是500Hz。利用本结构可成功地解决开关速度和大位移的矛盾。这样的位移足够使用Coming OptiFocus Collimating Lensed Fiber来对准,从而获得低插入损耗。  相似文献   

11.
A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils.  相似文献   

12.
The end of 2007, over 200 unit products of more than 80 Chinese firms have passed the quality grade certification for liquor products. These products involve distilled spirits, beer, wine, yellow wine, fruit syrup wine and others, and cover over 80% of the national top-branded liquor products.……  相似文献   

13.
Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster.  相似文献   

14.
We studied a combined effect of the cryoprotectants both of lipid and carbohydrate origin at the presence of DMSO or without it on cell viability and the RNA synthesis in the embryonic mollusc and echinoderm cell cultures obtained at different developmental stages. Cryoprotective properties of exogenous lipids correlated with their thermotropic behavior. Lipid extracts from marine hydrobiontes, which thermal transitions are characterized by relatively small part of calorimetric thermogram area lying at temperatures above 0 °C (6–18%), were found to possess a considerable cryoprotective activity. The results are discussed in relation to the prediction of the cryoprotective activity of lipid extracts for marine animal cells. In addition, it was found that marine invertebrate cells can be cryopreserved without DMSO at the presence of trehalose and lipid extracts of some marine hydrobiontes.  相似文献   

15.
Pure silver is used extensively in the preparation of high-temperature superconductor wires, tapes, films, and other configurations in which the silver not only shields the superconducting material from the surrounding materials, but also provides a degree of flexibility and strain relief, as well as stabilization and low-resistance electrical contact. Silver is relatively expensive, but at this stage of superconductor development, its unique combination of properties seems to offer the only reasonable means of achieving usable lengths of conductor. In this role, the low-temperature physical (electrical, thermal, magnetic, optical) and mechanical properties of the silver all become important. Here we present a collection of properties data extracted from the cryogenic literature and, to the extent possible, selected for reliability.  相似文献   

16.
ABSTRACT

The production of iron in Biscay (Basque Country, Spain) has been a hallmark of this territory of the North of the Iberian Peninsula throughout its history. The Archaeology team of the Basque Country Mining Museum has spent 13 years, so far, studying the origins of this activity through the evidences left at the old pre-hydraulic iron production workshops known as mountainside ironworks (ferrerías de monte) or haizeolak. It has catalogued 170 archaeometallurgical sites of this type in Biscay, and the archeological excavation of some of them has led to the knowledge of the different stages of the production process that took place in these workshops. The team has also experimentally reproduced the work carried out in a mountainside ironworks from the High Middle Ages, and it has currently started the characterization process of this type of activity through the study of the collected materials.  相似文献   

17.
As demands about environment protection are growing up, dry cutting technology is getting more and more concerns from all over the world. Main works performed here are study on dry cutting performances and wear mechanisms of M2high-speed steel (HSS) twist drills with CrAlTiN multicomponent coatings, which was deposited using magnetron sputter ion plating system, in drilling 45 and 30CrMnSiA steel, and their comparisons to those in drilling the same steel but using monolayer CrN and commercial TiN coated drills. Drilling performances of drills are evaluated mainly through the measurements of width on outer corner flank land and the cutting forces. Results show that performances of CrAlTiN coated drills are better than those of monolayer CrN and TiN coated drills. In drilling 45 and 30CrMnSiA steel, the average tool life of the CrAlTiN coated drills are 17.2 and 11.8 times higher than those of the uncoated drills. Observing wear of the drill with scanning electronic microscope, results show that there is no crack or spallation of the CrAlTiN coatings in wear zones. Main mechanism of the wear here is adhesion.  相似文献   

18.
Arc spraying coatings are widely used in various applications, but uncommon in cast iron substrate. Different surface pretreatment technology is tested on substrates of gray cast iron. Surface roughness and residual stress were measured by TR200 and X-ray diffraction analyzer. Influence of different surface pretreatment methods ( dry blasting and fusebond) on roughness and residual stress was analyzed. The arc-sprayed coatings of wire 3Cr13 (φ2mm) on gray cast iron substrate is studied. The microstructure and interface of bonding layer were observed by SEM. The bond strength was taken by tensile test. Results show that bond strength with grit blasting is higher than fuse-bond; it is feasible to make wire 3Cr13 coating with arc spraying on cast iron substrate roughened by grit blasting.  相似文献   

19.
TiO2 ceramic coatings with thickness of 20 μm were formed on the surface of pure titanium by micro-plasma oxidation. Their micro-structures were investigated by by using X-ray diffraction and their surface images were detected by using scan electronic microscope. There were three kinds of TiO2 coatings, pure anatase type TiO2 phase, mixed phases consisted of rutile type TiO2 phase and anatase type TiO2 phase, pure rutile type TiO2 phase. The coating surface with the pure anatase type TiO2 phase is rough, while the coating surface with the pure rutile type TiO2phase is smooth. The upper coating surface with the mixed type TiO2 phases is anatase type TiO2 structure and the subsurface of the TiO2 coating is rutile type TiO2structure.  相似文献   

20.
The insightful discussion of the relationship between the construction of metallographic and fatigue life and proposition of mathematical relationships describing this relationship was conducted in the paper. This paper presents a method for estimating the fatigue life, based on the construction of the microstructural material taking into account the grain size and the participation of ferrite and pearlite phase.  相似文献   

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