化学气相沉积碳化硅平面反射镜的高精度超光滑加工

针对化学气相沉积碳化硅平面反射镜的材料特性与技术要求,制定了"传统研抛 离子束抛光"的工艺方法,并在一块口径为100mm的试件上进行了验证。首先基于加工效率和亚表面损伤选择合理的工艺参数,并采用磁流变抛光斑点法测量各道工序的亚表面损伤,并以此为依据规划下一道工序的材料去除量;然后分析抛光表面粗糙度的影响因素,在此基础上对抛光工艺参数进行优化,获得表面粗糙度均方根方差值为0.584nm的超光滑表面,并控制工件的面形误差;最后采用离子束抛光进行精度提升,使工件的低频和中频误差均大幅下降,最终工件的面形精度均方根方差值达到0.007λ(λ=632.8nm),表面粗糙度均方根方差值为0.659nm。     

红外线聚光非球面透镜的单点金刚石镜面切削方法

根据硬脆性材料的延性域加工机理和面形误差补偿加工方法,研究了圆弧形和平头形刀具的单点金刚石延性域切削方法,在加工中直接获得了镜面切除面;并利用数控技术进行误差补偿,克服了因加工试验、刀具磨损、机械振动、热变形等造成的加工误差导致的非球面的面形精度降低和表面粗糙度恶化.并将该方法用于采用圆弧形刀具对红外线聚光的φ70mm非球面锗透镜进行单点金刚石切削实验中.试验结果表明面形误差补偿加工方法可以进一步消除加工误差,将非球面的面形精度PV值从微米级(1.23μm)提高到亚微米级(0.36μm)的程度,表面粗糙度R_a从亚微米级(0.27μm)改善到超亚微米级(0.04μm)的范围.     

热压硫化锌的超精密磨削加工

针对用传统车削或研磨抛光方法加工大尺寸非球面热压硫化锌透镜存在的不足,采用金刚石砂轮磨削加工方法对热压硫化锌材料进行了加工实验。通过压痕、单颗粒金刚石刻划和磨削正交实验,研究了该方法在磨削加工过程中的塑性域去除机理及其亚表面损伤情况,并优化了超精密磨削加工工艺参数。压痕实验发现热压硫化锌材料在载荷作用下易于出现径向裂纹和微裂纹,其断裂韧性为2.643842MPa/m1/2,临界切削深度为1.808μm。单颗粒金刚石刻划实验结果表明,热压硫化锌材料在较小的切削深度下可以实现塑性域去除,但在机械去除过程中易出现多种形式的亚表层损伤。磨削实验结果表明,磨削深度是影响表面光洁度的主要因素,随着磨削深度的增大表面光洁度降低,最佳表面粗糙度为7.6nm。工作台进给速度是影响面形精度的主要因素,且平面磨削的面形精度PV值为0.185~0.395μm。研究结果表明,磨削加工热压硫化锌材料可以获得纳米级表面粗糙度。     

复杂曲面碳化钨密封零件精密磨削实验研究

碳化钨为典型的碳化物陶瓷材料,具有广泛的应用前景。其具有高硬度、高脆性及很高的耐磨性,所以难以采用传统的车削、铣削等工艺进行加工。在碳化钨工件上加工出复杂的曲面结构,并保证工件的面形精度及表面粗糙度则更加困难。为获得高表面质量的复杂曲面碳化钨密封工件,采用杯形金刚石砂轮单点磨削的方法实现碳化钨材料加工;设计压电陶瓷驱动柔性铰链微进给机构精确控制砂轮切深方向运动,从而实现复杂曲面加工的成形运动;探索最优工艺参数获得高面形精度和低表面粗糙度。分析了碳化钨磨削加工材料去除机理,以此指导柔性铰链精密进给机构设计,并规划杯形砂轮改善面形精度及表面粗糙度的磨削方法。实验结果表明:采用青铜基及树脂基杯形砂轮以45°倾角单点磨削碳化钨样件,其表面粗糙度值Ra由初始的500nm减小到15nm,面形精度RV值达到0.25μm。该装置可以在普通机床上磨削出高质量的碳化钨工件。     

高精度光学表面磁流变修形技术研究

作为一种确定性子孔径的光学加工方法,磁流变抛光具有高精度、高效率、高表面质量以及无亚表面损伤的特点,有能力对各种形状的光学零件进行加工。本文系统的介绍了磁流变抛光高精度光学表面的关键技术,并采用自研的KDMRF－1000磁流变抛光机床和KDMRW-1水基磁流变抛光液对直径100mm的K4材料平面反射镜和直径200mm的K9材料球面反射镜进行加工实验。样件一面形收敛到PV值55.3nm,面形RMS值5.5nm;样件二面形收敛到PV值40.5nm,面形RMS值5nm。样件的表面粗糙度均有显著改善。     

空间相机反射镜碳化硅材料性能测试

通过对SiC样件加工研磨及反射率等性质的测试,得到了材料的性能数据,分析了用SiC材料制备反射镜毛坯的几种方法的优缺点。采用Lanmda-9分光光度计,对SiC在不同表面镀硅、镀银、以及镀硅后再镀银的条件下进行了反射率测试,得出在镀硅再镀银条件下,反射率最高,达到98%的结果。利用Wyko干涉仪对国产SiC长条形样镜进行研磨分析测试,测得表面粗糙度值为6.27 nm。该材料在某型号离轴三反光学系统中作为反射镜得以应用和验证,测得被加工后,镜面面形PV值达到0.068 λ,RMS值为0.01 λ(λ=632.8 nm)。此结果表明,材料的性能达到了可加工可应用的要求。     

基于固结磨粒的单晶蓝宝石自旋转磨削加工方法

利用固结磨粒自旋转磨削加工方法，通过金刚石磨削和化学机械磨削实现了蓝宝石晶片的高效、高质量平坦化加工。采用不同磨粒粒径的金刚石砂轮实现了蓝宝石晶片较高的材料去除率或较好的表面质量。开发了高磨粒浓度Cr2O3砂轮，采用化学机械磨削对金刚石磨削后的蓝宝石晶片进行平坦化加工。实验结果表明，化学机械磨削能够去除金刚石磨削的表面和亚表面缺陷，最终获得表面粗糙度Ra＜1 nm、无/微损伤的蓝宝石晶片。通过理论分析单颗金刚石磨粒的磨削力，发现磨粒粒径是影响材料去除率和表面质量的主要影响因素。通过XPS分析证明了Cr2O3和蓝宝石之间的固相反应过程。     

进动气囊抛光的驻留时间优化

提出了一种新的进动气囊抛光驻留时间算法,用于实现高精度的光学玻璃零件的加工。首先,通过抛光工艺试验确定抛光去除率函数;在矩阵迭代算法的基础上,给定一个合适的驻留时间初值函数。然后,采用分层阈值去除法进行驻留时间的优化求解,并加上残余误差方差最小的判定条件,从而得到完整的驻留时间函数。该算法适用于非球面、自由曲面等光学玻璃元件的抛光加工。用MATLAB对残余面形误差进行了仿真,仿真结果表明残余误差精度PV值可以收敛到0.1μm左右。最后,对光学玻璃平面进行了抛光。实际抛光后,该玻璃表面粗糙度Ra从抛光前的0.159μm减小到0.024μm,面形精度PV值由抛光前的0.756μm减小到0.158μm。得到的结果验证了提出驻留时间算法的合理性,表明该算法可为以后进行复杂面形工件的气囊抛光研究提供理论基础。     

柱面微透镜阵列的精密磨削

柱面微透镜阵列的加工精度要求高,加工效率低,采用具有微细轮廓结构的成形砂轮进行磨削加工能够极大地提高加工效率。为了预测成形砂轮磨削工件的面形误差和表面粗糙度,建立了成形砂轮磨削仿真模型。通过滤波方法分析和模拟微细结构成形砂轮的磨粒突出高度的偏态分布特征,结合实测的砂轮的轮廓形状和跳动完成了整体的空间砂轮的重构,同时建立了砂轮表面磨粒的磨削运动学模型,模拟出工件磨削加工后的表面形貌。最后,开展磨削实验验证了仿真模型的有效性。对比仿真与实验结果可知,面形误差PV值的偏差为5.78%,Ra值的偏差为17.3%,Rz值的偏差为12.9%。该磨削仿真模型能有效预测磨削表面的面形误差和表面粗糙度。     

基于玻璃小孔的超声波加工实验研究

在对玻璃小孔进行超声波加工实验的基础上，分析了实验样品中出现的边崩和表面加工质量的缺陷原因，提出了避免边崩的措施，探求了磨料颗粒大小对加工形成的表面粗糙度进行了测试分析。实验结果表明，随着磨料粒度的提高，即磨粒直径的减小，加工表面粗糙度值降低，孔的精度满足建筑安装和装璜的要求。     

离子束螺旋扫描方式修正光学镜面方法

研究基于螺旋扫描方式的光学镜面离子束修正方法.根据离子束去除函数的特性,将螺旋扫描加工过程简化成线性过程并建立工艺过程模型,采用基于Bayesian原理的改进Richard-Lucy迭代法求解驻留时间.在分析驻留时间的连续速度实现基础上,给出螺旋路径参数的确定准则.建立螺旋扫描加工方式的工艺流程并进行试验验证研究.试验研究对φ100平面镜和φ200非球面镜修形加工得到了面形方均根误差均优于0.01λ.研究结果表明:极轴加工与普通的全口径加工一样是一种高效率、高确定性的加工方法,能够对镜面进行精确修形,同时可以节约加工成本.     

基于Bayesian原理的低陡度光学镜面面形误差离子束修正驻留时间算法

离子束修形是一种高效修除镜面误差的技术,驻留时间求解算法是此技术的关键问题之一。以光学镜面计算机控制成型原理为基础,建立基于Bayesian原理的平面镜面驻留时间算法,对数据边缘进行Gaussian延拓以消除边缘效应。分析驻留时间近似速度实现方式的实现误差与工艺参数的关系,通过在算法中引入附加光滑修正因子以提高驻留时间实现精度。在适当的路径规划下,将低陡度非球面修形过程近似用平面修形过程线性模型来描述,最终形成低陡度光学镜面面形误差离子束修正中驻留时间的快速近似算法。利用此算法对 100平面镜和 200球面镜进行修形加工,加工收敛率均可达9。研究结果表明：线性化近似模型是合理的,速度近似计算是可行的,基于Bayesian原理的低陡度非球面驻留时间求解算法是一种快速高效面形控制技术,可对镜面进行确定性精确修形。     

Nano-abrasion machining of brittle materials and its application to corrective figuring

A method of ultraprecision abrasion machining named “Nano-abrasion machining” is proposed for optical finishing of brittle materials. The fundamental characteristics and its applicability for corrective figuring to improve form accuracy of optics of brittle materials are investigated. It is experimentally ascertained that the material removal rate and surface roughness are suitable for optical finishing. However, the cross-sectional profile of the machined spot that is dependent on the collision angle is a combination of V- and W-shape, which is unsuitable for the corrective figuring. Therefore, circular motion machining is introduced and a preferable profile with an axis-symmetric V-shape is realized. The machining method is applied to corrective figuring of optical glass of BK7. The NC program is generated with a computer program developed by modifying the scanning motion and the form accuracy is predicted. According to the simulation results, corrective figuring is performed. The flatness is improved from PV = 151 to 29 nm. From the experimental results, it is clarified that the nano-abrasion machining is applicable to corrective figuring of brittle materials.     

Form Error Characterisation by an Optical Profiler

Form errors are deviations of the machined surface from the geometrical surface excluding position errors, waviness and roughness. From a functional point of view, as for surface roughness, form error characterisation is also important. In the present work, an optical profiler is used to measure and numerically characterise form errors such as roundness and cylindricity of cylindrical surfaces. A double orientation method using mean value analysis has been applied to separate the workpiece error from the spindle error during roundness measurement. Software is developed for data generation, fitting the reference data for assessing form errors in terms of statistical and functional parameters including new parameters. An optical profiler measures all the surface irregularities and hence can be used to study both micro and macro errors of the profile measured. A study of both roughness and roundness parameters along the circumferential direction is made for the unfiltered signal using different filter cut-off values. It is known that filtering greatly affects the value of the form error parameters measured. The form measurements obtained by the optical profiler are compared with the stylus profiler and the results are presented.     

Trajectory planning of optical polishing based on optimized implementation of dwell time

This paper presents a study on the trajectory planning of optical polishing based on an optimized implementation of dwell time to improve the polishing quality and efficiency of optical surfaces. The large-scale, sparse, and ill-posed linear equation solution is transformed into a quadratic programming problem with boundary constraint, and the monotone projection gradient method is adopted to obtain an optimal dwell time solution by considering its fluctuation characteristic. Then, parametric polishing paths are constructed using cubic B-spline curves to guarantee one-to-one correspondence between each curve segment and dwell time of a removal spot. Finally, an interpolation process of polishing trajectory is proposed on the basis of the equal–proportional feed rate adjustment strategy to improve the implementation accuracy of dwell time. Simulation and experimental results show that the proposed dwell time algorithm and spline interpolation method can considerably improve the solution accuracy of dwell time and the convergence rate of the form error during polishing. These results provide important scientific basis and technical support for the high-efficiency and high-precision polishing of large-aperture aspheric optical surfaces.     

F-Theta自由曲面透镜的精密与镜面磨削

针对光学玻璃的F-Theta自由曲面透镜加工困难等问题,提出将金刚石砂轮的椭圆环面代替圆环面,进行F-Theta自由曲面磨削加工,研究形状误差的补偿磨削方法和光学玻璃的镜面磨削工艺。根据F-Theta透镜的自由曲面建立砂轮与工件相切的刀具轨迹法向算法。采用#46粗金刚石砂轮修整成椭圆环面,提出自由曲面磨削的法向误差补偿加工模式。最后,采用#3000超细金刚石砂轮的椭圆环面进行轴向磨削试验。试验结果表明:传统的垂直误差补偿磨削可减小面形误差45.9%及其PV值11.6%;而新提出的法向误差补偿磨削可减小面形误差47.9%及其PV值41.5%。此外,超细砂轮磨削可使得自由曲面的粗糙度达到28 nm,其镜面磨削工艺有别于较粗砂轮磨削工艺。因此,椭圆环面砂轮的法向补偿磨削是提高自由曲面加工精度的有效方法,而且,无需研磨抛光就可以实现光学玻璃的自由曲面镜面磨削。     

Form error compensation in single-point inclined axis nanogrinding for small aspheric insert

Based on an examination of traditional arc-enveloped grinding method, a single-point inclined axis nanogrinding method is presented to grind an aspheric insert by compensating tool setting error, radius error, and residual form error. Profile data from on-machine measurement are used to obtain the tool setting error and radius error of grinding wheel, as well as the normal residual form error. Compensation method of single-point inclined axis nanogrinding is built up for generating new compensation path. Grinding test of aspheric tungsten carbide insert with diameter 9.5 mm is conducted to evaluate performances of the grinding mode and compensation method. A last form error of 200 nm in peak to valley and surface roughness of 2.243 nm in Ra are achieved. These results indicated that the form error compensation method and single-point inclined axis nanogrinding mode can significantly improve form accuracy and surface roughness of ground surface.     

Optimization strategy for the velocity distribution based on tool influence function non-linearity in atmospheric pressure plasma processing

Atmospheric pressure plasma processing (APPP) is proved to be potential in the fabrication of optical elements with high efficiency and near-zero damage. However, high convergence rate in the figuring process is hard to achieve because of the tool influence function (TIF) non-linearity. Directly solved dwell time map by conventional deconvolution methods does not consider the non-linear thermal effect, which leads to significant figuring error. In this paper, the optimization strategy for TIF non-linearity based on the velocity distribution in APPP is presented. The exponential model of TIF with non-linearity is established by trench experiments. A series of simulations are also conducted to analyze the thermal effect of non-linearity on the figuring process, indicating the TIF constantly changes with velocity distribution. Two evaluation parameters, relative balance factor and velocity concentration factor, are proposed to investigate the figuring capacity of calculated velocity distribution. With two evaluation parameters, the optimization strategy of velocity distribution based on TIF selection is proposed to suppress the non-linearity. Verification experiments are carried out to validate the two optimized TIFs. The results show that high convergence is achieved to be 72.41% and 82.81% for root-mean-square value respectively, which proves the feasibility of the proposed optimization strategy.     

全频段亚纳米精度氟化钙材料加工

考虑用CaF_2材料制作投影光刻物镜可以明显提高其性能指标,本文研究了CaF_2材料加工工艺的全流程,以实现CaF_2材料的全频段高精度加工。首先,利用沥青抛光膜和金刚石微粉使CaF_2元件有较好的面形和表面质量。然后,优化转速、抛光盘移动范围、压力等加工工艺参数,并使用硅溶胶溶液抛光进一步降低CaF_2元件的高频误差,逐渐去除加工中产生的划痕并且获得极小中频误差(Zernike残差)和高频粗糙度。最后,在不改变CaF_2元件高频误差的同时利用离子束加工精修元件面形。对100mm口径氟化钙材料平面进行了加工和测试。结果表明:其Zernike 37项拟合面形误差RMS值可达0.39nm,Zernike残差RMS值为0.43nm,高频粗糙度均值为0.31nm,实现了对CaF_2元件的亚纳米精度加工,为研发高性能深紫外投影光刻物镜奠定了良好基础。     

光学自由曲面快速刀具伺服车削误差的补偿

受各种误差因素以及周期性变化的切削力的影响,快速刀具伺服金刚石车削技术往往难以用一次车削获得满足光学性能要求的自由曲面。本文提出了一种利用线性差动传感器(LVDT)实现高精度接触式自由曲面在位测量的方法。该方法结合两自由度快速刀具伺服系统,实现了基于快速刀具伺服(FTS)的自由曲面车削加工的误差补偿。试验结果表明,该技术将自由曲面的加工精度提高了20%,表面粗糙度降低18.1%,解决了FTS系统与机床运动的同步问题,可补偿机床xyz三向运动误差,可用于自由曲面加工误差的修正。该方法还可用于不对称幅度较大的曲面或硬脆性材料的加工等,故促进了高精度光学自由曲面的推广应用。