雪崩击穿条件下4.5kV IGBT器件的背面优化研究

The static avalanche breakdown behavior of 4.5 kV high-voltage IGBT is studied by theory analysis and experiment. The avalanche breakdown behaviors of the 4.5 kV IGBTs with different backside structures are investigated and compared by using the curve tracer. The results show that the snap back behavior of the breakdown waveform is related to the bipolar PNP gain, which leads to the deterioration of the breakdown voltage. There are two ways to optimize the backside structure, one is increasing the implant dose of the N C buffer layer, the other is decreasing the implant dose of the P C collector layer. It is found that the optimized structure is effective in suppressing the snap back behavior and improving the breakdown characteristic of high voltage IGBT.     

4500V SPT IGBT 动静态损耗优化

本文关注高压IGBT动静态性能的优化。对4500V增强型平面IGBT进行研究,该结构在阴极一侧具有载流子存储层。其中垂直结构采用软穿通(SPT)结构,顶部结构采用增强型平面结构,该结构被称为SPT IGBT,仿真结果显示4500V SPT 具有软关断波形,与SPT结构相比提升了导通压降和关断损耗之间的折衷关系。同时,对不同载流子存储层掺杂浓度对动静态性能的影响也进行了研究,以此来优化SPT IGBT的动静态损耗。     

基于实际结温分布中小电流过趋热效应的验证

对于从红外热像图得到的实际的晶体管结温分布,通过热谱分析方法获得该温度分布对应的热谱曲线,进而建立了晶体管子管并联模型,并在此基础上,经过实验和理论计算证实了pn结中小电流过趋热效应存在的真实性.当结温分布不均匀时,对于通过pn结的电流,小电流比大电流更具有趋热性.即电流越小,高温区与低温区电流密度的比值越大,电流越集中在高温区,且集中区域的面积随着电流的减小而缩小.利用这一特性可以研究器件热电不稳定性,结温分布的不均匀性及不均匀度,峰值结温的估算等,这对于半导体器件可靠性分析具有重要的意义.     

基于实际结温分布中小电流过趋热效应的验证

对于从红外热像图得到的实际的晶体管结温分布,通过热谱分析方法获得该温度分布对应的热谱曲线,进而建立了晶体管子管并联模型,并在此基础上,经过实验和理论计算证实了pn结中小电流过趋热效应存在的真实性.当结温分布不均匀时,对于通过pn结的电流,小电流比大电流更具有趋热性.即电流越小,高温区与低温区电流密度的比值越大,电流越集中在高温区,且集中区域的面积随着电流的减小而缩小.利用这一特性可以研究器件热电不稳定性,结温分布的不均匀性及不均匀度,峰值结温的估算等,这对于半导体器件可靠性分析具有重要的意义.     

一种全新的基于小电流过趋热效应的峰值结温电学测试方法

It has been a scientific and technological problem in the field of microelectronics for several decades that the electrical method is used to measure the peak junction temperature of power transistors. Based on the excessive thermotaxis effect of low current, a novel electrical measurement method of the peak junction temperature is presented in this paper. The method is called the thermal spectrum analysis method of transistors, simply designated TSA （thermal spectrum analysis method）. Unlike the common method which uses a single measuring current, TSA uses multi-step currents to measure temperature-sensitive parameters. Based on the excessive thermotaxis effect of low current and the sub-transistor parallel model, the peak junction temperature and non-uniform property of junction temperature distribution are analyzed successfully.     

不同温度下半导体硅势垒的正向I-V特性曲线的汇聚特性

以正向电压为自变量,以正向电流的对数为应变量,以温度为参数得到的p-n结的I-V-(T)特性曲线在第一象限中近似汇聚于一点.汇聚点对应的电压近似等于半导体材料的禁带宽度.汇聚点可以用来获取任意温度下的I-V特性曲线.     

SPTC~+-IGBT characteristics and optimization

A novel advanced soft punch through(SPT) IGBT signed as SPTC-IGBT is investigated.Static and dynamic characteristics are simulated based on the 1200 V device structure and adopted technology.Extensive research on the structure optimization of SPTC-IGBT is presented and discussed.Compared with the structure of conventional IGBT,SPTC-IGBT has a much lower collector-emitter saturation voltage and better switching characteristics.Therefore it is very suitable for applications blocking a voltage higher than 3000 V.In addition,due to the improvement of switching speed achieved by using a thinner chip,SPTC-IGBT is also very competitive in 1200 V and 1700 V applications.     

RC-IGBT的snap-back现象及其仿真

The RC-IGBT(reverse conducting insulated gate bipolar transistor) is a new kind of power semiconductor device which has many advantages such as smaller chip size,higher power density,lower manufacturing cost,softer turn off behavior,and better reliability.However,its performance has a number of drawbacks,such as the snap-back effect.In this paper,an introduction about the snap-back effect of the RC-IGBT is given firstly. Then the physical explanations are presented with two simplified models.After that,some numerical simulations are carried out to verify the correctness of the models.     

基于ANSYS的IGBT模块的失效模式

功率循环(PC)试验和温度循环(TC)试验是对绝缘栅双极型晶体管(IGBT)模块进行可靠性考核的两个基本试验,可以有效暴露出器件封装所存在的问题。基于ANSYS有限元分析软件,分别研究了IGBT模块在功率循环和温度循环两种不同的试验情况下的温度分布与应力、应变分布的情况。研究表明在这两种情况下IGBT模块的失效模式是不同的。功率循环条件下器件的温差较小,但温度、应力往往集中分布在引线键合点及其下方,一般失效会发生在引线键合点处。而温度循环下温度分布均匀,但高低温温差较大,更能考察器件在严酷的环境条件下的可靠性,由于每层结构的边缘位置处剪切应力较大,失效常常由每层结构的边缘部位开始,一般会发生芯片和陶瓷基板的断裂和焊料层疲劳等失效现象。