基于等光频细分重采样的调频干涉测距方法

为了解决调频连续波(FMCW)激光器调制非线性导致的测量信号频谱展宽降低激光干涉测距精度的问题, 采用一种基于等光频细分重采样的调频干涉测距方法, 进行了理论分析和实验验证, 获得了双光路测距系统对不同位置目标信号等光频细分重采样后的波形数据, 并进行了频谱分析。结果表明, 通过等光频细分重采样的方法, 使用细分后的时钟信号点对距离大于辅助干涉光路光程差的目标测量信号进行重采样, 消除了激光器的调制非线性的影响, 并且避免了采样点数不足引起信号失真的问题; 在4.3m测量范围内, 等光频细分重采样测距系统与激光干涉仪相比最大残余误差不超过±18.46μm, 最大测量标准差为23.39μm; 该方法使用的辅助干涉光路光程差很短, 受环境的影响较小, 可以获得稳定的时钟信号, 并且可以减少双光路FMCW测距系统的体积与成本。该研究为长距离、高精度调频连续波测量提供了实用参考。     

正弦调频下大带宽激光调频连续波测距技术

基于激光调频连续波(FMCW)测距的原理搭建了双光路FMCW测距系统,用正弦调频替代了传统的线性调频,提高了扫频速率。研究了正弦调频下的FMCW测距原理,推导了正弦扫描的重采样公式,提出了信号拼接的方法来增大扫描带宽,并通过正交调制的方法消除拼接误差。实验结果表明,使用正交调制的方法拼接等光频重采样校正的信号后,频谱分辨力可达127μm,接近理论分辨力。在3.3～4m的范围内,所提方法的结果与参考干涉仪的误差不超过203μm,标准差小于194μm。     

基于相位补偿的调频连续波大长度测距中的色散校正

基于调频连续波测距的原理搭建并改进了双光路调频连续波测距系统,在测量光路增加光纤延迟线使测量距离拓展到了65 m.还研究了等光频重采样中色散的影响,推导出了带有色散和光纤延迟线的重采样模型,提出了在调频连续波大长度测距中通过频率幅度来调节相位补偿系数的色散校正方法.实验表明,在45~65 m的范围内增加了光纤延迟线并且有效的校正了色散,校正色散后在65. 165 m处测距值与干涉仪测量值最大误差小于500μm,标准差为246μm,频谱分辨力高达123μm,十分接近理论分辨力.文章的研究为调频连续波大尺寸测量提供了可行性的参考.     

基于FRFT的非均匀转动目标ISAR自聚焦算法

在ISAR成像中,目标的非均匀转动会引入与散射点位置有关的相位误差,无法用统一的相位误差函数表示,而散射点子回波的相位精度对于ISAR自聚焦的相位校正非常重要.针对加速转动的目标,提出了一种基于分数阶傅里叶变换(FRFT:fractional Fourier transform)的自聚焦算法.在预先选定的距离单元上,利用分数阶傅里叶变换提取最大功率散射点对应的调频信号,并以该信号为参考信号消除目标平动引起的相位误差.利用同样的方法,在多个距离单元上提取最强散射点对应的调频信号,并对调频信号的估计值加权平均,得到非均匀转动参数的最优估计,进而对信号非均匀采样,消除非均匀转动的相位误差.仿真结果验证了该算法能够很好地消除相位误差.     

步进频率激光雷达测距信号处理技术研究

文中介绍了雷达系统步进频率(Stepped-Frequency, SF)信号的模型，研究了非相参激光雷达采用步进频率信号方式测距的问题。仿真研究了各阶梯脉冲回波信号相位关系不确定和信噪比对测距的影响，提出消除相位影响的方法，并应用在固定目标实测试验中。试验采用频率步进量1 MHz、调频范围80 MHz正弦波调制声光晶体产生步进频率激光脉冲序列，使用采样率40 Msps的ADC采集激光回波并处理，对489.2 m的标定目标测量精度达到1.17 m。在低信噪比时，采用多组脉冲串累积方式仍能求得目标距离值。此研究实现低采样率下固定目标的高精度测距，为步进频率信号处理方式高精度激光相干测距产品的研制打下坚实基础。     

FMCW激光雷达精密测量技术及振动特性研究

针对激光器调频非线性对FMCW激光雷达测距精度的影响,研究利用辅助光路提取峰谷值点对测量光路进行重采样的方法。推导重采样测距公式,当测量环境中存在振动时,振动会使得待测目标出现移动,并在拍频信号中引入多普勒频移,增加拍频信号频谱宽度。因此,针对振动情况,利用交叠分时傅里叶变换计算不同时间窗内的频率值来对振动特性进行分析与回归校正。可得到测距中心距离为4.998 0 m,信号的平均振动周期为17.993 Hz,校正后得到目标物体的振幅为12.2μm,所提方法的测距精度均保持在90%以上。     

消除光强调制影响的双波长正弦相位调制干涉仪

在双波长半导体激光(LD)正弦相位调制(SPM)干涉仪中,通过注入电流调制LD波长的同时,光源的输出光强也被调制,影响了测量精度。提出了一种新的双波长LD SPM干涉仪,通过对干涉信号进行处理,得到与干涉信号相位相关的线性方程组,利用该方程组精确计算相位,消除了光源光强调制的影响,使测量误差由6μm减小至1μm,并利用该干涉仪与波长扫描技术相结合实现了绝对距离的测量,当待测距离为60~280 mm时,测量结果的重复性为1μm。     

合成孔径激光成像雷达中的非线性啁啾补偿

合成孔径激光成像雷达理论上可在几千千米处获得厘米量级的分辨率,在距离向和方位向分别通过对线性调频信号和相位历史的脉冲压缩得到理想的分辨率.受可调谐激光器本身性能限制,实际应用中并不能得到理想的线性调频信号,需要在成像算法中对非线性啁啾引起的相位误差进行补偿.通过介绍近年来国外的合成孔径激光成像雷达实验,重点分析了非线性啁啾的补偿方法,对比和讨论了已有方案,最后对非线性啁啾补偿方法进行了总结和展望.     

基于气体池信号拼接的高精度调频连续波激光测距

在双光路调频连续波激光测距系统中,辅助光纤的长度标定精度直接影响了系统的测距精度。提出一种基于氰化氢气体池信号拼接的辅助光纤标定方法,通过提高辅助光纤标定精度进而提高系统测距精度。深入研究了基于氰化氢气体池标定方法的原理,为减小数据采集系统负担,利用信号拼接的方法进行改进。实验表明,与传统激光干涉仪的光纤标定方法相比,基于气体池拼接的标定方法具有更高的稳定性,同时,在3.8 m测量范围内,采用该标定方法的测距系统与干涉仪标准距离值误差不超过14μm,测量标准差低于17μm。     

一种非均匀转动目标的ISAR自聚焦算法

在ISAR成像中,目标的非均匀转动会引入与散射点位置有关相位误差,无法用统一的相位误差函数表示,因此通常的自聚焦方法难以消除。针对加速转动目标,本文提出了一种基于离散调频傅立叶变换(discrete chirp-Fourier trans- form)的自聚焦算法。在预先选定的距离单元上,利用离散调频傅立叶变换提取最大功率散射点对应的调频信号,并以之为参考信号消除目标平动引起的相位误差。然后,利用同样的方法,在多个距离单元上提取最大功率散射点对应的调频信号,根据该散射点信号估计目标非均匀转动的参数,并进行非均匀采样,去除非均匀转动的相位误差。将该算法应用于仿真试验和实测数据的ISAR成像中,都得到了较好的聚焦结果。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.