生长温度对InGaN/GaN多量子阱LED光学特性的影响

利用低压MOCVD系统,在蓝宝石衬底上外延生长了InGaN/GaN多量子阱蓝紫光LED结构材料.研究了生长温度对有源层InGaN/GaN多量子阱的合金组分、结晶品质及其发光特性的影响.结果表明当生长温度从730℃升到800℃时,LED的光致发光波长从490nm移到380nm,室温下PL谱发光峰的半高全宽从133meV降到73meV,表明了量子阱结晶性的提高.高温生长时,PL谱中还观察到了GaN的蓝带发光峰,说明量子阱对载流子的限制作用有所减弱.研究表明,通过改变生长温度可以对LED发光波长及有源层InGaN的晶体质量实现良好的控制.     

载流子复合机制对不同发光波长InGaN基LED调制带宽的影响

传统的ABC模型主要用于研究InGaN量子阱中载流子的复合动态过程.使用传统的ABC模型计算载流子的复合速率和复合寿命,研究不同发光波长InGaN基LED的3 dB调制带宽与载流子复合机制的关系.计算分析结果表明,在相同的注入电流下,随着有效有源区厚度和量子阱层厚度的减小,400 nm近紫外、455 nm蓝光以及525 nm绿光三种发光波长LED的3 dB调制带宽均明显增大;在100 A/cm2的注入电流密度下,400,455,525 nm三种发光波长LED的3 dB调制带宽分别为62,88,376 MHz;在相同的电流密度下,LED的3 dB调制带宽随着In组分(In元素的原子数分数占In元素与Ga元素的原子数分数总和的比)的增加而增大;由于525 nm波长LED的In组分高,有效有源区厚度薄,所以源区载流子浓度高,在大电流密度下525 nm绿光LED的3 dB调制带宽达到376 MHz.     

台阶型InGaN量子阱蓝光发光二极管设计与数值模拟

一种特定发光波长(415～425nm)的台阶型InGaN构型量子阱被设计并从理论上进行考察,包括量子阱区域载流子浓度分布、自发辐射复合速率、Shockley-Read-Hall(SRH)辐射复合速率以及输出功率和内量子发光效率的分析.与传统的InGaN构型量子阱结构相比,使用台阶型InGaN构型的量子阱结构,活性区载流子浓度特别是空穴浓度得到明显的改善,输出功率和内量子效率分别提高了52.5%和52.6%.自发发光强度与传统的InGaN构型量子阱发光强度相比也有1.54倍的增强.分析结果暗示SRH非辐射复合速率积分强度的减少被认为是台阶型InGaN构型量子阱光学性能提升的主要原因.     

AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计

采用一维传递矩阵法模拟计算了AlGaN/GaN/InGaN对称分别限制多量子阱激光器(发射波长为396.6nm)的波导特性.以光限制因子、阈值电流密度和功率效率作为优化参量,获得激光器的优化结构参数为:3周期量子阱In0.02Ga0.98N/In0.15Ga0.85N(10.5nm/3.5nm)作为有源层,90nm In0.1Ga0.9N为波导层,120周期Al0.25Ga0.75N/GaN(2.5nm/2.5nm)为限制层.     

AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计

采用一维传递矩阵法模拟计算了AlGaN/GaN/InGaN对称分别限制多量子阱激光器(发射波长为396.6nm)的波导特性.以光限制因子、阈值电流密度和功率效率作为优化参量,获得激光器的优化结构参数为:3周期量子阱In0.02Ga0.98N/In0.15Ga0.85N(10.5nm/3.5nm)作为有源层,90nm In0.1Ga0.9N为波导层,120周期Al0.25Ga0.75N/GaN(2.5nm/2.5nm)为限制层.     

GaN{11-22}半极性面上生长InGaN/GaN多量子阱的研究

利用选择性横向外延技术生长{11-22}半极性面GaN模板,并利用半极性面模板生长InGaN/GaN多量子阱结构。结果表明,生长出的GaN模板由半极性面{11-22}面和c面组成,多量子阱具有390nm和420 nm的双峰发光特性,局域阴极发光(CL)测试表明390 nm附近的发光峰来源于半极性面上的量子阱发光,而420 nm左右的发光峰源于c面量子阱发光。c面量子阱发光相对于斜面量子阱发光发生显著红移是因为在选择性横向外延生长过程中,In组分相比Ga较易从掩模区域向窗口中心区域迁移,形成了中心高In组分的c面量子阱,而半极性面上InGaN/GaN多量子阱量子限制斯塔克效应相比于极性面会减弱,此外,相同生长条件下半极性面的生长速率低于极性c面的生长速率。     

InGaAs/AlGaAs量子阱中量子尺寸效应对PL谱的影响

本文采用金属有机物化学气相淀积(MOCVD)方法设计并生长了两组InGaAs／A1GaAs应变多量子阱，量子阱的厚度分别为3nm和6nm，对其光致发光谱(PL)进行了研究，二者的发光波长分别为843nm和942nm，用有限深单量子阱理论近似计算了由于量子尺寸效应和应变效应引起的InGaAs／A1GaAs量子阱带隙的改变，这解释了两组样品室温下PL发射波长变化的原因。     

InGaN/GaN MQW双波长LED的MOCVD生长

利用金属有机物化学气相淀积(MOCVD)系统生长了InGaN/GaN多量子阱双波长发光二极管(LED).发现在20 mA正向注入电流下空穴很难输运过蓝光和绿光量子阱间的垒层,这是混合量子阱有源区获得双波长发光的主要障碍.通过掺入一定量的In来降低蓝光和绿光量子阱之间的垒层的势垒高度,增加注入到离p-GaN层较远的绿光有源区的空穴浓度,从而改变蓝光和绿光发光峰的强度比.研究了蓝光和绿光量子阱间垒层In组分对双波长LED的发光性质的影响.此外,研究了双波长LED发光特性随注入电流的变化.     

InGaN/GaN和InGaN/AlGaN多量子阱中应变对光致发光特性的影响

对蓝宝石衬底上的InGaN/GaN和InGaN/AlGaN多量子阱结构和经激光剥离去除衬底的InGaN/GaN和InGaN/AlGaN多量子阱结构薄膜样品,进行了光致发光谱、高分辨XRD和喇曼光谱测量.PL测量结果表明,相对于带有蓝宝石衬底的样品,InGaN/GaN多量子阱薄膜样品的PL谱峰值波长发生较小的蓝移,而InGaN/AlGaN多量子阱薄膜样品的PL谱峰值波长发生明显的红移;喇曼光谱的结果表明,激光剥离前后E2模的峰值从569.1减少到567.5cm-1.这说明激光剥离去除衬底使得外延层整体的压应力得到部分释放,但InGaN/GaN与InGaN/AlGaN多量子阱结构中阱层InGaN的应力发生了不同的变化.XRD的结果证实了这一结论.     

InGaN/GaN和InGaN/AlGaN多量子阱中应变对光致发光特性的影响

对蓝宝石衬底上的InGaN/GaN和InGaN/AlGaN多量子阱结构和经激光剥离去除衬底的InGaN/GaN和InGaN/AlGaN多量子阱结构薄膜样品,进行了光致发光谱、高分辨XRD和喇曼光谱测量.PL测量结果表明,相对于带有蓝宝石衬底的样品,InGaN/GaN多量子阱薄膜样品的PL谱峰值波长发生较小的蓝移,而InGaN/AlGaN多量子阱薄膜样品的PL谱峰值波长发生明显的红移;喇曼光谱的结果表明,激光剥离前后E2模的峰值从569.1减少到567.5cm-1.这说明激光剥离去除衬底使得外延层整体的压应力得到部分释放,但InGaN/GaN与InGaN/AlGaN多量子阱结构中阱层InGaN的应力发生了不同的变化.XRD的结果证实了这一结论.     

Determination of the direction of piezoelectric field in InGaN/GaN multiple quantum-well structures grown by metal-organic chemical vapor deposition

The direction of the piezoelectric field in InGaN/GaN multiple quantum-well (MQW) structures grown by metal-organic vapor deposition (MOCVD) was determined using excitation-power-density variable photoluminescence (PL). By comparing the excitation-power-density dependence of the shift of the PL peak and the change of the full-width at half-maximum (FWHM) of the peak from an InGaN/GaN MQW structure and an InGaN MQW-based light-emitting diode (LED), the piezoelectric field in the InGaN/GaN MQW structures was unambiguously determined to be pointing toward the substrate. This result helps to identify the surface polarity of the LED wafer as Ga-faced.     

Structural and optical investigation of InGaN/GaN multiple quantum well structures with various indium compositions

We have studied the influence of indium (In) composition on the structural and optical properties of In_x Ga_1−xN/GaN multiple quantum wells (MQWs) with In compositions of more than 25% by means of high-resolution x-ray diffraction (HRXRD), photoluminescence (PL), and transmission electron microscopy (TEM). With increasing the In composition, structural quality deterioration is observed from the broadening of the full width athalf maximum of the HRXRD superlattice peak, the broad multiple emission peaks oflow temperature PL, and the increase of defect density in GaN capping layers and InGaN/GaN MQWs. V-defects, dislocations, and two types of tetragonal shape defects are observed within the MQW with 33% In composition by high resolution TEM. In addition, we found that V-defects result in different growth rates of the GaN barriers according to the degree of the bending of InGaN well layers, which changes the period thickness of the superlattice and might be the source of the multiple emission peaks observed in the In_xGa_1−xN/GaN MQWs with high in compositions.     

Photoluminescence characteristics of GaN/lnGaN/GaN quantum wells

Photoluminescence (PL) characteristics of GaN/lnGaN/GaN single quantum wells (QWs) and an InGaN/GaN single heterojunction were studied using continuous wave (CW) and pulsed photoluminescence in both edge and surface emitting configurations. Samples were grown on c-plane sapphire substrates by atmospheric pressure metalorganic chemical vapor deposition (MOCVD). Room temperature and 77K PL measurements were performed using a CW Ar-ion laser (305 nm) and a frequency tripled (280 nm), pulsed, mode-locked Ti: sapphire laser. CW PL emission spectra from the quantum wells (24, 30, 80Å) were all blue shifted with respect to the reference sample. The difference (i. e., the blue shift) between the measured value of peak emission energy from the QW and the band-edge emission from the reference sample was attributed to quantum size effects, and to strain arising due to a significant lattice mismatch between InGaN and GaN. In addition, stimulated emission was observed from an InGaN/GaN single heterojunction in the edge and surface emitting configu-ration at 77K. The narrowing of emission spectra, the nonlinear dependence of output emission intensity on input power density, and the observation of a strongly polarized output are presented.     

Effect of shroud flow on high quality InxGa1−xN deposition in a production scale multi-wafer-rotating-disc reactor

High quality InGaN thin films and InGaN/GaN double heterojunction (DH) structures have been epitaxially grown on c-sapphire substrates by MOCVD in a production scale multi-wafer-rotating-disc reactor between 770 to 840°C. We observed that shroud flow (majority carrier gas in the reaction chamber) is the key to obtaining high quality InGaN thin films. High purity H₂ as the shroud flow results in poor crystal quality and surface morphology but strong photolumines-cence (PL) at room temperature. However, pure N₂ as the shroud flow results in high crystal quality InGaN with an x-ray full width at half maximum (FWHM)_InGaN(0002) of 7.5 min and a strong room temperature PL peaking at 400 nm. In addition, InGaN/GaN single heterojunction (SH) and DH structures both have excellent surface morphology and sharp interfaces. The full width at half maximum of PL at 300K from an InGaN/GaN DH structure is about 100 meV which is the best reported to date. A high indium mole fraction in InGaN of 60% and high quality zinc doped InGaN depositions were also achieved.     

宽带隙半导体材料光电性能的测试

主要通过光致发光的实验手段,研究分析了在自支撑GaN衬底上生长的InGaN/GaN多量子阱(InGaN/GaN MQW)有源层中的载流子复合机制,实验中发现多量子阱的光致发光光谱中有一个与有源区中的深能级相关的额外的发光峰。在任何温度大功率激发条件下,自由激子的带边复合占主导地位,并且带边复合的强度随温度或激发功率的下降而减弱;在室温以下小功率激发条件下,局域化能级引入的束缚激子复合占主导地位,其复合强度随温度的下降而单调上升,随激发功率的下降而上升。带边复合在样品温度上升或者激发功率变大时发生蓝移,而局域的束缚激子复合辐射的峰值波长,随样品温度和激发功率的变化没有明显变化。     

InGaN/GaN multiple quantum well green light-emitting diodes prepared by temperature ramping

High-quality InGaN/GaN multiple-quantum well (MQW) light-emitting diode (LED) structures were prepared by a temperature-ramping method during metal-organic chemical-vapor deposition (MOCVD) growth. Two photoluminescence (PL) peaks, one originating from well-sensitive emission and one originating from an InGaN quasi-wetting layer on the GaN-barrier surface, were observed at room temperature (RT). The observation of high-order double-crystal x-ray diffraction (DCXRD) satellite peaks indicates that the interfaces between InGaN-well layers and GaN-barrier layers were not degraded as we increased the growth temperature of the GaN-barrier layers. With a 20-mA and 160-mA current injection, it was found that the output power could reach 2.2 mW and 8.9 mW, respectively. Furthermore, it was found that the reliability of the fabricated green LEDs prepared by temperature ramping was also reasonably good.     

InGaN/GaN multi-quantum-well-based light-emitting and photodetective dual-functional devices

In this study, we fabricated and characterized an InGaN/GaN multi-quantum-well (MQW)-based p-n junction photodetector (PD) for voltage-selective light-emitting and photo-detective applications. The photode-tector exhibits a cutoff wavelength at around 460nm which is close to its electroluminescence (EL) peak position. The rejection ratio was determined to be more than three orders of magnitude. Under zero bias, the responsivity of the device peaks at 371 nm, with a value of 0.068 A/W, corresponding to a 23% quantum efficiency.The overall responsivity gradually rises as a function of reverse bias, which is explained by the enhanced photocarrier collection efficiency.     

Luminescence properties of blue and green dual wavelength InGaN/GaN multi-quantum well light-emitting diode

Blue and green dual wavelength InGaN/GaN multi-quantum well (MQW) light-emitting diode (LED) has wide applications in full color display, monolithic white LED and solid state lighting, etc. Blue and green dual wavelength LEDs, which consist of InGaN strain-reduction layer, green InGaN/GaN MQW and blue InGaN/ GaN MQW, were grown by metal-organic chemical vapor deposition (MOCVD), and the luminescence properties of dual wavelength LEDs with different well arrangements were studied by photoluminescence and electrolumines-cence. The experimental results indicated that well position played an important role on the luminescence evolvement from photoluminescence to electroluminescence.     

InGaN/GaN多量子阱纳米线发光二极管制备及研究

用SiO2纳米图形层作为模板在以蓝宝石为衬底的n-GaN单晶层上制备了InGaN/GaN多量子阱纳米线,并成功实现了其发光二极管器件(LED).场发射扫描电子显微镜(FESEM)的测量结果表明,InGaN/GaN多量子阱纳米线具有光滑的表面形貌和三角形的剖面结构.室温下阴极射线荧光谱(CL)的测试发现了位于461 nm...