基于电路建模的THz量子级联激光器稳态性能分析

通过改进的三能级速率方程运用电路建模方法建 立了太赫兹(THz)量子级联激光器(QCL,quantum cascade)的一种等效电路模型。模型中, 涉及的非辐射散射时间、自激发射弛豫时间 以及电子逃逸时间均根据器件有源层结构参数通过自洽数值求解获得。采用该模型可运用通 用电路仿真工 具实现对THz QCL器件光电特性的模拟仿真,克服了数值分析方法计算复杂,模拟时间长的 缺点。运 用电路仿真工具PSPICE对3.9THz QCL的稳态特性进行了模拟仿真,并 讨论了温度变化对器件阈值电 流、增益系数、粒子数反转的影响,其分析结果与已报道的理论和实验结果一致,验证了本 方法的适用性和准确性。     

基于多模速率方程电路建模的太赫兹量子级联激光器稳态性能及输出光谱特性分析

通过改进的三能级多模态速率方程,运用电路建模 方法,建立了太赫兹(THz)量子级联激光器(QCL)的一种等效电路模型。由于基于多模 态效应进行建模,所建模型能够有效表 征多模态效应对THz QCL光电性能的影响。模型中,涉及的非辐射散射时间、自激发射弛豫 时间以及电子逃 逸时间均根据器件有源层结构参数通过自洽数值求解获得。采用所建模型,可运用通用电路 仿真工具实现对 THz QCL光电特性的模拟分析,克服了数值分析方法计算复杂、模拟时间长的缺点。运用电 路仿 真工具PSPICE对2.47THz QCL的稳态特性和输出光谱特性进行了模拟 分析,并讨论了温度变化对器 件阈值电流、输出光功率以及输出频谱的影响,分析结果与已报道的理论和实验结果一致 ,验证了本文方法的适用性和准确性。     

AlGaN/GaN异质结构中的极化工程

从自洽求解薛定谔方程和泊松方程出发,研究了AlGaN/GaN量子阱电子气密度随Al组份比、势垒层厚度和栅压的变化,比较了能带带阶和极化电荷对沟道阱能带和电子气特性的影响,研究了在势垒层和缓冲层中夹入AlN及InGaN薄层的作用,计算了AlGaN/GaN/AlGaN双异质结的能带,最后探讨了势垒层能带的优化设计,提出了剪裁势垒层能带来钝化表面的新方法。     

P型掺杂区工艺对Si基Pinned型光电二极管量子效率的影响

为了更全面、系统地分析Si基Pinned型光电二极管(PPD,pinned photodiode)量子效率的工艺敏感特性,基于考虑表面(SRH,shockley-read -hall)复合率模型的时域有限差分数值模拟方法,对不同P⁺型表面层和P型外延(EPI,e pi taxial)层工艺条件下PPD可见光谱量子效率的变化特征及物理机制进行了研究。结果表明 ,P⁺型表面层离子束注入剂量和注入能量的增加分别引起非平衡载流子SRH复合率升高和 PPD势垒区顶部下移,均可导致低于500nm波段量子效率的衰减,而 后者进一步引起的势垒区纵向宽度缩 减使该影响可持续至650nm波段;P型EPI掺杂浓度增加引起PPD势垒 区底部上移,导致500～750nm 波段量子效率的衰减;P型EPI厚度增加引起衬底强SRH复合区光电荷比重降低,导致高于700 nm波段量 子效率得到提升并趋向饱和。通过分析发现,Si基材料中光子吸收深度对波长的强依赖关系 是导致两种P型 掺杂区工艺条件对量子效率存在波段差异性影响的根本原因。     

发光层厚度对基于CdSSe/ZnS量子点LED性能的影响

采用粒径约为10 nm的CdSSe/ZnS量子点层作为发光层,制备了叠层结构的量子点发光器件,研究了量子点层厚度对其薄膜形貌及量子点发光二极管性能的影响.原子力显微镜测试结果表明:量子点层过厚时,量子点颗粒发生团聚,且随着厚度的降低,团聚现象减弱;当量子点层厚度和量子点粒径相当时(约为10 nm),量子点呈单层排列且团聚现象基本消失;而量子点层厚度低于10 nm时,薄膜出现孔洞缺陷.器件的电流-电压-亮度等测试结果表明:量子点发光二极管中量子点层厚度与器件的光电特性密切相关,量子点层厚度为10 nm的器件光电性能最优,具有最低的启亮电压4.2V,最高的亮度446 cd/m2及最高的电流效率0.2 cd/A.这种通过控制旋涂转速改变量子点层厚度的方法操作简单、重复性好,对QD-LED的研究具有一定应用价值.     

组份渐变电子阻挡层对InGaN/GaN LED光电特性的影响

利用数值模拟方法,研究组份渐变电子阻挡层(EBL)对InGaN/GaN发光二极管电学和光学特性的影响。结果表明,三角形组份渐变EBL结构能有效减小器件的开启电压,提高光输出功率,改善高注入电流水平下发光效率的下降情况。能带模拟结果进一步表明,三角形组份渐变EBL结构显著提高了导带底的电子势垒,可有效限制电子向P型GaN层的泄露,同时减小了价带顶的空穴势垒,可增强P型GaN层的空穴向有源区的注入效率,改善其在量子阱内的浓度分布。     

THz量子级联激光器跃迁速率的数值求解及验证

THz量子级联激光器(QCL,quantum cascade laser )有源区载流子的跃迁速率是研究激光器内部输运特性,模拟激光器特性和优化设计的关键 参数。本文针对跃迁速率的计算问题,在连续介质模型下提出了一种运用自洽方法和费米黄 金法则计算THz QCL有源区载流子跃迁速率的方法。方法考虑了包括电子-纵向光声子散射 、电子-电子散射机制以及电子-光子散射对跃迁速率的影响。利用本文方法对已报道的TH z QCL进行了数值模拟,讨论了温度参数和注入掺杂浓度参数对跃迁速率的影响并进行了模 拟分析,分析结果与已报道的理论和实验结果一致,验证了方法的适用性和准确性。本文方 法的提出为运用速率方程法进行THz QCL有源层的建模和优化设计提供了基础。     

1.3μm波段单横模大功率输出量子点激光器

为了制备大功率、单横模输出的量子点激光器,对有源多模干涉波导结构进行了研究。通过优化器件结构设计,采用1×1型有源多模干涉波导结构,以均匀多层InAs/InGaAs/GaAs量子点材料作为有源区,制备了1.3μm波段的有源多模干涉结构量子点激光器。连续电流注入条件下的测试结果表明,与传统的均匀波导结构器件相比,有源多模干涉结构器件具有更低的串联电阻和更好的散热性能;在连续电流为0.5A的小注入情况下,器件的输出功率可达114mW、中心波长为1332nm。结果表明,有源多模干涉结构器件是制备大功率、单横模输出光发射器件的一种有效的器件结构。     

1.3μm波段单横模大功率输出量子点激光器

为了制备大功率、单横模输出的量子点激光器,对有源多模干涉波导结构进行了研究。通过优化器件结构设计,采用1×1型有源多模干涉波导结构,以均匀多层InAs/InGaAs/GaAs量子点材料作为有源区,制备了1.3μm波段的有源多模干涉结构量子点激光器。连续电流注入条件下的测试结果表明,与传统的均匀波导结构器件相比,有源多模干涉结构器件具有更低的串联电阻和更好的散热性能;在连续电流为0.5A的小注入情况下,器件的输出功率可达114mW、中心波长为1332nm。结果表明,有源多模干涉结构器件是制备大功率、单横模输出光发射器件的一种有效的器件结构。     

亚50nm自对准双栅场效应晶体管的量子和短沟道效应的研究

采用有限元法自洽求解泊松-薛定谔方程,数值模拟了一种新型的亚50nm N沟道双栅MOS场效应晶体管的电学特性,系统阐述了尺寸参数对短沟道效应的影响规律.比较了不同尺寸参数下的亚阈值摆幅、阈值电压下跌和D IBL效应以及沟道跨道,获得了最佳硅鳍宽度(Tfin)和栅极长度(Lg)参数.模拟结果与实验数据的经典数值模拟进行了比较,表明由于电子束缚效应对器件性能的影响,考虑量子效应对F inFET器件的性能优化尤其重要.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.