可拼接式全柔性电容触觉阵列传感器设计与实验

针对现有机器人触觉传感器存在可穿戴性与可移植性差、不易维护及扩展等缺点,提出了一种可用于机器人仿生皮肤的全柔性电容式触觉传感器,并设计成12×12正方形触觉传感阵列和正六边形触觉模块两种可拼接式阵列结构.以炭黑填充硅橡胶作为电容式触觉传感器的弹性电介质,聚酰亚胺为柔性基体,有机硅导电银胶和金属膜为上下两柔性极板,共同构成压力敏感单元.介绍了电容式柔性触觉传感器的工作原理、结构设计及两种与之对应的电容触觉阵列无线数据采集与处理系统.实验结果表明,该全柔性电容式触觉阵列传感器及信号提取系统具有良好的稳定性与灵敏度,可用作人工皮肤实现全触觉感知.     

用于细胞外电信号测量的CMOS集成生物 传感芯片的研究

新型的细胞外电信号传感芯片是采用0.6 μm标准CMOS工艺设计制造,片上集成了6×6单元有源传感阵列、模拟多路选择器、输出缓冲器、参考源和数字控制电路.有源传感单元面积为60μm×60μm,包含15μm×15μm的传感电极和预处理电路,能够线性放大幅值范围100μV～25 mV的微小信号,电压增益为40dB.并采用相关二次采样工作模式降低固定模式噪声,提高传感器的精度.在标准CMOS工艺基础上,应用无电浸镀金改进传感电极的生物兼容性,并采用特殊封装技术提高芯片在溶液环境中的稳定性.溶液中模拟生物信号测量验证了该芯片的功能.     

柔性叉指电极折叠特性的仿真建模与试验研究

柔性叉指电极以其稳定性好、灵敏度高、制作方便等优点成为柔性电容传感器的重要研究方向,也逐渐在可穿戴领域得到应用及发展。在不同的触觉信号作用下,柔性叉指电极可产生不同的电容输出值,通过平面映射及保角变换法得到柔性叉指电极在不同折叠情况下的计算式。运用COMSOL Multiphysics有限元软件建立柔性叉指电极传感器的仿真模型,详细分析了折叠角度及折叠位置对传感特性的影响,并通过试验研究进一步验证仿真结果的可行性。仿真及试验结果表明:当折叠角度θ≤90°时,对电容输出信号的影响较大;而折叠位置对电容的影响相对有限。该研究成果对柔性叉指电极在智能可穿戴领域的应用具有创新性的参考价值,为柔性叉指电容传感器提供了更广阔的发展前景。     

阵列调制随机共振在微弱信号特征提取方面的应用

论述了阵列调制随机共振方法在强噪声背景下多频微弱信号特征提取中的工作原理和实现步骤;采用预先设定系统参数的多个并联非耦合随机共振单元形成阵列,将被测强噪声背景下的多频微弱信号分别与不同频率的载波进行调制,生成多个差频均为0.01Hz的信号作为各对应随机共振单元的激励信号,采用龙格-库塔算法求取各单元输出并进行频谱分析,根据0.01Hz处的信噪比判断在微弱信号中是否存在载波频率与差频值之和大小的频率分量,最后综合各个随机共振单元的检测结果生成微弱信号的频率特征向量;仿真结果表明,阵列调制随机共振在微弱信号特征提取方面效果明显,具有很好的应用前景。     

用于脉搏波检测的背接触式触觉传感阵列单元

触觉传感器在脉搏波测量、仿生机器人等领域有重要应用。该方案制作背接触式传感器,并通过转移工艺实现芯片加工和圆片级芯片尺寸封装一体化,用组装工艺低成本实现大面积柔性触觉阵列,采用模块化设计,正压力与剪切力传感单元的尺寸和布线相同,制作可组装的标准单元,在传感器转移工艺中,采用无电极化学腐蚀自停止工艺,提高成品率。传感单元尺寸仅为300μｍ×300μｍ,与人类触觉传感的极限可比拟,灵敏度为2mV/10kPa,量程为150kPa,已用于研制新型脉诊仪的柔性传感阵列?实现了脉搏波的实时测量。     

用厚膜电路实现阵列触觉信号的采样

阵列触觉的外接引线问题对传感器的制作工艺、信噪比和实际应用都有重要影响.本文介绍了一种用本地厚膜电路实现阵列触觉传感及其采样信号输出的方法,使压阻式点阵、间距为1 mm的触觉传感器仅需6根外接引线.在给出传感器结构制作方法的基础上,对信号采样电路作了详细的阐述,并将各功能电路以厚膜电路的形式集成于传感器上,整个传感器完全实现小型化和外接引线最少化,能方便地应用在多种场合.最后,对传感器的多种性能指标进行了检测和评估.     

一种电流积分型生物传感微阵列信号读出电路

设计了一种用于自组装膜生物传感阵列的高灵敏度信号读出电路,该电路主要包括高灵敏度微阵列生物电流探测单元、积分单元、相关双采样(CDS)单元及输出缓冲单元。电路采用单5 V电源,输入电流为0~50 nA,在0.6μm/level 7 CMOS工艺条件下进行模拟,得到了较为满意的结果。该读出电路与标准CMOS工艺兼容,可实现集成的生物传感阵列。     

基于硅晶圆键合工艺的MEMS电容式超声传感器设计

针对目前电容超声传感器多采用表面工艺制备,存在振膜应力大、厚度均匀性控制差且表面需要沉积分立电极而造成传感器灵敏度低、归一化位移小、频率易偏差的缺点,提出基于硅晶圆键合工艺的MEMS电容超声传感器。采用应力小、厚度均匀的SOI顶层硅作为敏感单元的一体化全振微传感薄膜,无需沉积分立电极,易于加工且频率偏差小。通过下电极的区域化定义及巧妙互联,避免了非活跃区的寄生电容。通过ANSYS及MATLAB对所设计的5种工作频率在124 kHz～484 kHz之间、满足水下成像需求的传感器结构进行性能分析,表明传感器的电容变化量为650.62 fF/Pa～10.827 fF/Pa,满足现有条件的信号检测,输出电压灵敏度可达1.700 mV/Pa。与同频率指标的传统基于牺牲工艺而制备的金属-氮化膜堆栈结构对比表明,本结构频率可预测性高,偏差仅为0.0535%;振膜变形更均匀,归一化位移提高0.0432%以上;灵敏度平均提高11.9249 dB。     

高速低载频比传感信号下的逆变器有源阻尼自适应控制

逆变器工作在高频运行和控制载波比低的情况下,存在谐振尖峰抑制,提出了高速低载频比传感信号下的逆变器有源阻尼自适应控制技术。在高速低载频比传感信号下,构建逆变器数学模型。输出电流到电容电压与定子电流之间的传递函数,将逆变器的有源阻尼等效成一个控制电压环。调整有源阻尼自适应控制回路的参数,制定逆变器有源阻尼自适应控制策略。实验结果表明：文中技术的稳定裕度由2.46 dB下降至1.18 dB,可以保证逆变器的稳定运行;在不同采样频率下,可以控制逆变器输出与电网电压相同相位和频率的并网电流,其中在采样频率为5.9f时,输出并网电流和电压均表现为正弦状态,波动范围分别为[35 A,58 A]和[185 V,225 V],具有较好的控制效果。     

电容式柔性触觉传感器设计

为了实现对机器人指端触觉压力的检测,设计了一种电容式柔性触觉传感器,以PORON聚氨酯材料作为电容式触觉传感器电极间的弹性绝缘介质,导电膜在空间上呈垂直分布,分别交叉粘贴于 PORON聚氨酯材料上、下表面构成电容式触觉传感器的上、下电极,一起组成柔性电容传感单元,该触觉传感器制备工艺简单,材料成本低廉。测试结果表明,该触觉传感器及其信号采集与处理系统能够检测0~ 20Ｎ的触觉压力,曲线拟合最大误差为 6.44％,重复性误差为6.29％,能够实现触觉压力的检测,为在机器人指端实现触觉压力的检测提供一种参考。     

Flexible Tactile Sensor for Tissue Elasticity Measurements

This paper presents a novel tactile sensing technique for tissue elasticity measurements. A prototype flexible tactile sensor has been successfully fabricated using polydimethylsiloxane as the structural material. The proposed sensor comprises an array of capacitors with no active elements used. By varying the sizes of sensing membranes within the capacitors, different stiffnesses of sensing diaphragms can be achieved. The elasticity of the targeted object can be thereafter measured based on the relative deflections of the sensing diaphragms. The fabricated sensor has been calibrated by an off-the-shelf polymer durometer hardness selector pack. The results show a sensing resolution of 0.1 MPa for elasticity measurement and a force sensing resolution as small as 5 mN. This flexible tactile sensor can be embedded on the distal portions of various endoscopic instruments for in vivo tissue elasticity measurements. $hfill$[2009-0143]      

导电橡胶触觉传感器阵列的标定实验研究

导电橡胶传感器是智能机器人服装的核心机件;标定出导电橡胶传感器的压阻特性是实现智能机器人触觉传感服装的核心内容之一;实验中,将导电橡胶安装在柔性阵列电极板里制作成触觉传感器阵列服装。对该传感器提出多种测量方法,确立其标定模型;给出数据建模的一般步骤。指出导电橡胶传感器设计的改进方向与部分方法。     

基于FBG的机器人柔性触觉传感器

为了满足机器人与外界环境、对象发生接触及交互作用时的触觉感知需求,提出了一种基于光纤布拉格光栅（FBG）的柔性触觉传感器．该传感器采用3×3 FBG阵列作为柔性传感元件,聚二甲基硅氧烷（PDMS）材料构成双层柔性基体．介绍了传感器的传感原理并采用有限元方法对其弹性体进行力学仿真分析,基于标定实验平台完成该传感器的静态标定实验．传感器的空间分辨率为25mm,在10mm×10mm载荷施加单元下,对力的感知范围为0～7N,且传感器具有较好的线性度和灵敏度,重复性和一致性良好,力灵敏度为0.16nm/N．实验结果和分析研究都证明了柔性触觉传感器的可行性．该传感器与人体皮肤触感及结构极为相似,且布线简单、抗干扰能力强．     

压阻式触觉传感器对法向力和剪切力的检测

灵活的触觉传感器应该具有像皮肤一样的功能,能够检测施加力的大小和方向.改进的压阻式触觉传感器,主要由中心芯和4个侧壁组成,法向力和剪切力的感测元件不同.将压阻式触觉传感器嵌入到一个聚二甲基硅氧烷(PDMS)弹性体中,以实现力的柔性检测.通过仿真分析,得到此种触觉传感器对法向力的检测范围为600 Pa~65 kPa,可测得的最小剪切力为900 Pa.通过进一步分析,得到施加法向力和剪切力时法向力感测元件阻值的变化曲线,可得此种触觉传感器能够有效降低法向力感测元件与剪切力感测元件之间的干扰.所开发的触觉传感器可以灵活检测施加的法向力和剪切力,可应用于机器人手臂和假肢上.     

A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications

In this paper, a new flexible three-axial force sensor was designed and investigated, which was composed of four capacitors, and the mechanism was based on the capacitance change induced by an applying three-axial force. For the configuration of the electrodes, four sensing electrodes and a public electrode were in the same plane, which was based on fringe effect theory. Different from the traditional dielectric layer with single material, this multilayered dielectric consisted of both the air gap and polydimethylsiloxane. The structure of the multilayered dielectric changed under the external/applied force, leading to variation of dielectric constant ε, which caused the capacitance change. Measurement results showed that the full-scale range of detectable force was around 0–10 N for all three axes. The average sensitivities of the force sensor units were 0.0095, 0.0053, and 0.0060 N⁻¹ for the normal, X-axis, and Y-axis shear forces, and more test proved its high potential for application in skin-like sensing field.

     

A Polymer-Based Flexible Tactile Sensor for Both Normal and Shear Load Detections and Its Application for Robotics

This paper proposes and demonstrates a novel flexible tactile sensor for both normal and shear load detections. For the realization of the sensor, polyimide and polydimethylsiloxane are used as a substrate, which makes it flexible. Thin metal strain gauges, which are incorporated into the polymer, are used for measuring normal and shear loads. The salient feature of this tactile sensor is that it has no diaphragm-like structures. The unit tactile cell characteristics are evaluated against normal and shear loads. The fabricated tactile sensor can measure normal loads of up to 4 N, and the sensor output signals are saturated against loads of more than 4 N. Shear loads can be detected by different voltage drops in strain gauges. The device has no fragile structures; therefore, it can be used as a ground reaction force (GRF) sensor for balance control in humanoid robots. Four tactile unit sensors are assembled and placed in the four corners of the robots sole. By increasing bump dimensions, the tactile unit sensor can measure loads of up to 2 kgf. When loads are exerted on the sole, the GRF can be measured by these four sensors. The measured forces can be used in the balance control of biped locomotion systems.     

一种基于导电橡胶的三维力柔性触觉传感器阵列机理与仿真研究

根据接触力学理论和导电橡胶的电阻应变关系,对一种基于压敏导电橡胶的三维力柔性触觉传感器阵列的传感机理进行深入的探索,并应用静电比拟法导出传感器节点间电阻与表面应力激励的关系,建立了传感器阵列表面三维力激励与输出电阻的物理模型。以此为基础对传感器输入输出特性进行了仿真,并基于仿真结果对传感器结构进行优化。仿真结果验证了该传感器结构设计的合理性。     

三维柔性触觉/热觉传感器设计与仿真

针对目前触觉传感器研究中不能兼有柔韧性、多维力测量和热觉与触觉信号混杂等难题,设计了一种柔性多功能触觉/热觉传感器。介绍了该传感器的基本结构,并基于聚偏氟乙烯（ PVDF）薄膜的特性建立了三维力并行测量的数学模型。触觉检测基于PVDF的压电效应,热觉检测基于PVDF的热释电效应。通过对触觉和热觉信号做比例减法运算,从而彻底区分触觉和热觉信号。     

A sensor based technique for automated robot programming

This paper presents the concept of integrating a tactile sensor based, automated part measuring technique and a CAD programming scheme to perform off-line programming for a welding robot. The techniques used to achieve data flow throughout the production process include coordinate system referencing, interactive programming, tactile sensing seam tracing, and coordinate transformation. Together they form the backbone of the idea of integrating measurement and production operations where continuous path geometrical control is required. Techniques for referencing a workpiece with respect to different handling devices, and positioning the part on a suitable fixture, form an important portion of this work. Consequently, the positioning aspect and the data transfer capability between stages in the production process are highlighted. The welding of lap-joint type seams serves as an example. The integration of automated measurement and off-line robot programming actually constitutes a flexible manufacturing system operation that is capable of assuring the required process control. In this regard, linking a robot with an automated part measuring technique forms an important step towards upgrading a robot device from a difficult to program unit to a unit with a high degree of flexibility with rapid, convenient automatic contour programming.     

一种新型机器人三维力柔性触觉传感器的设计

基于柔性力敏导电橡胶材料,设计了一种能测量三维力的新型机器人柔性触觉传感器。研究了力敏导电橡胶材料的压阻效应,阐述了触觉传感器的设计思想,分别进行了触觉传感器单元设计和阵列结构设计和研究。获得了计算三维力的数学模型,并通过实验进行了三维力的验证。结果表明,设计的机器人三维力柔性触觉传感器具有设计简单,造价低廉,柔顺性好等优点,而且布置成阵列结构可用于医疗、体育、机器人等领域中检测三维力信息。