小型折反式短波红外光学系统设计

为解决纯折射式光学系统不易实现长焦小型化设计以及纯反射式光学系统不易实现较大视场的技术问题,采用折反式光学结构形式设计了一种焦距为500 mm、工作波段为0.9～1.7■m、F数为5的短波红外成像光学系统。该系统由抛物面主镜、二次曲面次镜以及后组透镜组成,光学系统总长度小于138 mm。设计结果表明,该系统结构紧凑、体积小、成像质量良好,在探测器对应的特征频率33 lp/mm处的调制传递函数(Modulation Transfer Function, MTF)值大于0.55,接近衍射极限。整机装配完成后进行了MTF测试及外景成像测试。实际测试结果与设计分析一致,满足应用需求。     

快速救护微型生化检测仪的光学系统设计

针对快速救护微型生化检测仪对其光学系统的微小型要求,设计了一种基于微型光谱仪的快速救护微型生化检测仪光学系统,实现了光学系统的微小型化。实验测试结果表明,该光学系统满足了快速救护微型生化检测仪光学系统的设计与应用要求。     

激光/电视分光膜的设计与研制

激光/电视分光膜实现了光路的"二光合一",简化了光学系统结构,在军用光学系统中得到了广泛应用。采用匹配层和Refinement计算机辅助法设计了激光电视分光膜,并对所设计的膜层进行镀制;最后,对制备的激光电视分光膜进行测试,结果表明膜层各项性能指标符合设计要求。     

红外二次成像无热化光学系统设计与实测

阐述了二次成像红外光学系统相比于一次成像红外光学系统而言,对温度变化更加敏感的特点及其影响,讨论了基于光学被动式无热化原理的二次成像红外光学系统的设计方法。不仅给出了设计的一个红外制冷型二次成像光学系统的实例,还对该无热化镜头进行了实际加热对比成像试验,并给出了成像测试结果。设计结果表明:该系统在-40℃～+80℃的温度范围内,像质接近衍射限,最佳像面变化量在一倍焦深范围之内,焦距变化率低,实现了光学被动式无热化。实际测试结果显示,所设计的二次成像无热化光学系统,具有良好的无热化能力,高温环境下无需调焦依然清晰成像。     

大口径快反镜面形测试系统设计

大口径快速反射镜（快反镜）常被应用于空间光通信和激光武器等领域。为实现工作状态下大口径快反镜面形误差的实时检测,设计了大口径快反镜面形测试系统。该系统的口径参数为400 mm,工作波长为633 mm,由离轴式前置扩束系统和焦面附件系统组成。对测试系统的设计参数及元件参数选择进行了阐述,设计和仿真了光学系统结构,并基于光机热集成分析获得温度变化对光学系统的影响。测试大口径快反镜面形测试系统后结果表明该系统可实现实时记录和高精度测量,且在温度变化的工作环境下也可实现稳定测量,其测量稳定性为0.048λ（RMS,λ=633 nm）。     

瞬态短波红外光谱仪光学系统设计

设计了瞬态短波红外光谱仪的光学系统。论述了光谱仪的工作原理和光学系统方案选择,对CZ-ERNY-TURNER结构形式的光谱仪进行了光学设计和像差分析。该光学系统的波长范围为900～1700nm,光谱分辨率达到5nm,谱面20mm不平直度0.021mm。光学系统性能接近国外同类产品水平。     

低温真空环境光学系统波像差测试方法

为了能够预知空间低温光学系统成像质量,提出了一种高精度测试低温真空环境下F数小、后截距短的光学系统波像差的方法。首先,分析设计测试光路,对低温光学系统、干涉仪以及平面镜等进行布局,为波像差测试做好准备工作;然后,对低温真空标准透镜、标准平面镜、窗口玻璃等关键部件进行分析与设计,测试时作为系统误差项扣除;最后,调试测试光路,分别得到常温常压和低温真空环境（低温温度为100 K,压强为110-4 Pa）下光学系统波像差。通过精度验证实验表明,测量值与标准值偏差为0.010（=632.8 nm）,差别很小,证明了该测试方法的可行性。解决了光学遥感系统特别是F数小、后截距短在低温真空环境下波像差难以高精度测试或无法测试的难题。     

中波红外光学测试系统的设计

针对中波红外光学系统直观测试要求,考虑机械机构的限制,采用光学检测的方法对待测中波红外光学系统的像面位置、弥散斑大小和扫描圆直径测试系统进行了设计.详细介绍了中波红外光学测试系统的原理,对测试系统中的各个组成部分,包括光学系统、机械系统和图像处理系统,进行了深入的讨论.重点对光学系统中主要影响测试精度的准直器、测量显微系统的技术指标进行了计算.最后,对测试系统的各项指标的测试精度进行了分析,表明测试系统的精度满足使用要求.     

折-衍混合型两档变倍红外光学系统设计

当今红外成像光学系统应用广泛,根据需求,越来越多地采用双视场切换式红外光学系统.为了获得成像质量更好、轻量化的光学系统,引入了衍射光学元件进行光学系统设计,从而提高了镜头的成像质量,减少了光学元件的数量,减轻了系统质量.介绍了含有衍射光学元件的两档变倍光学系统的设计原理,设计了一个含有非球面且结构简单、装调容易的折-衍混合的两档变倍的红外光学系统,分别对长、短焦距位置进行了像差分析,该设计能够很好地满足实际工程的需要.设计结果表明采用衍射光学元件的红外光学系统能够有效地改善光学系统的像质,减小光学系统的体积.     

一种折反二次成像式长波光学系统的杂散光抑制

讨论了一种折反二次成像式长波红外光学系统的杂散光抑制方法,该光学系统采用R-C反射式结构和二次成像光路,用于小型低成本红外成像制导系统。利用LightTools软件仿真找出光学系统中的主要杂散光来源和传输路径,结合仿真分析结果设计出了合适的机械拦光结构。然后在LightTools中建立了光学机械结构模型针对杂散光抑制进行了迭代设计,并对杂散光抑制效果进行了仿真验证。设计的光学系统加工、装配完成后进行了太阳杂散光抑制试验,仿真和试验结果表明:太阳夹角7以外不存在杂散光干扰,可以满足系统杂光抑制要求。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.