A flexure-based mechanism and control methodology for ultra-precision turning operation

This paper presents the methodology for modeling and control of a high precision flexure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the displacement of the flexure-based mechanism for closed-loop control. With consideration of the driving circuit, the dynamic model of the flexure-based mechanism has been established. The effect of the driving circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been carried out to verify the established model and the performance of the flexure-based mechanism.     

Development and dynamic modelling of a flexure-based Scott–Russell mechanism for nano-manipulation

This paper presents the design methodology and dynamic modelling of a piezo-driven flexure-based Scott–Russell mechanism for nano-manipulations. Based on finite element analysis, the Scott–Russell mechanism is monolithically constructed to provide high positioning accuracy and long-term repeatability. With consideration for the effect of the driving circuit, the dynamic model of the flexure-based Scott–Russell mechanism is established. The influence of the time constant RC on the dynamic response is investigated. The transient responses of the flexure-based Scott–Russell mechanism to three typical signals are derived based on the Laplace transform method. It is noted that the cycloidal command signal can generate vibration-free motion, and thus improve the dynamic performance of the flexure-based mechanism. Experimental tests have been carried out to verify the developed Scott–Russell mechanism and the established models.     

二自由度微定位平台的研制

研制了一台压电陶瓷驱动和弹性铰链导向的一体化微定位平台,该微定位平台具有高刚度、高响应速度和高分辨率等优点。为了克服压电陶瓷驱动器伸长量较小的不足,采用杠杆放大机构增加微定位平台的位移输出。考虑驱动电路的影响,建立了微定位平台的机电耦合模型。通过试验研究了微定位平台的静动态特性,试验结果表明微定位平台的分辨率为5 nm,固有频率分别为143 Hz和180 Hz。该微定位平台可应用于纳米级的微定位。     

基于改变正压力的惯性式压电旋转机构的研究

提出通过机械方式控制压电移动机构和支撑面之间摩擦力的有序变化,形成有规律的新型惯性式压电旋转机构的研究方案。设计了旋转机构的结构模型,分析了机构的运动原理,建立了机构的动力学模型,应用现代控制理论,利用Matlab对机构进行了运动学仿真,得到了机构位移、速度仿真曲线,设计、制作了旋转机构样机,并作了相关的性能测试。仿真分析结果和试验结果表明了运动机理和动力学模型的正确性。     

Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning platform

Packaged piezoelectric ceramic actuators (PPCAs) and compliant mechanisms are attractive for nanopositioning and nanomanipulation due to their ultra-high precision. The way to create and keep a proper and steady connection between both ends of the PPCA and the compliant mechanism is an essential step to achieve such a high accuracy. The connection status affects the initial position of the terminal moving plate, the positioning accuracy and the dynamic performance of the nanopositioning platform, especially during a long-time or high-frequency positioning procedure. This paper presents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF) compliant nanopositioning platform. The 1-DOF platform utilizes a parallelogram guiding mechanism and a parallelogram load mechanism to provide a more accurate actual input displacement and output displacement. The simulation results verify the proposed stiffness model and dynamic model of the platform. The values of the preload displacement, actual input displacement and output displacement can be measured by three capacitive sensors during the whole positioning procedure. The test results show the preload characteristics vary with different types or control modes of the PPCA. Some fitting formulas are derived to describe the preload displacement, actual input displacement and output displacement using the nominal elongation signal of the PPCA. With the identification of the preload characteristics, the actual and comprehensive output characteristics of the PPCA can be obtained by the strain gauge sensor (SGS) embedded in the PPCA.     

Detachment modeling of a novel workpiece micro-positioning table under preloaded hertz contact

A micro-positioning table for precision machining applications is developed utilizing a piezoelectric translator to generate high speed precision motions with accelerations up to 33.51 g. The piezoelectric translator is preloaded by four springs such that the moving part in the table keeps contact with the translator. The contact between the translator and the moving part is of the hertz contact type. It is a typical design for high performance micro-positioning devices. It is found that the hertz contact may not be maintained and detachment occurs when implementing large step motions. The detachment phenomenon is analyzed and the models to determine the separation time and the maximum overshoot are established. It is found that the stiffness of the preloading springs and the distance of compression for preloading are the key parameters of the detachment. A pseudo-step command signal design is proposed to use as a solution in order to conveniently reduce the overshoot without compromising the settling time. Experimental tests have been carried out, verifying the established models for the micro-positioning device.     

预压力对压电驱动履带移动系统的性能影响

为了提高夹心式压电驱动移动系统的机械输出性能,提出了一种U型预压力调节机构,并开展了预压力对夹心式压电驱动履带移动系统输出性能影响关系的实验研究。首先,针对U型预压力调节机构的安装对夹心式压电振子的振动特性影响关系开展了有限元仿真分析,发现U型预压力调节机构始终处在夹心式压电振子的两相工作模态振动节点位置;其次,开展了夹心式压电驱动履带移动系统的原理样机的预压力调节测试实验,确定了系统的最大输出牵引力及其所对应的最佳预压力;最后,在最佳预压力工作状态下,开展了原理样机的牵引力特性、越障性能以及模拟月壤环境下的运动特性实验。研究结果表明,在最佳预压力工作状态下,夹心式压电驱动履带移动系统的机械输出性能最佳,为其进一步在月面巡视器上的应用提供了技术支持和试验基础。     

柔性二级差动式微位移放大机构优化设计

微位移放大机构常常用来扩大压电陶瓷致动器的行程范围。鉴于差动式微位移放大机构具有"小结构大倍数"的特点,设计了一种新型二级差动式杠杆微位移放大机构。应用矩阵表示法对其进行了运动静力学分析,在此基础之上,以柔性铰链的分布位置及其几何特征参数为优化变量,并以提高位移放大比和减小最大应力为目标函数建立一种双目标优化模型。机构经过优化设计后位移放大倍数高达48倍,并对其进行有限元仿真分析,计算结果为44倍,理论模型与有限元模型的误差小于10%。结果表明：提出的优化模型具有准确性和高效性,同样可适用于其他柔性铰链机构的优化设计。     

双向作动大行程二自由度稳像机构

针对光学稳像系统的双向动态大行程的设计要求,本文设计了一种可伸缩双向作动的压电作动器,并基于此压电作动器设计了二自由度稳像机构。压电作动器由一个收缩式三角位移放大机构和一个伸张式三角位移放大机构组成。位移放大机构可为压电平台提供足够的行程,柔性铰链可使平台结构更加紧凑。接着,利用有限元分析软件ANSYS对平台结构进行静力学仿真,模拟了平台的位移和应力变化。最后对原理样机进行了实验分析,实验结果显示所设计压电平台在低电压和低频率下有足够大的行程和足够快的响应速度,作动器在120V电压下的输出位移在67μm左右,基本满足稳像系统的性能要求,故平台结构的设计方案是可行的。     

Closed-Form Modeling and Analysis of an XY Flexure-Based Nano-Manipulator

Flexure-based mechanisms are widely utilized in nano manipulations. The closed-form statics and dynamics modeling is difficult due to the complex topologies, the inevitable compliance of levers, the Hertzian contact interface, etc. This paper presents the closed-form modeling of an XY nano-manipulator consisting of statically indeterminate symmetric(SIS) structures using leaf and circular flexure hinges. Theoretical analysis reveals that the lever's compliance, the contact stiffness, and the load mass have significant influence on the static and dynamic performances of the system.Experiments are conducted to verify the effectiveness of the established models. If no piezoelectric actuator(PEA) is installed, the influence of the contact stiffness can be eliminated. Experimental results show that the estimation error on the output stiffness and first natural frequency can reach 2% and 1.7%, respectively. If PEAs are installed, the contact stiffness shows up in the models. As no effective method is currently available to measure or estimate the contact stiffness, it is impossible to precisely estimate the performance of the overall system. In this case, the established closed-form models can be utilized to calculate the bounds of the performance. The established closed-form models are widely applicable in the design and optimization of planar flexure-based mechanisms.     

一种压电执行器部件预紧力测试方法研究

压电执行器部件是新一代高压共轨压电喷油器中的关键部件,其封装时需要施加一定的预紧力.本文提出了一种压电执行器部件预紧力的测试方法,设计了相应的测试装置,并制定了试验流程.通过样品压电执行器部件预紧力的试验验证,表明该测试方法可以准确测量压电执行器部件预紧力大小.     

压电驱动器的非线性模型及其精密定位控制研究

压电驱动器的非线性特性和迟滞特性是影响微动平台定位控制精度的主要因素。采用改进的Preisach模型对压电驱动器的迟滞特性进行建模，利用建立的Preisach模型进行开环精密定位控制和作为PID反馈控制的前馈环节的研究。实验结果表明，该模型能够有效地降低非线性迟滞特性对压电驱动器位移输出精度的影响，提高驱动器的动态响应特性。     

Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier

This paper investigates a flexure-based compound bridge-type (CBT) displacement amplifier for piezoelectric drives. In addition to the advantages of large amplification ratio and compact size, the CBT amplifier has a larger lateral stiffness and is more suitable for actuator isolation and protection than the ordinary bridge-type amplifier. An analytical model for amplification ratio calculation is established based on the Euler-Bernoulli beam theory because other simple theoretical approaches cannot predict the ratio properly. The reason why those approaches fail is discovered by resorting to the elastic model. The input stiffness and resonance frequency of the amplifier are also analytically modeled and verified by finite-element analysis (FEA). The derived models are utilized to optimize the amplifier structure through particle swarm optimization (PSO) to obtain a large resonance frequency subject to other performance constraints. The performances of the fabricated amplifier with optimized parameters are confirmed by both FEA simulation and experimental studies. Because an output displacement over 1 mm is achieved by the designed amplifier, it is employable to develop micro/nanopositioning stages with a cubic millimeter sized workspace.     

Sliding mode control of the inchworm displacement with hysteresis compensation

This paper proposes a new modeling scheme to describe the hysteresis and the preload characteristics of piezoelectric stack actuators in the inchworm. From the analysis of piezoelectric stack actuator behavior, the hysteresis can be described by the functions of a maximum input voltage and the preload. The dynamic characteristics are also identified by the frequency domain modeling technique based on the experimental data. The hysteresis is compensated by the inverse hysteresis model for precise control of inchworm displacement. Since the dynamic stiffness of an inchworm is generally low compared to its driving condition, the mechanical vibration may degrade accuracy of the inchworm. Therefore, the SMC (Sliding Mode Control) and the Kalman filter are developed for the motion control of the inchworm. The feasibility of the proposed modeling scheme and the control algorithm is tested and verified experimentally.     

动基座光电稳定平台伺服系统中加速度反馈的实现

在动基座光电稳定平台伺服系统中引入了加速度反馈闭环以提高其动态性能。考虑准确建立动基座光电稳定平台控制对象模型难度很大,该加速度反馈闭环没有基于控制对象模型,而是通过直接测量角加速度信号来实现。仿真、分析结果表明,加速度反馈闭环的引入有效提高了伺服系统动态力矩刚度,并改善了伺服系统起动、制动性能。引入加速度反馈闭环后,动基座光电稳定平台伺服系统对摩擦力矩抑制能力明显提高;对周期性扰动抑制能力提高了9.3dB;对速度阶跃响应超调量降低了4.9%,同时过渡过程也有极大的改善。该伺服系统不仅结构简单,鲁棒性强,且有较好的通用性。     

杠杆式尺蠖压电直线驱动器

设计了一种基于尺蠖运动原理的压电直线驱动器,用于解决光学领域中的精密定位问题。该驱动器采用了对称杠杆式位移放大机构,在保证钳紧力的同时,可以获得较大的驱动位移。阐述了尺蠖式压电驱动器的工作原理,对杠杆式柔性放大机构的位移损失、压电陶瓷与柔性机构的耦合特性及箝位机构与中间驱动机构的刚度进行了分析。利用有限元软件Ansys对钳位机构和驱动机构的变形、应力、输出位移和固有频率等参数进行了仿真分析。最后,搭建了实验平台,测试了驱动器的各项性能。测试结果显示,该驱动器的行程为±25mm,钳紧力为17N,承载力为11N,最大和最小步距分别为55μm和60nm。当驱动电压为150V时,驱动器的最高驱动速度为1.259mm/s。得到的性能指标满足光学领域精密定位需要。     

Design and forward kinematics of the compliant micro-manipulator with lever mechanisms

This paper presents the forward kinematics of a five-bar compliant micro-manipulator. To overcome the limited displacement of such a flexure-based mechanism driven by piezoelectric actuators, lever mechanisms are utilized to enlarge the working range. The mechanical design of the micro-manipulator is firstly described. Mathematical formulations for the five-bar mechanism are described and the solutions are developed to decide the end-effector position in Cartesian space. The amplification factor of the lever mechanism is also derived based on the analytical solution of the four-bar linkages. The velocity of the end-effector is obtained by differentiating the forward position kinematic equation, and the local mobility index of the five-bar compliant mechanism is determined and analysed. Based on linearization of trigonometric functions and constant Jacobian matrix, numerical simulations are carried out to investigate the performance of the five-bar compliant manipulator and to determine the optimal geometric parameters for the configuration. The comparisons between the exact solution and simplified methodologies are conducted. Experiments are carried out to validate the established model and the performance of the developed micro-manipulator.     

尺蠖型压电直线驱动器的动态特性

分析了尺蠖型压电直线驱动器的结构原理,建立了驱动器系统动力学模型。对驱动器定子进行了模态分析,并对分析结果进行了评价。对设计开发的驱动器样机输出特性进行了试验测试,实验测得驱动器单步输出位移稳定可靠,100 V驱动电压下,单步输出位移为9.8 μm。对驱动器直线动子的速度、加速度特性进行了测试,依据速度、加速度信号进一步分析了驱动器的动态响应特性。实验结果表明,所开发的驱动器具有动态特性好、运动稳定等优点。     

具有偏置结构的非对称惯性压电旋转驱动器

为改善惯性压电驱动器输出性能,提出了一种新型具有偏置结构的非对称惯性压电旋转驱动器。在非对称夹持的基础上,定义了一种偏置结构。为了解偏置结构对驱动器输出性能的影响,建立了机构的力学模型方程,推导并仿真分析了驱动器的动力学特性。设计、制作了试验样机,搭建了试验系统;进行了试验测试并与无偏置结构驱动器进行了性能对比。结果表明:偏置距离为15mm时,驱动器输出步距角速度最大。与无偏置结构驱动器相比,驱动电压为100V、23Hz时,驱动器输出最大角速度从3.48rad/s增加至5.39rad/s,增幅达54.88%,驱动器最大驱动力矩从2.41N·mm增加至3.62N·mm,增幅达50.2%;驱动电压为100V,4Hz时,驱动器稳定运行时的承载量达1 300g。理论与试验结果表明,提出的有偏置结构的驱动器具有输出步距角速度和驱动力矩更大的特点。     

Second-order sliding mode tracking control for the piezoelectric actuator with hysteretic nonlinearity

For the piezoelectric actuator model with hysteretic nonlinearity, a second-order sliding mode tracking controller is proposed. First, a second-order nonlinear dynamic model is introduced for the piezoelectric actuator. Next, a second order sliding mode control law with dual-phase sliding movement is designed. Then, the system stability is proved with a theorem. From theoretical analysis, the feedback control system is stable in the sense that all signals involved are bounded. The simulation results show the validity of the proposed method for this kind of nonlinear dynamic model of the piezoelectric actuator.