面向高性能的红外折射式镜头装调技术

针对红外光学材料折射率不均匀导致系统波前产生异常像差,从而引起镜头像质严重下降的问题,提出了一种光学件位置迭代调整和面形修配相结合的系统波前补偿方法,实现面向高性能的红外折射式镜头装调。在光学件精密定心的基础上,设计了在线装调检测装置,依据镜头实测波前并结合计算机辅助装调技术,通过迭代调整光学件位置矫正系统波前初阶像差。对系统残留的中高阶像差,根据各视场测得的系统波前综合分析计算,采用修配光瞳处光学件面形,引入反残留波像差的方式补偿。实验上,通过对某红外折射式镜头装调,将镜头三个视场系统波前RMS (λ=3.39μm)分别由精密定心后的0.162λ、0.118λ、0.166λ降低至0.064λ、0.040λ、0.067λ,平均MTF (@25 lp/mm)由0.31提升至0.67。结果表明,这种装调技术对红外折射式镜头系统波前补偿效果明显,可大幅提升镜头成像性能,具有重要的工程应用价值。     

自由曲面离轴四反全铝光机红外探测系统(特邀)EI北大核心CSCD

为满足红外探测系统对大视场、轻量化、低成本的需求,设计并研制了一款用于制冷型红外探测器的自由曲面离轴四反全铝光机系统。光学设计采用具有实出瞳的离轴无遮拦全反射式光路形式,并利用7次XY多项式表征各反射镜面型。在紧凑包络约束下,实现了6.25°×5°的视场角,全视场RMS几何弥散斑半径<6.0μm。各反射镜和支撑结构材料均选用6061-T651铝合金,各反射镜进行了柔性支撑设计,以降低装调时的刚性连接应力。采用激光干涉仪对光机系统波像差进行了测试,典型视场波像差相似文献   

基于自准直原理的小视场镜头波像差测试系统

为实现对小视场光学镜头波像差的快速、高精度检测,将自准直原理与斐索型激光球面干涉仪检测波像差原理结合起来,提出一种基于自准直原理的光学镜头波像差检测系统。介绍了斐索型激光球面干涉仪检测波像差的工作原理,并详细论述了基于自准直原理的波像差检测系统的装调及检测方法。结合自准直光路的特点,实现对干涉仪光轴、被测光学镜头光轴以及高精度平面反射镜光轴的精确定轴,从而实现了系统光路的快速装调。实验证明,此系统可有效解决小视场光学镜头在波像差检测过程中的光轴偏斜问题,实现小视场光学镜头波像差快速、准确的检测。     

方形孔径自由曲面反射式系统装调技术研究

针对方形孔径自由曲面反射系统,构造方形域上正交多项式用于波前解析,得到方形孔径系统波像差系数。在计算机辅助装调阶段,为确保装调结果准确,用方形域上正交多项式和光学设计软件来建立系统的灵敏度矩阵,结合自准直干涉法得到的多个视场得波像差来求解系统失调量;在多次迭代后得到系统平均RMS为0.164 1(632.8 nm)实测系统平均传递函数达到0.453 4的理想结果;证明该装调方法正确性,并适用于其他形状孔径自由曲面离轴反射系统式系统装调。     

R-C光学系统的计算机辅助装调

R-C光学系统是现代光学工程中常用的光学系统,以某一R-C光学系统为例,对其计算机辅助装调技术进行了研究。分析了R-C系统装调理论,确定以主镜为装调基准,调整次镜五个自由度的装调方法,建立起次镜失调量与系统Zernike系数的关系,以此指导装调工作,达到明确装调方向、缩短装调周期的目的。整机光学系统的波像差RMS值优于1/10波长,达到了成像质量的要求。对相机进行实验室和地面外场成像,获得的图像图像清晰,层次丰富,验证了装调工作的正确性。     

离轴三反系统计算机辅助装调

为实现对离轴三反系统快速、有效的装调,提出了一种离轴三反系统计算机辅助装调（CAA）方法。该方法在理论分析失调后离轴三反系统像差特性的基础上,结合CAA技术及光学装调的实际情况,选择出最少且最合理的调整量;根据检测数据及CAA数学模型直接计算出调整量的大小及方向。采用该方法对一离轴三反系统进行实际装调,将调整量从11个减少到7个,利用波前传感器被动式检测方法对离轴三反系统0及1视场像质进行检测,通过一次计算调整快速使该系统全视场波像差从RMS0.32减少至RMS0.067（=632.8 nm）,结果表明该装调方法简单、有效。     

主三镜一体化离轴三反光学系统设计

离轴三反光学系统具有成像质量高、可实现大视场、无遮拦等优点,但其装调难度大,镜面支撑结构质量大。为解决这些问题,基于三级像差理论,研究一种主镜、三镜可集成一体化的大视场离轴三反光学系统,并以焦距为1 200 mm,F数为12,视场为101的光学系统为例进行了验证设计。结果表明:调制传递函数接近衍射极限,视场内平均波像差RMS值为/55,最大波像差RMS值为/22。设计结果显示,光学系统装调自由度由12个减少到6个,可使光机系统可得到简化,实现了主三镜一体化设计。     

空间碎片探测与测距复合系统光学望远镜

针对空间碎片探测与测距复合系统地面验证演示实验中,工作环境10~30 ℃、光学基台的尺寸限制（不超过450 mm×400 mm）以及光学望远镜尾部安装导致重心远离安装面的问题,提出了空间碎片探测与测距复合系统光学望远镜的设计。使用ANSYS有限元分析软件对光学望远镜建立了有限元模型,针对环境温度10~30 ℃、尾部安装状态下、光轴方向和垂直光轴方向1 g （g=9.8 m/s2）重力加速度工况下进行了分析。分析结果表明:光学望远镜整机一阶模态为133 Hz动态刚度较好,重力为光轴方向时主次镜间距最大变化量0.01 mm,重力为垂直光轴方向时主次镜间距最大为0.007 mm,光学望远镜系统波像差RMS值为λ/15,次镜最大倾角1.93″,具有较好的力、热稳定性,可以满足光学天线装校、检测以及外场实验验证过程中的指标要求。在光学望远镜装校完成后,使用ZYGO干涉仪对其像质进行检测,在重力垂直于光轴方向、环境温度10、20、30 ℃条件下进行检测,结果显示:系统波像差RMS值分别为0.097λ、0.075λ及0.1λ,整机光学望远镜系统波像差RMS值在最低温与最高温度时均优于λ/10均满足系统使用要求。     

空间碎片多光谱探测相机光学系统设计

为了实现对空间碎片探测,提出了一种空间碎片多光谱探测相机光学系统,由可见光相机、长波红外相机、中波红外相机光学系统组成,三个相机共用主、次镜,在三路相机光学系统中同时加入校正组件平衡校正像差,可见光相机焦距为1000mm,视场为1.2,长波红外相机焦距为-250mm,视场为2.75,中波红外相机焦距为-500mm,视场为1.38,考虑了温度对相机像质的影响,采用热膨胀性系数小的材料作为反射镜基底,分析了三个相机光学系统在空间环境下（205℃）温度环境下的像质变化,设计结果能满足使用要求。     

面型误差和失调量对同轴三反系统像质的影响

应用于对地观测的高分辨同轴三反式系统对光学装调有着严格的要求,光学元件的失调量和由装配应力导致的面型误差都会严重影响系统成像质量。该方法通过镜面受力分析和光学系统仿真指导系统装调,以某商业遥感卫星搭载的同轴三反式镜头装调过程为例,分析失调量和面型误差的像差特性。通过分析光学元件失调量和面型误差与系统像散、彗差以及球差的关系,并利用系统波像差的均方根（RMS）作为系统像质的评价标准,得出各个光学元件失调量和面型误差对系统成像质量的影响权重。根据计算结果进行针对性调校,使系统各视场的平均RMS值收敛为0.06以下。经过多台同类镜头装调结果验证,证明该方法切实有效,可缩短装调周期,提升装调精度。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.