低N含量GaAsN材料的共振喇曼散射及其带边以上的光致发光光谱

利用显微光致发光技术,观测到了N含量为0.1%,0.22%,0.36%和0.62%的GaAsN合金的E0,E0+△0和E+能级的光致发光峰.共振喇曼散射谱进一步证实了这些发光峰来源于所研究材料的本征能级,而不是来源于GaAsN合金中的一些局域激子发射.随着N组分的增加,E0+△0和E+能级分别向低能和高能方向移动并在N组分为0.16%时发生交错.文中提出了一种少量等电子掺杂和显微光致发光谱相结合的方法来直接观测半导体材料带边以上的跃迁能级,尽管光致发光谱通常没有用来观测这些能级位置.     

纳米ZnO光学性质研究进展

介绍了纳米ZnO常见发光谱的发光机制。在室温光致发光谱(PL)中,一般在380 nm处出现紫外发光,也有报道在357和377 nm处的紫外发光,列举了几种不同的发光解释。对于深能级发光,一般在400～550 nm出现连续的发光带,也有观察到深能级的声子伴线和声子复制现象。在低温光致发光谱的紫外发射中,一般观察到由自由激子发射(FX)、中性施主束缚激子发射(D0X)、施主-受主对跃迁峰(DAP)、中性施主束缚激子对应的双电子卫星峰(TES)以及声子伴线。综述了纳米ZnO的喇曼光谱、透射光谱、电致发光谱(EL)的特征,最后展望了纳米ZnO的光学性能研究前景。     

GaP_(1-x)N_x混晶的喇曼散射谱

在室温下测试了Ga P1 - x Nx(x=0 .0 5 %～3.1% )混晶的喇曼散射谱.在一级喇曼散射谱中观测到了Ga P的L O(Γ)模和强度较弱的禁戒TO(Γ)模以及N的局域模(495 cm- 3) .在N组分较高的一组样品(x=1.3%～3.1% )中,还观察到了位于Ga P的L O(Γ)模和TO(Γ)模之间的由N导致的L O(N)模的喇曼频移(387cm- 1 ) ,其强度随着N浓度的增加而增强.在二级喇曼散射谱中,除了观测到布里渊区中心的声子散射峰2 L O(Γ)外,还观测到了布里渊区边界的声子散射峰2 L O(L )、2 TO(X)以及L O(L ) +TO(X) .且边界散射峰的强度比中心散射峰更强.另外在组分x=0 .6 %和x=0 .81%的样品     

掺碳氮化镓的光学性质

利用喇曼光谱和光致发光谱,对采用氢化气相外延淀积方法在MOCVD GaN衬底上生长的掺碳GaN样品的光学性质进行了研究.结果发现C3H8流量的增加导致载流子浓度的升高,喇曼谱出现蓝移,E1(LO)声子的Raman强度变弱.同时光致发光谱中蓝光带和黄光带发光强度随着掺碳浓度的增加先增强后减弱,这与掺杂碳的自补偿效应有关.高碳掺杂量的GaN材料的结构与光学性质均显著下降.     

掺碳氮化镓的光学性质

利用喇曼光谱和光致发光谱,对采用氢化气相外延淀积方法在MOCVD GaN衬底上生长的掺碳GaN样品的光学性质进行了研究.结果发现C3H8流量的增加导致载流子浓度的升高,喇曼谱出现蓝移,E1(LO)声子的Raman强度变弱.同时光致发光谱中蓝光带和黄光带发光强度随着掺碳浓度的增加先增强后减弱,这与掺杂碳的自补偿效应有关.高碳掺杂量的GaN材料的结构与光学性质均显著下降.     

分子束外延Hg0.68Cd0.32Te薄膜光致发光和喇曼散射的研究

对利用ＭＥＢ技术生长的Ｈｇ０．６８Ｃｄ０．３２Ｔｅ薄膜进行了光致发光和喇曼光谱的研究，拟合薄膜光致发光谱得到的禁带宽度，与红外透射谱得到的薄膜带宽相近；其半宽仅为５ｍｅＶ，带尾能量小于１．３ｍｅＶ，显示了较高的薄膜质量。     

GaP1-xNx混晶的喇曼散射谱

在室温下测试了GaP1-xNx(x=0.05%～3.1%)混晶的喇曼散射谱.在一级喇曼散射谱中观测到了GaP的LO(Γ)模和强度较弱的禁戒TO(Γ)模以及N的局域模(495cm-3).在N组分较高的一组样品(x=1.3%～3.1%)中,还观察到了位于GaP的LO(Γ)模和TO(Γ)模之间的由N导致的LO(N)模的喇曼频移(387cm-1),其强度随着N浓度的增加而增强.在二级喇曼散射谱中,除了观测到布里渊区中心的声子散射峰2LO(Γ)外,还观测到了布里渊区边界的声子散射峰2LO(L)、2TO(X)以及LO(L)+TO(X).且边界散射峰的强度比中心散射峰更强.另外在组分x=0.6%和x=0.81%的样品中,还得到了诸如来自不同NNi对或N原子簇团的局域模和由N导致的新的散射峰.     

激光灼蚀形成纳米硅的光致发光谱研究

在激光灼蚀(PLD)系统中,采用流动的N2作为环境气体成功制备了尺寸从2纳米到几纳米之间的纳米硅,并在1.60～1.75eV之间观测到了较强的光致发光谱:结合Raman散射和光致发光谱的分析,推断强光致发光来源于纳米硅的量子效应。     

嵌入在Si衬底上的分子束外延GaAs层的微区喇曼和光致发光分析

对分子束外延生长的嵌入在Si衬底上的边长为20—150μm正方形GaAs层微区进行了微区喇曼和光致发光分析。发现微区GaAs层的喇曼散射谱和光致发光谱与普通平面Si片上生长的GaAs层的基本相同,证实嵌入式生长可以得到与通常平面生长基本相同的质量。仔细的分析表明随着微区尺寸的减小GaAs层的无序程度有少许增长。     

显微喇曼光谱用于对SOI材料局域应力表征

本文从喇曼光谱原理、实验方法和实验手段上阐述显微喇曼在测试SOI材料局部应力中的应用，详细综述了显微喇曼光谱对各种不同SOI材料的喇曼分析。通常来说，局部内应力会引起喇曼峰的宽化以及峰位的移动，压应力会使喇曼峰向高频方向移动，而张应力却是向低频方向移动。详细分析喇曼峰的移动情况可以分析材料内部的应力分布情况。由于显微喇曼能提供小于1μm空间分辨率，同时分析时无需对材料进行破坏，因而是一种实用性很强的分析手段。     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.