口齿式定子驱动的平面超声电机特性分析

推出口齿形定子驱动的压电平面电机,选定子的面外弯振、面内横齿弯振、面内纵齿弯振作为工作模态,利用面外弯振分别与面内纵齿弯振、面内横齿弯振的振动耦合,分别在纵、横齿驱动足上生成沿xOz、yOz面行进的椭圆轨迹,以推动动子沿x、y向移动,阐明了电机的运动原理。基于频率一致性目标优化了定子尺寸,并厘定电机最适驱动频率为30 800 Hz。建立了定子机电耦合分析模型,计算出定子的瑞利阻尼,模拟出驱动足的椭圆轨迹,仿真得到在250 V电压激励时驱动足的x、y、z向振幅分别为2.1μm、2.6μm和2.0μm。探析了驱动电压、频率、相位差对电机振幅的影响。     

异形薄板式超声换能结构驱动的压电平面电机

提出基于异形板振动驱动的平面运动电机新原理,以异形板的两纵杆上端作为驱动足。利用两纵杆的面内一阶反对称纵振分别与面内二弯、面外二弯的振动耦合,在驱动足形成沿xOy、zOy面的椭圆轨迹,推动动子x、z向自由度运动。阐释了电机驱动机理,推导出驱动足椭圆轨迹方程。建立定子多工作模态频率一致性优化模型,确定了定子尺寸;设计了电机装配结构;建立了电机的限元数值模型,求得定子工作模态及频响特性,仿真出驱动足的两相椭圆运动,从而验证了电机原理。探索出电机调频、调压、调相位运动特性。当正常电激励时,驱动足沿x、y、z向振幅可达1.42μm、1.28μm、1.33μm,电机x、z向速度有望达156mm/s、146mm/s。     

双H叉合式定子谐振驱动的压电平面电机研究

为满足应用领域对高精密平面运动驱动的需要,提出了双H叉合式谐振驱动的平面电机及其动力学结构,择取该定子的面外对称弯振、左右杆面内弯振、上下杆面内弯振模态为电机的工作模态,通过面外弯振模态分别与两相面内弯振模态进行谐振耦合,分别在定子上下杆和左右杆的驱动足上复合出沿xz、yz面行进的两椭圆轨迹以驱动动子的x、y向运动。建立了定子的机电耦合分析有限元模型,求取了定子工作振动模态,验证其预设工作模态的存在性。通过对定子进行频率一致性计算,得到定子的主要尺寸为30 mm×8.7 mm×7.4 mm;通过定子谐响应分析,解算出其干扰模态特性,实现了干扰模态分离。通过定子瞬态振动响应计算,模拟出驱动足的两相椭圆轨迹,求得250 V驱动电压激励条件下的驱动足x(或y)和z向振幅分别为1.5μm和1.3μm,验证了电机工作原理并探析其调压、调频和调相振动特性。给出了定子夹持固定方式并完成了电机装配结构设计,该电机具有良好的动力学特性和应用前景。     

四音叉定子驱动的压电旋转电机动力学特性

提出基于四音叉式定子驱动的旋转超声电机,选定定子的一阶面外弯振与二阶面内弯振为工作模态,复合形成旋转运动。阐明了电机驱动机理,基于频率一致性优化得到音叉杆尺寸为24 mm×4.2 mm×5 mm,公共部分尺寸为12 mm×12 mm×3 mm。建立电机的有限元(FEM)模型,对电机进行谐响应分析,排除激励时产生干扰模态。采用激励信号幅值为250 V、频率为28 000 Hz对电机进行瞬态分析,得到动足的x、y、z向振幅分别为1.4μm、0.8μm和1.2μm。对电机进行运动特性分析,验证了该旋转电机具有良好的调频、调压、调相特性。     

基于H卧板面内四足驱动的平面超声电机

提出H结构定子三相振动模态驱动的平面超声电机,设定H卧板两纵杆端部处于xOy面内的四个凸起作为定子驱动足。通过H结构的面外二弯模态分别与面内一纵模态以及面内二弯模态的振动复合,在驱动足合成出沿yOz面、xOz面的椭圆轨迹,推动动子交替地沿x、y向做直线运动。阐释了电机的工作原理,推导出驱动足的两相空间椭圆轨迹方程;建立了定子有限元分析模型,实现了定子频率一致性动力学特性优化,仿真出驱动足的频响特性、振动响应及其运动调节特性,设计了电机的装配结构。模拟了仿真定子的运动,结果表明,驱动足沿x、y、z向振幅均达微米级,且调节激励电压和相位可调节电机x、y向速度与推力。该电机具有广阔应用前景。     

复十形定子正交模态驱动的旋转超声电机研究

为了丰富旋转超声电机的型式,该文提出了一种复十形定子正交模态驱动的旋转超声电机。选取定子的面内、外弯振作为电机的工作模态,阐述了定子驱动机理。建立了定子有限元(FEM)模型,对电机进行模态分析,基于两相工作模态频率一致性的目标对定子进行尺寸优化,最终确定定子的主要尺寸L、H、K、J、I、D分别为18.2 mm、3.2 mm、36 mm、4.3 mm、11.6 mm、3.4 mm,此时两相模态频率分别为37 851 Hz和37 959 Hz。对电机进行谐响应分析,以排除干扰模态的影响。对电机进行瞬态分析,当以250 V、37 800 Hz的信号激励时,x、y、z各向振幅可达393 μm、3.61 μm、4.12 μm。探究了电机的调压、调频及调相特性,设计了电机的装配结构,该电机有望产生较大的动力及速度。     

双作动板驱动的压电宏微直线作动器研究

针对单板式压电作动器动力小、速度低等问题,为丰富宏微直线作动器形式,该文提出基于双作动板式定子的压电直线作动器。选定双作动板的一阶纵振和二阶弯振为作动器工作模态,利用纵振驱使动子滑移,借助弯振实现驱动足与动子的动态接触与分离。阐释了双作动板推动动子前移的过程,推导出驱动足的椭圆轨迹方程及椭圆形成条件。优化出定子结构尺寸为45.3 mm×11.2 mm×6 mm,实现了两工作模态的简并。建立了定子机电耦合分析模型,解算出两相工作模态的振型,求得两相模态频率分别为34 994 Hz和34 998 Hz,模拟出驱动足的椭圆行进轨迹,求得定子的调压及调频振动特性。测试表明,当驱动电压的幅值和频率为250 V、34 938 Hz 时,驱动足的x、z向振幅分别达1.34 μm和2.73 μm,足以推动动子移进。设计了双板式作动器的装配结构,建立了其三维装配模型。该作动器有望输出较大动力与速度,具有广阔的应用前景。     

盆架状压电宏微平面作动器半解析性理论建模

为丰富宏微平面运动装置形式,该文提出了盆架状压电作动器。设定盆架状结构的一阶面内对称弯振模态和二阶反对称纵振模态为工作模态,利用粘附于盆架状作动器表面的压电陶瓷激发工作模态振动,迫使驱动足同时沿xOz、yOz面做椭圆轨迹行进以推动移动体。根据传递阵力学原理,构造作动器各单元的振动传递方程,在确定各单元间连接与传递条件及作动器压电边界条件基础上,建立了作动器的半解析性机电耦合传递矩阵模型,编制了模型的解算程序。建立作动器的多目标优化数学模型,求得其优化结构尺寸。为印证半解析理论模型,还构建了作动器的机电耦合有限元数值模型。传递阵模型与数值模型解得的作动器工作模态频率差分别为177 Hz和191 Hz,求取驱动足在x、y、z向的振幅分别为2.95μm、3.27μm、1.37μm及3.12μm、3.61μm、1.82μm,表明了半解析模型的有效性。结果表明,该文提出的结构设计与驱动原理相结合的作动器分析方式,为优化压电作动器性能开启了新思路。     

双变幅杆V形直线超声电机研究

提出一种改进的V形直线超声电机.该电机利用两垂直兰杰文振子的纵、弯振动,在其驱动足处形成椭圆运动,推动动子运动.采用超声变幅杆结构的兰杰文振子,放大了定子驱动足处的振幅.有限元法用来设计定子结构尺寸,调节对称模态与反对称模态的频率一致性.实验表明,在预压力50 N下,该电机最大空载速度为235 mm/s,最大输出力21.4 N,定子质量为87.3 g,推重比达25.     

工字型定子驱动的压电直线电机动力学特性

提出工字型定子驱动的压电直线电机,将工型结构上两平行板的面内一、二阶反对称弯振作为工作模态,以板侧的4个凸起作为驱动足。这些驱动足沿对角线分为两组交替地驱动动子。阐述电机的驱动机理,建立了定子的机电耦合分析数值模型,求解出电机工作模态,模拟出驱动端轨迹,验证了电机原理,完成了电机装配结构设计。研究表明,当弯、纵振激励电压分别为50V和250V时,驱动端的z、y向振幅分别达1μm和2μm。该电机有望输出较大动力和速度,具有良好的应用前景。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.