基于等离子体结构的太赫兹石墨烯电光调制器的机理分析（英文）

基于等离子体共振机理,提出了一种包含金属/石墨烯/Al_2O_3/石墨烯堆栈结构的等离子体脊型波导.基于光电效应的微观机理分析,通过设计波导结构和等离子体结构,优化调制器的性能.结果显示,电光调制器的插入损耗很低,工作在近红外波段,调制速率为730 GHz,能量损耗为0.7 fJ/bit,3-dB带宽为3.66 THz.     

基于石墨烯-硅波导的微环光电探测器

本文提出了一种基于石墨烯-硅波导的微环光电 探测器。该器件采用全通型微环谐振 器作为基本单元,通过优化基于石墨烯-硅波导微环谐振器的结构参数,以满足临界耦合状 态需求,用于增强石墨烯与光的相互作用,并利用电子束光刻、等离子体刻蚀、石墨烯转移 以及电子束蒸发等工艺制备基于石墨烯-硅波导的微环光电探测器。实验结果表明,当在偏 置电压为－0.1 V时,探测器的最佳响应度R_p=12.5 μA/W。     

二维铁电材料调控下的石墨烯超灵敏太赫兹探测器

石墨烯具有缺陷密度低、易大面积转移,载流子迁移率高等优异特性,但石墨烯具有的零带隙能带结构导致光生载流子寿命不高,制约了其在高灵敏光电探测器的应用。本工作中利用铁电材料CuInP₂S₆（CIPS）做顶栅来调控石墨烯的光电特性,探索了提升石墨烯太赫兹探测器灵敏度的可能性,研究了基于铁电调控下的石墨烯光热电效应和等离子体波自混频效应的探测机理,得到了高性能的石墨烯太赫兹探测器。在40 mV的偏置电压和2.12 V的栅压下,该器件在0.12 THz波段辐射下达到了0.5 A/W的响应率,响应时间为1.67 μs,噪声等效功率为0.81 nW/Hz^1/2。在0.29 THz波段辐射下仍达到了0.12 A/W的响应率,且噪声等效功率为1.78 nW/Hz^1/2。该工作展示了二维铁电异质结构在太赫兹波段中的巨大应用前景。     

石墨烯掺杂Cs2CO3作为高效电子注入层的OLEDs性能研究

研制了石墨烯掺杂Cs₂CO₃(Cs₂CO₃:Graphe ne )作为高效电子注入层、结构为ITO/N,N′-bis-(1-naphthyl) -N,N′-diphenyl-1,1′-biphenyl-4,4′-diamine (NPB)(50 nm)/tris-(8-hydroxy quinoline)-aluminum Alq₃(80 nm)/Cs₂CO₃:Gra phene (mss 20% 1nm)/Al(120 nm)的OLEDs。将其与标准器件ITO/NPB(50 nm)/Alq₃(80 n m)/LiF(0.5 nm)/Al(120 nm)作性能比较,研究石墨烯掺杂在Cs₂CO₃中作为电子注入层 对 OLEDs性能的影响。结果表明,基于Cs₂CO₃:Graphene结构作为电子注入层的器 件效率要高于LiF作为电子注入层的器件,其最大电流效率达到2.02 cd/A, 是标准器件的2.59倍;亮度也高于LiF作为电子注入层的器件,在10 V时达 到最大值7690cd/m²,是标准器件最大亮度 的2.07倍。性能得到提高的主要机理是由于Cs₂CO₃:Graphene的引入提高了电子注入效率。     

基于S型Y分支波导的石墨烯M-Z电光调制器设计

利用COMSOL软件设计了一种基于S型Y分支SOI脊波导的石墨烯M-Z电光调制器,并对Y分支波导曲率半径、相位臂长度、芯层间距和输入输出直波导长度等结构参数对调制器的影响进行了分析.在此基础上对电光调制器的性能指标进行了计算和优化,最终设计出了3 dB带宽为143 GHz、消光比为15.05 dB的硅基石墨烯M-Z电光调制器.     

基于纳米锥结构的钙钛矿材料吸收特性研究

本文对ZnO结构太阳能电池钙钛矿(CaTiO₃)薄 膜层中嵌入的Ag粒子的等离子体增强进行了理论分析。由于引入了Ag颗粒,归因于Ag颗粒的 强表面等离子体吸收和Ag与CaTiO₃之间的协同作用,太阳能电池的吸收得以增强。在计算 分析中,Ag粒子的最佳半径为80 nm。优化的纳米结构的平均吸收效 率可以达到80％,比纯CaTiO₃薄膜层结构的平均吸收效率高24％。因此认为,本文设计研究的 Ag/CaTiO₃太阳能电池结构可能以低成本和简单的制造工艺成为未来工业制造领域的焦点 。     

3- 中红外偏振无关且CMOS兼容的石墨烯调制器

文章提出了一种3 中红外波段偏振无关且CMOS兼容的石墨烯调制器,器件主要包括两部分：模式转换结构及石墨烯调制器。该调制器不仅满足于CMOS兼容的要求,而且能够实现基膜的偏振无关调制。仿真结果表明该调制器在2.95 到3.05 的中红外波段能够实现高于20 dB的消光比,TE和TM模式的插入损耗都低于1.3 dB,其偏振相关损耗低于1.09 dB。通过计算,当器件长度为420 ,能够获得高达9.47 GHz的3 dB带宽。     

基于Ni/HfO2/Pt结构的阻变存储器的高温稳定性研究

这篇文章研究了Ni/HfO₂/Pt结构的阻变存储器的阻变特性。Ni/HfO₂/Pt器件显示出了双极阻变特性并且没有forming过程,我们认为导电细丝的形成和破灭是器件阻变的本质机理。此外,器件有很好的转变性能和保持特性：转换窗口达到3?10₅, 在高温200_oC下的保持时间大于10₃s,并且具有均匀的转变参数。考虑到以上优良性能,Ni/HfO₂/Pt结构的阻变存储器很有在非挥发性存储器领域中具有很高的应用价值。     

可调谐氮化硅波导微环谐振腔滤波器研究

设计并制备了一种基于热光效应的集成可调谐氮化 硅(Si₃N₄)波导微环谐振腔滤波器,通过采用马赫-曾德干涉仪(MZI)构成的可调谐 耦合器控制耦合区耦合比,以实现滤波器消光比的调谐。设计并优化了微环谐振 腔的波导截面尺寸、弯曲半径和耦合区波导间隔等参数,并通过光刻、反应离子刻蚀(RIE )等工艺制备 了两种不同弯曲半径的Si₃N₄波导微环谐振腔。实验结果表明,本文器件在波长1550nm附近处的自由光谱 范围(FSR)为68pm,3dB带宽约为16pm,品质因子Q达到了9.68×10 4,消光比可调范围约为17dB。     

螺旋波纹波导回旋行波管的模式耦合机制

从波导的等效边界条件出发,结合波导的激发方程组,通过数学推导说明了螺旋波纹波导回旋行波管的模式耦合机制。TE_1,1模会在螺旋波纹波导中耦合出TE_-2,1模,并且通过计算说明TE_-2,1模主要和TE_1,1模的空间-1次谐波发生耦合。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.