光刻机工作台超精密运动与同步控制

以同步扫描的运动性能为目标,研究针对步进扫描投影光刻机工作台的超精密运动与同步控制策略.结合工作台的结构特点,提出一种粗、微复合运动控制方法,即:微动台纳米级微动,粗动台微米级跟随运动;以硅片台、掩模台的三阶轨迹规划与轨迹重叠为基础,进行扫描过程中的同步状态规划;为实现纳米级的同步运动精度,进行硅片台与掩模台的动态特性比较,在此基础上提出工作台交叉反馈的同步控制策略,使掩模台实时跟踪硅片台的运动趋势,并设计同步误差模型进行运动性能评估.该方法已在100nm步进扫描投影光刻机中得到实际应用,并取得良好效果.     

步进扫描光刻机硅片台连续扫描时间优化算法

为减少步进扫描光刻机连续曝光扫描运动的扫描过渡时间(扫描时间和步进时间),将硅片台扫描方向曝光扫描运动分解为逻辑步进运动和逻辑扫描运动,提出扫描和步进运动时间重叠的轨迹规划算法(时间重叠算法)处理连续曝光扫描运动。在不破坏运动约束条件下(恒速运动要求以及速度、加速度边界限制),根据时间重叠算法重新计算并推导不同扫描运动路径下连续扫描运动过程的步进和扫描运动转折点。经理论分析和硅片曝光场连续曝光实例计算表明：基于时间重叠算法的轨迹规划可获得时间优化的硅片台连续曝光扫描,比传统扫描方法减少曝光扫描运动过程中的无效率时间,提高步进扫描光刻机生产率,为步进扫描光刻机工程实践提供理论基础。     

光刻机工作台运动控制中的若干关键问题

100 nm步进扫描投影光刻机是我国攻关研究的主流机型,工作台是实现其超精密性能的核心子系统。光刻机工作台采用粗、微复合的运动结构,其同步最大运动平均误差(5 nm)和同步最大运动标准偏差(12 nm)等性能指标对运动控制系统提出严苛要求。分析硅片台与掩模台的结构特点,提出了运动控制系统中保证精度实现的组成单元,分别论述轨迹规划、测量系统、控制策略单元等的工作机理与实现特点;为进一步提高运动控制精度,分析工作台可能受到的扰动因素,提出相应的补偿控制策略,探讨运动控制中各环节的参数校准策略。综合论述步进扫描投影型光刻机工作台运动控制中的关键问题,并提出相应的实现与解决方法,可为实际光刻设备超高精度的实现提供指导。     

精密运动台主动减振与重力补偿技术的研究

正基板运动台是平板显示扫描光刻机最关键的分系统之一,其精度和稳定性直接影响光刻机的产率、Overlay和成像质量。与IC前道光刻机的硅片台相比,基板运动台具有运动行程更大、扫描速度更快、负载更大、电动机驱动反力更大的特点,这些因素都给基板台的减振和运动控制带来了巨大的挑战。论文面向平板显示光刻机的性能需求,从基板运动台的主动减振、微动台局部减振两个方面展开研究,通过优化主动减振参数提高全局主动减振性能,设计重力补偿减振器结构和控制器以提高局部减振性能。     

刀口半影最小化的光刻机扫描狭缝研究

扫描狭缝是步进扫描光刻机中控制曝光剂量的重要单元,而扫描狭缝产生过大的刀口半影会影响曝光性能。首先,根据步进扫描光刻机照明原理,通过分析掩模面上光强分布与扫描狭缝刀口厚度及位置的相对关系,推导出掩模面上刀口半影宽度的计算公式,同时针对数值孔径NA为0.75的光刻机照明系统模型分别对非共面和共面扫描狭缝在掩模面上的刀口半影进行仿真分析;研制了一种四刀口共面的高精度扫描狭缝装置,不仅满足步进扫描光刻机的同步性能需求,并且有效减小了X向和Y向的刀口半影;最后对所研制的扫描狭缝动态性能以及掩模面上实际刀口半影进行了测试。结果表明,当最大扫描速度达到470mm/s时,扫描刀口动态跟随误差始终在±30μm以内,同时两个方向的刀口半影均不超过0.5mm,满足90nm分辨率步进扫描光刻机的需求。     

光刻机模拟隔振试验装置内部世界动力学模型分析

为给步进扫描光刻机的设计研究提供理论指导，解决光刻机掩模台、工件台由于高速运动而引起光刻机工作核心部分——工作平台的振动问题，根据工业应用中步进扫描光刻机的运动特点和工作要求，设计了一种内部世界和外部世界用精密6自由度减振器连接的步进扫描光刻机隔振试验装置；建立了内部世界6自由度的动力学模型，运用设计的参数计算出了内部世界的固有频率和对应的振型；同时运用ANSYS有限元软件进行了分析计算，两者的计算结果吻合很好，验证了动力学模型的正确性。     

超精密掩模台位移测量系统热漂移研究

针对28nm浸没式扫描光刻机掩模台的光栅干涉仪位移测量系统,开展了系统热漂移研究,并进行了热漂移测试实验与结果分析。该位移测量系统采用外差对称式四细分的光路设计以及栅距为1μm的二维光栅,配合2048倍电子细分的相位计数卡,其系统分辨力达到了0.12nm。热漂移测试结果显示:该系统的热漂移X向为17.86nm/K,Y向为41.43nm/K。在光刻机掩模台的实际测量环境中,测量环境的温度波动稳定在5mK以内,此时系统的热漂移X向可以控制在0.09nm以内,Y向可以控制在0.21nm以内。实验数据表明系统的热漂移误差小于1nm,满足掩模台亚纳米位移测量精度需求。     

光刻机掩模台djerk前馈控制算法研究

针对光刻机掩模台控制系统中存在影响控制精度的机械模态,提出了一种djerk前馈控制方法。该方法在加速度前馈基础上引入一种新的前馈。该算法利用四阶点对点运动轨迹作为参考位置进行仿真验证,与传统的加速度前馈控制方法相比,传统的加速度前馈的位置误差在2.3E～7m,引入djerk前馈后的位置误差在2E～8m。因此,djerk前馈有效地减小位置误差,提升了掩模台系统性能。     

光刻机超精密运动台数据驱动MIMO定结构前馈控制

超精密多输入多输出(Multiple-input multiple-output, MIMO)运动台是集成电路制造装备——光刻机的核心部件之一,其轨迹跟踪性能是保证光刻机产率和分辨率的关键。提出一种高效的数据驱动MIMO定结构前馈控制方法,有效补偿参考轨迹引入的伺服误差,降低各自由度间的耦合,从而提高光刻机超精密运动台对不同轨迹跟踪任务的适应性及跟踪性能。采用多项式对MIMO前馈控制器进行参数化,以保证前馈控制器的固有稳定性及其对变轨迹的鲁棒性。利用脉冲响应实验法无偏估计过程灵敏度函数矩阵的马尔可夫参数,进而建立高效的数据驱动参数优化算法,根据伺服系统的输入-输出数据迭代优化MIMO前馈控制器参数。所提方法无需对光刻机运动台建模,且每次迭代仅需一次轨迹跟踪实验。将所提方法应用于课题组自主研发的光刻机硅片台,2种参考轨迹的跟踪实验结果验证所提方法在有效提高轨迹跟踪性能的同时降低各自由度间的耦合。     

步进扫描光刻机扫描运动轨迹规划及误差控制

研究一种步进扫描投影光刻机工作台扫描运动超精密轨迹规划算法及误差控制策略。在分析三阶扫描运动与步进运动轨迹规划异同点的基础上,提出三阶扫描运动轨迹规划算法。针对扫描运动精确性与严格同步性要求,分析扫描运动轨迹规划误差补偿的几个关键问题。根据扫描运动轨迹算法离散实现存在的误差,结合内部整数积分策略,提出扫描运动轨迹规划加减速段与扫描速度稳定段运动距离的离散积分策略误差控制方法。此外,为克服切换时间圆整引起的扫描曝光匀速段位置误差,提出一种基于常速扫描运动段位置修正因子的误差补偿方法。以上方法共同实现光刻机工作台扫描运动轨迹规划精度控制。实例证明提出算法是有效和精确的。该算法成功应用于100nm步进扫描投影光刻机工作台的超精密运动控制系统中。     

Minimal Realization of Linear Graph Models for Multi-physics Systems

An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...     

Quantum Cooperative Robotics and Autonomy

The intersection of Quantum Technologies and Robotics Autonomy is explored in the present paper.The two areas are brought together in establishing an interdisci...     

考虑进油孔有限长滑动轴承油膜力的近似解析解

针对具有进油孔的有限长滑动轴承油膜力求解问题,采用变分原理和分离变量法,求得了有限长滑动轴承油膜压力分布的近似解析表达式。将油膜压力分布的近似解析表达式在油膜存在区域上进行积分,即得到了油膜力。将提出的计算有限长滑动轴承油膜力方法与无限长轴承模型、有限元方法的计算结果进行了比较,发现了提出的方法与有限元方法的计算结果很接近。最后,研究了进油孔位置和进油压力对油膜存在区域、油膜力等的影响,研究结果表明进油孔位置和进油压力对油膜存在区域和油膜力有较大的影响。     

三绕组变压器的双绕组等效建模及在Matpower中的应用

针对实际电网存在着大量的三绕组变压器,但国际上一些著名商业软件,如BPA仿真软件、Matpower这一权威潮流计算开源软件,均只提供双绕组变压器模型,限制了其在具有三绕组变压器的电力系统中的应用的问题,潮流计算是自主开发的电力系统各种应用软件的核心模块,因此依托国际权威开源程序进行二次开发,是一种较好的选择。对Matpower要求的数据格式进行了归纳,对变压器的一般的等值电路及带理想变压器的等值电路和带标幺值的等值电路进行了分析研究,提出了三绕组变压器转换为双绕组等效模型的建模方法,使得原先只适应双绕组变压器的潮流计算软件可以适用于三绕组变压器电网的潮流计算;最后以Matpower软件为例进行了案例计算,并用PSASP仿真软件进行对比验证。研究结果证明,所提出的建模方法是有效的。     

On the Relation of Load to Average Gap in the Contact Between Surfaces with Longitudinal Roughness

A computer simulation model for the contact between longitudinally-oriented rough surfaces has been formulated. This model closely duplicates the actual surf ace contact deformation behavior by taking into account the elastic interactions between the asperities. There were no assumptions made about the shapes, or any deformation behavior of the asperities, except for their obeying the laws of elasticity. The plastic deformations on the high asperity peaks were taken into account by setting a ceiling on their contact pressures at the material hardness value. The simulations used real surface profiles which were digitized from unworn circumferentially ground steel surfaces. Each pair of these profiles was mathematically combined to form an equivalent rough profile pressing against an infinitely rigid flat and having the appropriately adjusted elastic modulus. A total of 28 different pairs of profiles were used in the simulations. Each contacting pair was subjected to 30 different load levels and the local contact pressures and deformations were calculated. The contact simulations yielded some important mathematical relationships between parameters, such as the real area of contact, average gap, and average asperity load through statistical curve fitting. Two analytical functions were generated to relate the average load to average gap and the real area of contact to load.     

Fifth International Summer School on Screw-Theory Based Methods in Robotics

正3-11 September,2014University of Bologna,Bologna,Italy www.summerscrews.org summerscrews2014.ing.unibo.it SUMMER 20SCREWS 14In 2014,our screw-theory school comes to the world's oldest university.In early September,Summer Screws'14 will gather six experts in the application of screw theory in robotics and up to 40 participants at the University of Bologna,Bologna,Italy.The school will teach attendees how to apply existing methods and empower them to develop new ones in their own research.The basic theoretical notions will be introduced in a rigorous manner,emphasizing examples,applications,and exercises.Scholarships are available.     

INTEGRAL EQUATION METHOD＇S APPLICATION IN HOLE-EDGE STRESS OF COMPOSITE MATERIAL PLATE WITH DIFFERENT SHAPED HOLES

The strength of composite plate with different hole-shapes is always one of the most important but complicated issues in the application of the composite material. The holes will lead to mutations and discontinuity to the structure. So the hole-edge stress concentration is always a serious phenomenon. And the phenomenon makes the structure strength decrease very quickly to form dangerous weak points. Most partial damage begins from these weak points. According to the complex variable functions theory, the accurate boundary condition of composite plate with different hole-shapes is founded by conformal mapping method to settle the boundary condition problem of complex hole-shapes. Composite plate with commonly hole-shapes in engineering is studied by several complex variable stress fimction. The boundary integral equations are founded based on exact boundary conditions. Then the exact hole-edge stress analytic solution of composite plate with rectangle holes and wing manholes is resolved. Both of offset axis loadings and its influences on the stress concentration coefficient of the hole-edge are discussed. And comparisons of different loads along various offset axis on the hole-edge stress distribution of orthotropic plate with rectangle hole or wing manhole are made. It can be concluded that hole-edge with continuous variable curvatures might help to decrease the stress concentration coefficient; and smaller angle of outer load and fiber can decrease the stress peak value.     

INDUSTRIAL ENGINEERING AND VISUALISATION-A PRODUCT DEVELOPMENT PERSPECTIVE

Taking the actual project of teaching and researching process for example, the relationship between the industrial engineering and product development is discussed. And use the novel visualization technology to support the industrial engineering and product development. How to use the new computer modeling and simulating technologies to support the product development and industrial engineering, is introduced especially. The support includes both domestic products and industrial systems. The visualization and computer technologies take a very important role in some system or multi-direction modeling, those technologies mentioned above can help the industrial engineers study the effect of design on the whole life circle, including the producing steps. So the engineers can avoid making the wrong decision which may cause bad effects on the whole industrial engineering.     

电站锅炉模糊风险评价方法研究与应用

针对电站锅炉风险等级评价问题,将模糊综合评价技术应用到电站锅炉风险等级评价中。开展了电站锅炉失效影响因素及模糊评价因素的重要程度分析,建立了一套科学合理适于在线评价的电站锅炉风险评价体系,提出了模糊综合评价技术与改进的模糊层次分析法相结合的模糊风险评价方法,利用改进的模糊层次分析法计算了指标体系中各层指标权重。对某一台电站锅炉的实际运行工况影响子因素进行了模糊风险评价,采用模糊合成算子进行模糊综合运算得到电了站锅炉运行工况影响子因素的评价向量。研究结果表明:电站锅炉的运行工况影响子因素的风险评价等级为第6级,失效可能性等级为小,该电站锅炉运行工况良好。     

Short-Term Relay Quality Prediction Algorithm Based on Long and Short-Term Memory

The fraction defective of semi-finished products is predicted to optimize the process of relay production lines, by which production quality and productivity ar...