基于双日视觉的靶丸定位系统设计

诊断设备能否精确地瞄准实验靶球以实现自动化控制是惯性约束核聚变（IC功系统中的公共诊断平台急需解决的问题之一。根据ICF工程检测要求，构建了一套三雏精确定位视觉系统，该双目视觉系统采用立体视觉原理来恢复空间点的三雏坐标。实验结果表明，双目视觉测量系统中，系统误差在X和Y轴上为20微米以下，Z轴为5微米左右，实测的距离最大误差小于100微米（均方根值小于18微米），达到了微小目标高精度瞄准的工程要求。     

基于双目视觉的医疗机器人摆位系统测量方法

为了实现精确放疗过程中精确定位和肿瘤位置的精确测量,建立了基于双目视觉的医疗机器人摆位测量系统,并对系统所采用的摄像机标定方法、标记点识别及其三维坐标计算、摆位系统的位置验证等算法进行研究。建立基于双目视觉的医疗机器人摆位测量系统;提出了一种对摄像机采用基于平面棋盘格和立体标定模板相结合的摄像机标定新方法;采用Roberts梯度算子对图像分割的方法,识别标记点中心并计算其三维坐标;通过比较基于双目视觉计算和三维坐标测量仪器测量的各个标记点三维坐标的摆位误差,实现放疗过程中位置验证和精确摆位。实验结果表明:摄像机的标定精度为36.5×10-3 mm和各个标记点的三维坐标平均偏差为δX=0.573mm、δY=0.495mm、δZ=0.430mm,测量方法可获得较高的标定精度和摆位精度,能满足精确放疗对高精度摆位系统的临床需求。     

一种基于欧氏距离的双目视觉三维重建算法

针对双目视觉左右图像投影的反向延长线是异面直线,直接将匹配像点代入定位模型需要求解一组矛盾方程,从而造成计算资源浪费和影响定位精度的问题,提出了一种基于欧氏距离最小化的三维重建计算方法.根据非平行光轴双目视觉定位的几何结构,运用求解两点欧氏距离最小值的思想,建立了两条异面投影线公垂线中点的计算模型,而后通过实验验证了该方法的有效性.利用标定后的系统对标记物之间的距离进行测量,在距双目视觉传感单元1.5m范围内误差小于1 mm.实验结果表明:该方法比传统方法重建精度高且实时性好,具有良好的鲁棒性.     

基于双目视觉的工件尺寸三维测量

针对传统的接触式测量方法存在测量速度慢、效率低等问题,本文基于双目视觉视差原理,采用了一种双目视觉测量方法。首先,利用双目视觉系统采集带有标志圆的靶标图像对,进行摄像机标定;然后,采用Canny自适应算子检测图像的边缘,通过椭圆拟合来确定特征点,在极线约束条件下完成图像的立体匹配,最后将图像坐标换算成世界坐标系下的三维坐标。实验结果表明,该方法对于有标志点的被测对象具有测量精度高的特点,误差在0.07mm以下。     

双目视觉测量系统结构参数优化问题研究

研究了双目视觉测量系统的结构参数优化问题.对双目视觉测量的有效视场约束条件进行了数学描述,建立了双目视觉坐标测量系统的数学模型.在考虑像点提取误差的条件下,利用误差理论建立了测量误差模型,并基于待测量的视场范围要求,定义了测量系统结构参数的优化指标.最后,通过枚举法进行了优化求解.     

机械臂双目视觉系统内外参高精度标定

在空间站机械臂中,双目视觉系统作为其重要组成部分,能够引导机械臂自主完成对目标的定位和捕获。内外参标定技术是双目相机高精度获取合作目标位置、方向等运动信息进而进行三维重建的首要前提和重要保障。文中提出了一种基于光束法平差算法的双目视觉系统内外参标定技术,采用三维靶标场作为标定目标,并将高精度测角设备经纬仪作为精测基准,通过坐标转换解算分步得到相机的内、外参数。实验表明,该方法标定的相机内参重投影误差小于0.5个像元,外参测试误差为±0.19 mm,有较高的测试精度和鲁棒性,为机械臂实施视觉闭环自主捕获合作目标提供可靠依据。     

基于双目视觉的人体头部尺寸测量方法研究

为了CT系统进行定位片扫描时能够快速且准确的确定头部的扫描范围,提出了一种基于双目立体视觉的测量方法。方法能够在非接触环境下获取人体的头长和头宽。使用双目相机作为人体图像的采集设备,利用MATLAB、VS2017开发平台,使用张正友标定法标定双目相机获取相机内部参数。使用GrabCut图像分割算法对图像进行预处理,将前景的人体图像与背景分割。将立体校正后的左右图像通过SGBM算法进行立体匹配获得视差图,进而得到头部关键点的三维坐标,计算出人体的头长和头宽。实验结果表明该方法测量准确,误差小于1 cm。     

基于单目视觉的机械手三维定位

提出了一种利用单目视觉识别目标并且进行精确的三维定位,用于机械手对目标的精确定位.首先通过模板匹配的方法在图像中识别出目标并计算其中心坐标,然后分别在相同高度和水平的四个相隔一定距离的位置上采集目标图像,根据目标在图像中的位置变化,结合平行双目视觉原理与小孔成像的缩放比例关系,计算摄像头距离目标的深度距离.该系统易搭建、成本低,定位精度较高.     

双平面法标定的双目视觉三维测量系统

针对传统摄像机标定过程复杂、三维测量精度不高的问题,提出了一种基于投影直线相交的双目视觉三维测量方法,并给出了基于神经网络的标定方法。根据摄像机成像特点,利用双标定平面上的点求取投影直线方程;针对摄像机成像复杂的畸变模型,利用BP神经网络对复杂非线性映射关系的强大逼近能力,对左右两台摄像机于远近标定平面处分别进行隐式标定,得到图像像素坐标到平面模板二维物理坐标的映射关系;设计制作了试验平台,采用手工辅助的方法获得网格模板训练样本。此标定方法完全适用于大视场、近距离、高精度的双目视觉传感器。试验结果表明,系统对空间已知长度的测量结果误差约为0.109 mm,测量精度较高。     

大尺寸视觉测量系统结构参数分析与试验研究

研究了基于大尺寸视觉测量系统的结构参数优化问题,图像传感器CCD外部姿态的优化布局可以提高测量精度。建立双目视觉测量系统结构的数学模型,对有效视场约束条件进行了数学描述。利用Matlab软件对不同结构参数进行仿真计算,结果表明被测点越靠近有效视场中心测量误差越小,而基线距越大以及基线与光轴夹角越大所产生的误差越大。最后,通过试验验证了摄像机外部姿态的误差影响特征正确性,从而为双目视觉测量系统的现场布置方法提供了依据。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.