一种双极工艺下抗辐照PWM推挽转换电路的研究

利用双稳态竞争原理,通过状态保持电路和状态转换电路的配合,实现一种基于双极器件的PWM推挽转换电路,该电路对辐照后双极器件的电流增益退化不敏感.采用华越双极2μm工艺进行流片而没有进行任何工艺加固.并在Co-60辐照源,5.6rad(Si)/s剂量率,100krad(Si)总剂量的条件下进行抗辐照实验,结果表明,单管的...     

抗总剂量Boost型 DC-DC转换器设计

采用设计加固方法,基于标准商业0.35微米CMOS工艺,设计了抗总剂量Boost型 DC-DC转换器芯片。从系统设计角度出发,综合采用了同步整流、高开关频率、自适应动态斜坡补偿等技术提高DC-DC转换器性能和抗辐照能力;分别从电路级和器件级对转换器进行了加固设计。考虑DC-DC转换器总剂量效应,电路级加固分别从模拟电路加固和数字电路加固着手;提高环路稳定裕度,有效的提高转换器反馈环路的抗总剂量能力。为有效的降低场区辐射寄生漏电,器件级采取的加固措施是转换器的控制部分MOS管采用H栅实现,输出功率MOS管采用环形栅实现。辐照实验结果表明,设计的抗总剂量Boost型 DC-DC转换器在总剂量超过120 krad (Si )后才出现功能失效,而非加固的电路在总剂量超过80 krad (Si )后才出现功能失效;加固电路的辐照后电流明显小于非加固电路;加固电路的辐照后效率也高于非加固电路。     

总剂量效应对CMOS读出电路影响及设计加固方法研究

总剂量效应会对CMOS读出电路的性能产生明显的影响,甚至使CMOS读出电路功能完全失效。本文主要分析了总剂量效应对NMOS器件阈值、漏电流和器件间漏电流的影响机理。随后,针对640×512 CMOS读出电路提出了可行的抗辐照版图设计方法。总剂量试验表明,采用环栅结构、环源结构的640×512读出电路芯片抗总剂量能力可以达到100 krad(Si)以上。     

一种抗辐照的光电探测芯片设计

光电耦合器的核心模块是光电探测芯片。介绍了一种抗辐照光电探测芯片的设计,该电路基于0.5 μm标准互补金属氧化物半导体(CMOS)工艺研制,内部包含跨阻放大器(TIA)、基准源和比较器等模块电路,并通过电路结构和版图设计进行抗辐照加固。测试结果表明,抗总剂量能力达到200 krad(Si),同时,该芯片数据传输速率可达10 MBd,其输入高电流范围为6~18 mA。     

Flash存储器抗60Co γ射线总剂量能力的分析

为了比对分析多家厂商生产的NAND型Flash存储器的抗辐照能力和数据保持能力,选择了3种规格(代号为A,B和C)的商业级Flash存储器作为研究对象,设计了故障测试算法,研究了3种Flash存储器的抗6Co γ射线总剂量的能力.首先研究了存储器经常出现的各种故障模型,并设计了相应的故障测试算法;其次搭建了以数字信号处理器(DSP)为核心的硬件测试电路;最后以6Co γ射线作为器件的辐照源,利用设计好的故障测试算法对辐照环境下的Flash存储器在总剂量值每增加10 krad (Si)后进行一次故障检测.结果显示,B和C器件在总剂量值达到20 krad (Si)时开始出现故障,40 krad (Si)时出现数据的0→1翻转,70 krad(Si)时翻转率高于2％;A器件在40 krad (Si)时开始出现故障,70 krad (Si)时出现0→1翻转,翻转率为0.6％.从抗辐照能力和数据保持能力两个角度观察认为,商业级的A器件要优于B和C器件.     

抗辐照标准单元库验证方法研究

对抗辐照单元库的验证方法进行研究。以0.5μm抗辐照单元库为例,研究抗辐射单元库的验证方法。设计了一款验证电路,对单元库进行验证,单元库功能和性能满足设计要求,抗辐射能力达到500 krad(Si)。     

日盲紫外焦平面探测器的抗辐射加固设计

设计了一款320×256元抗辐射日盲紫外焦平面阵列探测器,重点针对探测器的读出电路版图、积分开关偏置点、探测器芯片外延结构及器件工艺开展了抗辐射加固设计。对加固样品开展了γ总剂量和中子辐照试验和测试,试验结果表明样品的抗电离辐照总剂量达到150krad(Si),抗中子辐照注量达到1×10¹³n/cm²(等效1MeV中子),验证了抗辐射加固措施的有效性。     

抗辐射加固CMOS基准设计

研究了基于0.5 μm互补金属氧化物半导体(CMOS)工艺的动态阈值MOS(DTMOS)晶体管的电流-电压特性曲线。与常规CMOS工艺PNP晶体管特性对比,得到了带隙电压基准电路设计准则;采用DTMOS和抗辐射设计加固技术,完成了抗辐射加固CMOS基准设计。辐照试验结果表明,设计的抗辐射加固CMOS基准的抗总剂量能力达到了300 krad(Si)。     

MEMS开关辐照实验研究

进行了MEMS开关的辐照试验,并对结果进行了分析。所述的MEMS开关采用单晶硅悬臂梁结构实现金属电极接触,工作电压小于50V,最大工作频率大于10kHz。进行了中子辐照和γ辐照实验,其中中子注量为2.73×1013cm-2,γ总剂量为50krad(Si)。并通过对MEMS开关辐照前后性能的测试,获得了辐照对MEMS开关性能影响的实验数据。结果表明,在辐照剂量大于10krad(Si)时MEMS开关性能有明显变化。借鉴国外的相关研究成果,对MEMS器件的辐照失效机理进行了初步分析。     

SiGe HBT和Si BJT的γ射线辐照效应比较

比较了经剂量为400 krad(Si)的Y射线辐照后SiGe HBT和Si BJT直流电学性能的变化.通常SiGe HBT辐照后的Ib增加,Ic下降,直流放大倍数变化很小;Si BJT辐照后的Ib增加,而Ic通常也增加,并且变化幅度很大,直流放大倍数明显下降,相同剂量下变化幅度比SiGe HBT约高一个量级.表明SiGe HBT比Si BJT有更好的抗辐照性能,并对辐照导致的电特性的变化原因进行了初步解释.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.