基于TDC的无死区频率测量技术研究

在精密时频测控领域中,高分辨率、无死区的时间间隔和频率测量非常关键,而时间数字转换器(Timeto Digital Converter,TDC)是时间频率测量的常用手段.该文研制了基于ACAM公司生产的时间数字转换芯片TDC-GP21和Altera公司FPGA芯片EP4CE6E22C8N的时间频率测量设备,实现了高分辨率的时间间隔测量,测量分辨率达到13ps.同时采用时间间隔测量模块两两组合的方式实现了无死区频率测量,创新性地采用每组3个TDC芯片,共4组搭建了时间频率测量系统,并对组内3个TDC芯片测量结果采用平均值滤波法,使频率测量稳定度达到1.1×10-11@5.6×10-15@10000 s,与商用K+K FXE频率计数器指标相当.本设备具有体积小、无需校准、成本低等优点,能够广泛应用到高精度时间间隔和精密频率测量领域中.     

基于FPGA的时间间隔测量系统的设计

为了解决电容充放电放大电路测量时间间隔的不稳定,采用复杂可编程芯片FPGA设计实现精密时间间隔的测量。FPGA的锁相环（PLL）电路得到高频时钟,时钟管理器（DCM）实现高速时钟移相,内插时钟得到高精度时间测量。通过在光电回波脉冲时间间隔测量系统中验证,该设计可以得到200ps的时间间隔测量精度。采用FPGA芯片设计的数字化测量系统,具有集成度高,性能稳定,抗干扰强,设计方便等优点,能广泛应用于科研和生产中     

面向SNSPD系统的可拓展时间抖动测量模块

针对超导纳米线单光子探测器(SNSPD)应用需求的多样化,设计了一款面向SNSPD的可拓展时间抖动测量模块。基于对SNSPD系统时间抖动测量原理的分析,设计了数字化单元、时间数字转换(TDC)单元和现场可编程门阵列(FPGA)单元,实现对SNSPD输出信号的数字化、时间信息测量以及数据读取。对该模块TDC单元的分辨率、线性度和时间精度分别标定,测试结果表明TDC单元的分辨率好于55ps,测量数据呈线性,100ns以内时间精度低于36ps。通过结合实用化SNSPD系统,实现了100ps左右的时间抖动表征,并与商用时间相关单光子计数(TCSPC)模块进行对比,验证了该模块对于SNSPD系统时间抖动测量的可行性。     

一种带有亚稳态消除电路的TDC设计方案

时间间隔测量技术在原子物理、激光测距、定位定时等方面有着重要的应用,因此,高精度的时间数字转换电路(Time-to-Digital Converter,TDC)在科学研究和工程实践中扮演着重要的角色;但是TDC在进行时间间隔测量量化时往往受到亚稳态制约,影响了TDC的分辨率、线性度,甚至会出现错误的输出结果。本文通过加入相位判断逻辑,可以完全消除TDC量化时间间隔时遇到的亚稳态问题。本文提出的TDC设计方案,工作频率512MHz,测量精度250ps,测量范围1μs,功耗400μW。     

脉冲激光测距中高速精密时间间隔测量研究

在脉冲激光测距系统中,设计实现了基于FPGA和TDC-GP21的高速精密时间间隔测量系统。采用TDC-GP21的高精度测量模式,配置TDC-GP21完成了时间间隔测量,通过校准测量对测量结果进行补偿修正,提高了系统的测量精度;设计了多级嵌套状态机实现高速SPI通信,减小了系统单次测量周期;分析了影响测量精度的因素,比较分析了3种时刻鉴别方法的漂移误差,设计了高通阻容时刻鉴别模块,减小了系统的非线性误差。实验分别进行了基于FPGA脉冲信号的时间间隔测量和激光测距试验,对比验证了系统的测量误差,分析了系统在测量区间的线性度。实验结果表明,系统可以实现高速稳定测量,线性度良好,重复测量频率达1kHz,测量精度在±100ps内。     

基于TDC7201芯片的高精度激光脉冲飞行时间测量模块研究

设计了一种高精度、高线性度、轻小型激光脉冲飞行时间测量模块。结合TDC7201芯片在时间测量方面的优势,将其作为时间测量核心部分,并将STM32F103RET6微控制器作为主控芯片来控制整个模块的工作。实验结果表明,该模块在12 ns~100 μs时间间隔范围内的时间测量精度最高可达4.1 ps;测量结果的线性拟合相关系数为1,且能够测量激光脉冲主波与5个回波之间的时间间隔。该模块可满足基于硅光电倍增管(Silicon Photomultiplier, SiPM)的脉冲式激光测距系统的高精度、高线性度、多回波、轻量化等实际应用需求。     

TDC—GP21在时差法超声波流量计中的应用

为了使超声波流量计的精度范围能达到±0．5％,研究了时差法超声波的测量原理,分析了实现高精度测量的设计方法。介绍了系统的工作过程和硬件组成,详细阐述了测时芯片高速时间数字转换器TDC—GP21（Time-to—DigitalConverter）的结构和功能原理,以及其在超声波流量计时间测量模块中系统硬件部分的实现。采用TDC—GP21,ARM微处理器、超声波收发电路等硬件架构,实现了高精度测量超声波顺流和逆流传播时间差。实验结果和精度分析表明,研制的超声波流量计符合设计要求,并为超声波流量计的高精度和低功耗设计提供了一个参考。     

基于FPGA的时间间隔测量模块设计

介绍一种基于FPGA技术的时间间隔测量方法,通过分析FPGA的主要技术优势及其在工业控制领域中所处的重要地位,给出设计时问间隔测量模块所选用的FPGA器件并进行硬件设计,以及所选用的软件并进行软件设计.描述时间间隔测量模块的软件及硬件设计方法,给出设计过程的硬件原理图及软件流程图,并对设计的各功能模块进行功能时序仿真.     

基于飞行时间法的纳秒量级时间间隔测量系统研制

为了更好地探测空间等离子体成分,研究了一种基于飞行时间法的纳秒量级时间间隔测量系统,分别介绍了该系统的三个组成部分CPU模块、时间间隔测量模块、数据传输模块。并着重研究了纳秒量级时间间隔的测量方法,详细介绍了主要时间间隔测量芯片TDC-GP1。并对数据传输模块的设计做了简要说明。实验结果表明,该测量系统的性能可满足探测需求。     

TDC‐GP21在时差法超声波流量计中的应用

为了实现高精度的流量测量,设计了一种基于 TDC‐GP21的时差法超声波流量计.系统以 MSP430单片机为核心,选用高精度时间间隔测量芯片 TDC‐GP21,有效的解决了时差法超声波流量计中高精度时差测量的问题.文中详细介绍了时间间隔测量芯片 TDC‐GP21的功能模块及工作流程,设计了一种超声波回波信号处理电路,并对超声波流量计系统硬件电路与软件方案进行了阐述.实验表明,系统的最大测量误差在±1%以内,达到了准确度等级为1级的要求.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.