0.25μm CMOS工艺实现的3.125 Gb/s×12通道VCSEL驱动器阵列

本文介绍了一种利用0.25μm CMOS工艺实现的12通道垂直腔面发射激光器(VCSEL)阵列驱动器电路.该电路采用3.3V单电源供电,单通道最大输出调制电流超过30毫安,单通道工作速率达到3.125Gb/s,12个并行通道的总带宽为37.5Gb/s.     

面向对称密码领域的可重构阵列设计

通过研究密码系统的特点,提出一种面向对称密码领域的可重构阵列结构.该阵列普遍适用于分组密码和流密码系统,灵活性高.通过配置信息的更新,可以快速动态切换加密功能,切换时间小于20 ns.该结构包含几个16×16的比特阵列和8×8的字节阵列,AES算法实现分组密码的加密速率为640 Mb/s～2.56 Gb/s,DES算法为1.6 Gb/s～3.2 Gb/s,SMS4算法为318 Mb/s～1.6 Gb/s,流密码Geffe的加密速率为400 Mb/s.与文献[1]～[3]相比,SMS4算法的性能有接近2倍的提升.     

10Gb/s光调制器InGaP/GaAs HBT驱动电路的研制

采用自行研发的4英寸InGaP/GaAs HBT技术,设计和制造了10Gb/s光调制器驱动电路.该驱动电路的输出电压摆幅达到3V_pp,上升时间为34.2ps(20~80%),下降时间为37.8ps(20~80%),输入端的阻抗匹配良好(S11=-12.3dB@10GHz),达到10Gb/s光通信系统(SONET OC-192,SDH STM-64)的要求.整个驱动电路采用-5.2V的单电源供电,总功耗为1.3W,芯片面积为2.01×1.38mm².     

12×10Gb/s CMOS并行光接收机前置放大器阵列设计

采用SMIC 0.18 μm CMOS工艺,设计了一种12路并行、每路工作速率为10Gb/s的光接收机前置放大器阵列,应用于高速芯片间的光互连.整个电路通过1.8V电压供电,采用RGC结构和有源电感并联峰化技术,单路中频跨阻增益为47.1dBΩ,-3dB带宽为8.9GHz.芯片工作时总的传输速率为120Gb/s.     

2.5—10Gb/s光发射机驱动电路HEMT IC中器件模型参数

对高速调制器驱动电路 HEMT IC中器件参数进行了研究 ,着重讨论了 HEMT器件直流参数、交流参数对外调制驱动电路特性的影响 ,给出了满足电路性能要求的器件参数范围 ;对 2 .5— 10 Gb/ s PHEMT IC光驱动电路进行了计算机仿真 ,眼图模拟结果表明满足 2 .5— 10 Gb/ s高速光纤通信系统需要     

高速12路并行CMOS单片光电集成接收机设计与实现

设计并实现了一个高速12路并行CMOS单片光电集成接收机.其每一路都包括一个光探测器、一个跨阻放大器以及后续放大电路.双光电二极管(DPD)结构可以提高接收机速度,但同时降低了响应度.在跨阻放大器电路中采用有源电感来展宽-3dB带宽.通过无锡上华(CSMC)0.6μm CMOS工艺流片并对芯片进行了测试.测试结果显示该接收机单路传输比特率可达0.8～1.4 Gb/s,总的12路可传输15Gb/s数据.     

高速12路并行CMOS单片光电集成接收机设计与实现

设计并实现了一个高速12路并行CMOS单片光电集成接收机.其每一路都包括一个光探测器、一个跨阻放大器以及后续放大电路.双光电二极管(DPD)结构可以提高接收机速度,但同时降低了响应度.在跨阻放大器电路中采用有源电感来展宽-3dB带宽.通过无锡上华(CSMC)0.6μm CMOS工艺流片并对芯片进行了测试.测试结果显示该接收机单路传输比特率可达0.8～1.4 Gb/s,总的12路可传输15Gb/s数据.     

5Gb/s 0.25μm CMOS限幅放大器

采用TSMC 0.25μm CMOS技术设计实现了高速低功耗光纤通信用限幅放大器.该放大器采用有源电感负载技术和放大器直接耦合技术以提高增益,拓展带宽,降低功耗并保持了良好的噪声性能.电路采用3.3V单电源供电,电路增益可达50dB,输入动态范围小于5mVpp,最高工作速率可达7Gb/s,均方根抖动小于0.03UI.此外核心电路功耗小于40mW,芯片面积仅为0.70mm×0.70mm.可满足2.5,3.125和5Gb/s三个速率级的光纤通信系统的要求.     

40 Gbit/s多路并行光收发模块的研制

基于VCSEL激光器阵列和PIN探测器阵列,设计和制作了40Gbit/s甚短距离的4通道发射4通道接收并行光收发模块.通过高速电路信号仿真设计,解决了信号完整性、串扰和电磁兼容等问题;通过键合金丝长度设计增加了通道带宽.光模块单通道传输速率可达到5 Gbit/s,8通道并行总传输速率达到40Gbit/s,实现了并行光收发模块高速率、高密度、高可靠性以及小体积设计,为甚短距离高速数据处理和传输提供了高可靠的多路数据链接.     

一种数据时钟恢复电路的研究与设计

提出了一种支持双数据率的数据时钟恢复电路,对电路中的鉴相器、环路滤波器、压控振荡器等进行了详细的分析研究和设计.基于0.18μm CMOS工艺,在电源电压1.8V下对电路进行仿真.仿真结果显示,电路在2.7 Gb/s和1.62 Gb/s随机流下的抖动峰峰值分别为14 ps和12ps,功耗为80 mW.测试结果显示,时钟恢复电路在2.7 Gb/s和1.62 Gb/s随机流下的抖动峰峰值分别为38 ps和27 ps.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.