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杨少琪张弛曹书野朱一柯孙鹏刘军山 《微纳电子技术》2023,(10):1619-1625
风速、风向信号的采集在工业、医疗与气象等领域具有重要意义。研发了一种基于纳米裂纹的微电子机械系统(MEMS)二维风速风向传感器。利用纳米裂纹超高灵敏度的优点,设计了纤毛-悬臂梁结构用于风速、风向信号采集。通过有限元数值仿真分析确定传感器的纤毛直径、高度和悬臂梁长度等结构参数。然后,采用聚二甲基硅氧烷(PDMS)衬底制备、聚酰亚胺粘附、金薄膜沉积、金薄膜图案化以及纳米裂纹工艺流程制备了纳米裂纹金薄膜。采用该纳米裂纹金薄膜,利用MEMS工艺技术制作了基于纳米裂纹的MEMS二维风速风向传感器,并通过自主研制的测试平台测试了传感器的风速和风向性能。实验结果表明,制备的二维风速风向传感器能够稳定测量2~7 m/s的风速信号,并具有误差不超过15°的风向识别能力。 相似文献
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MEMS加速度传感器的原理及分析 总被引:17,自引:2,他引:15
主要介绍了五种目前常见的基于MEMS技术的加速度传感器,从物理结构的角度对这几种传感器的测量原理进行了分析,不但着重介绍了已经较为成熟且形成产业化的硅微电容式、压阻式、热电耦式加速度传感器,而且对目前较为前沿的光波导式加速度传感器也进行了一些分析和介绍。 相似文献
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Silicon photonics is an emerging competitive solution for next-generation scalable data communications in different application areas as high-speed data communication is constrained by electrical interconnects. Optical interconnects based on silicon photonics can be used in intra/inter-chip interconnects, board-to-board interconnects, short-reach communications in datacenters, supercomputers and long-haul optical transmissions. In this paper, we present an overview of recent progress in silicon optoelectronic devices and optoelectronic integrated circuits(OEICs) based on a complementary metal-oxide-semiconductor-compatible process, and focus on our research contributions. The silicon optoelectronic devices and OEICs show good characteristics, which are expected to benefit several application domains, including communication, sensing, computing and nonlinear systems. 相似文献
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硅熔体中3C-SiC的生长及6H-SiC晶型的抑制 总被引:1,自引:0,他引:1
论述了从硅熔体中生长 3C- Si C晶体过程中 6 H- Si C晶型控制的一般原理 .采用将硅置于高纯石墨坩埚中使其在高温条件下熔化 ,坩埚内壁石墨自然熔解于硅熔体中形成碳饱和的硅熔体 ,在石墨表面形成厚约 0 .2 m m的Si C薄层 .X射线衍射 (XRD)、X射线光电子能谱 (XPS)、Ram an散射等分析表明所制备样品为 3C- Si C多晶体 .实验结果进一步证明从硅熔体中生长 3C- Si C晶体过程中 ,通过适当调整工艺参数可以抑制 6 H- Si C晶型的形成 . 相似文献
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T. Tsukutani Y. Sumi Y. Kinugasa M. Higashimura Y. Fukui 《International Journal of Electronics》2013,100(9):525-536
This paper presents a realization of voltage-mode and current-mode active-only biquad circuits with a two-integrator loop-structure. The circuits are constructed solely with operational amplifiers (OAs) and operational transconductance amplifiers (OTAs). The biquad circuits can realize the multiple circuit transfer functions, and the circuit parameters can be tuned orthogonally through adjusting the transconductance gains of the OTAs. Also, these biquad circuits enjoy very low sensitivities with respect to the circuit active elements. Some examples are given together with simulated results by PSPICE. The circuit configurations are very suitable for implementation on both bipolar and CMOS technologies. 相似文献
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Dissolution Behaviors and Applications of Silicon Oxides and Nitrides in Transient Electronics 下载免费PDF全文
Seung‐Kyun Kang Suk‐Won Hwang Huanyu Cheng Sooyoun Yu Bong Hoon Kim Jae‐Hwan Kim Yonggang Huang John A. Rogers 《Advanced functional materials》2014,24(28):4427-4434
Silicon oxides and nitrides are key materials for dielectrics and encapsulation layers in a class of silicon‐based high performance electronics that has ability to completely dissolve in a controlled fashion with programmable rates, when submerged in bio‐fluids and/or relevant solutions. This type of technology, referred to as “transient electronics”, has potential applications in biomedical implants, environmental sensors, and other envisioned areas. The results presented here provide comprehensive studies of transient behaviors of thin films of silicon oxides and nitrides in diverse aqueous solutions at different pH scales and temperatures. The kinetics of hydrolysis of these materials depends not only on pH levels/ion concentrations of solutions and temperatures, but also on the morphology and chemistry of the films, as determined by the deposition methods and conditions. Encapsulation strategies with a combination of layers demonstrate enhancement of the lifetime of transient electronic devices, by reducing water/vapor permeation through the defects. 相似文献
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Silicon on diamond (SOD) is proposed as a superior alternative to conventional silicon on insulator (SOI) technology for silicon-based
electronics. In this paper, we present a novel SOD structure in which the active Si layer is in direct contact with a thick,
highly oriented diamond (HOD) layer that is directly attached to a heat sink. In contrast to the earlier work,1,2 the diamond film is relatively thick (∼70 μm), free standing, and close to single crystalline, thus possessing much greater
thermal conductivity and no limitation of the Si backing wafer. Two different fabrication schemes are investigated: (1) direct
growth, where the Si-device layer makes contact with the nucleation side of the diamond layer; and (2) wafer fusion, where
the Si device layer makes a direct contact with the diamond growth surface. Thermal evaluation was performed using metallic
microheaters. These studies clearly showed more than one order of magnitude better thermal management properties of diamond
with respect to Si and SOI. 相似文献
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A method for removal of metallic contaminants from commercial Si3N4‐powders has been developed. The method is based on acid leaching and shows promising results. Analyses show that the content of both intermetallic compunds as Fe, Ti and Al as well as O are significantly reduced. Clean, synthetic fused silica crucibles have been used along with normal sintered ones based on natural quartz. The crucibles were coated with normal, commercial silicon nitride powder and with purified Si3N4 in a cleanest possible environment. The crucibles were then used as vessels for directional solidification of multicrystalline silicon in a pilot scale furnace. The average lifetime of minority charge carriers in the cast silicon was determined by quasi steady state photoconductance (QSSPC) from the bottom to the top of the ingots. These varied in a systematic way, so that the materials cast in the pure environment had significantly higher values than the materials cast with conventional coating‐ and crucible materials. The maximum values for the lifetimes in the individual ingots varied from 7 to 135 µs. Copyright © 2007 John Wiley & Sons, Ltd. 相似文献
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用于制备SOI材料的基于硅片键合和双层多孔硅剥离的薄外延硅膜转移技术 总被引:2,自引:2,他引:0
采用在阳极化反应时改变电流强度的办法 ,在高掺杂的 P型硅 (111)衬底上制备了具有不同多孔度的双层结构多孔硅层 .用超高真空电子束蒸发技术在多孔硅表面外延生长了一层高质量的单晶硅膜 .在室温下 ,该外延硅片同另一生长有热二氧化硅的硅片键合在一起 ,在随后的热处理过程中 ,键合对可在多孔硅处裂开 ,从而使外延的单晶硅膜转移到具有二氧化硅的衬底上以形成 SOI结构 .扫描电镜、剖面投射电镜、扩展电阻和霍尔测试表明 SOI样品具有较好的结构和电学性能 相似文献
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Microcrystalline and amorphous Si:H films have been produced in a dc cathodic discharge in atmospheres containing silane diluted
in hydrogen. The composition of the discharge atmosphere has a strong effect on the nucleation of microcrystalline Si:H films.
Dopants such as boron enhance the formation of microcrystals while higher silanes such as disilane inhibit crystallization.
The presence of other gases in the discharge atmosphere generally inhibits the formation of microcrystals.
Research reported herein was supported by Solar Energy Research Institute, under Contract No. XG-0-9372-1, and by RCA Laboratories,
Princeton, NJ, 08540, U.S.A. 相似文献
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Charles W. Teplin Sachit Grover Adrian Chitu Alexander Limanov Monical Chahal James Im Daniel Amkreutz Stefan Gall Heayoung P. Yoon Vincenzo Lasalvia Paul Stradins Kim M. Jones Andrew G. Norman David L. Young Howard M. Branz Benjamin G. Lee 《Progress in Photovoltaics: Research and Applications》2015,23(7):909-917
We fabricate thin epitaxial crystal silicon solar cells on display glass and fused silica substrates overcoated with a silicon seed layer. To confirm the quality of hot‐wire chemical vapor deposition epitaxy, we grow a 2‐µm‐thick absorber on a (100) monocrystalline Si layer transfer seed on display glass and achieve 6.5% efficiency with an open circuit voltage (VOC) of 586 mV without light‐trapping features. This device enables the evaluation of seed layers on display glass. Using polycrystalline seeds formed from amorphous silicon by laser‐induced mixed phase solidification (MPS) and electron beam crystallization, we demonstrate 2.9%, 476 mV (MPS) and 4.1%, 551 mV (electron beam crystallization) solar cells. Grain boundaries likely limit the solar cell grown on the MPS seed layer, and we establish an upper bound for the grain boundary recombination velocity (SGB) of 1.6x104 cm/s. Copyright © 2014 John Wiley & Sons, Ltd. 相似文献