UHV/CVD自对准生长Ge量子点(英文)

在超高真空化学汽相淀积设备(UHV/CVD)上生长了小尺寸、大密度、垂直自对准的Ge量子点。采用原子力显微镜分析量子点的尺寸,可优化其生长温度和时间,在550℃,15s的条件下生长出尺寸最小的量子点,直径30nm,高约2nm。最上层多层结构Ge量子点中岛状量子点的比例为75%,其直径66nm,高11nm,密度4.5×109cm-2。利用透射电子显微镜分析了垂直自对准的Ge量子点的截面形貌,结果表明多层结构Ge量子点是垂直自对准的。Ge量子点及其浸润层的喇曼谱峰位分别为299cm-1和417cm-1,说明Ge量子点是应变的并且界面存在互混现象。采用光荧光谱分析了Ge量子点的光学特性。     

硼原子对Si(100)衬底上Ge量子点生长的影响

研究了硼原子对 Si( 1 0 0 )衬底上 Ge量子点自组织生长的影响 .硼原子的数量由 0单原子层变到 0 .3单原子层 .原子力显微镜的观察表明 ,硼原子不仅对量子点的大小 ,而且对其尺寸均匀性及密度都有很大影响 .当硼原子的数量为 0 .2单原子层时 ,获得了底部直径为 60± 5nm,面密度为 6× 1 0 9cm- 2 ,且均匀性很好的 Ge量子点 .另外 ,还简单讨论了硼原子对 Ge量子点自组织生长影响的机制 .     

多层Ge量子点的生长及其光学特性

用超高真空化学气相淀积系统在Si(1 0 0 )衬底上生长了多层Ge量子点.分别用TEM和AFM分析了埋层和最上层量子点的形貌和尺寸,研究了量子点层数和Si隔离层厚度对上层Ge量子点的形状和尺寸分布的影响.观察到样品的低温PL谱线有明显蓝移(87meV) ,Ge量子点的PL谱线的半高宽度(FWHM )为46meV ,说明采用UHV/CVD生长的多层量子点适合量子光电器件的应用     

多层Ge量子点的生长及其光学特性

用超高真空化学气相淀积系统在Si(100)衬底上生长了多层Ge量子点.分别用TEM和AFM分析了埋层和最上层量子点的形貌和尺寸,研究了量子点层数和Si隔离层厚度对上层Ge量子点的形状和尺寸分布的影响.观察到样品的低温PL谱线有明显蓝移(87meV),Ge量子点的PL谱线的半高宽度(FWHM)为46meV,说明采用UHV/CVD生长的多层量子点适合量子光电器件的应用.     

Si(001)斜切衬底上Ge量子点的固相外延生长

研究了Si(001)面偏[110]方向6°斜切衬底上Ge量子点的固相外延生长.实验结果表明,在Si(001)6°斜切衬底上固相外延生长Ge量子点的最佳退火温度为640℃,在斜切衬底上成岛生长的临界厚度低于在Si(001)衬底成岛生长的临界厚度,6°斜切衬底上淀积0.7nm Ge即可成岛,少于Si(001)衬底片上Ge成岛所需的淀积量.从Ge量子点的密度随固相外延温度的变化曲线,得到Ge量子点的激活能为1.9eV,远高于Si(111)面上固相外延Ge量子点的激活能0.3eV.实验亦发现,在Si(001)斜切衬底上固相外延生长的Ge量子点较Si(001)衬底上形成的量子点的热稳定性要好.     

Si(001)斜切衬底上Ge量子点的固相外延生长

研究了Si(001)面偏[110]方向6°斜切衬底上Ge量子点的固相外延生长.实验结果表明,在Si(001)6°斜切衬底上固相外延生长Ge量子点的最佳退火温度为640℃,在斜切衬底上成岛生长的临界厚度低于在Si(001)衬底成岛生长的临界厚度,6°斜切衬底上淀积0.7nm Ge即可成岛,少于Si(001)衬底片上Ge成岛所需的淀积量.从Ge量子点的密度随固相外延温度的变化曲线,得到Ge量子点的激活能为1.9eV,远高于Si(111)面上固相外延Ge量子点的激活能0.3eV.实验亦发现,在Si(001)斜切衬底上固相外延生长的Ge量子点较Si(001)衬底上形成的量子点的热稳定性要好.     

硼原子对Si(100)衬底上Ge量子点生长的影响

研究了硼原子对Si(100)衬底上Ge量子点自组织生长的影响.硼原子的数量由0单原子层变到0.3单原子层.原子力显微镜的观察表明,硼原子不仅对量子点的大小,而且对其尺寸均匀性及密度都有很大影响.当硼原子的数量为0.2单原子层时,获得了底部直径为60±5nm,面密度为6×109cm-2,且均匀性很好的Ge量子点.另外,还简单讨论了硼原子对Ge量子点自组织生长影响的机制.     

Ge/Si(100)量子点生长与形态分布的研究

利用超高真空化学气相淀积系统,通过控制淀积量、温度、流量等生长参数,在n型Si(100)衬底上自组装生长了一系列Ge量子点样品,用原子力显微镜进行了表征与分析.系统地研究了生长参数对Ge岛形态分布的影响并分析了有序、高密度Ge岛的生长机理.结果表明,从二维向三维岛跃迁后,最初形成的高宽比(高度与底宽的比值)在0.04～0.06之间的小岛是一种在低温下可以与圆顶岛共存的稳定岛,两种岛的分布随淀积参数的变化而变化.在高温下小岛几乎消失,流量的变化对小岛的密度影响较小.实验中获得小岛的密度最高为2.6×1010cm-2,圆顶岛的密度最高为4.2×109cm-2.     

Si基Ge/SiGeⅠ型量子阱结构的理论设计和实验研究

基于能带工程理论,设计了Si基Ge/SiGeⅠ型量子阱结构。采用超高真空化学气相淀积系统,制备出高质量的Si基Ge/SiGe多量子阱系列材料。当样品中Ge量子阱宽从15nm减少到12nm和11nm时,室温下荧光(PL)光谱观测到量子限制效应引起的直接带跃迁发光峰位的蓝移,峰位的实验值与理论值符合得很好;当Ge量子阱宽逐渐减小到9nm和7nm时,测试得到样品的PL谱峰位却与理论预期出现了较大的差值。进一步的实验表明,这主要是由于量子阱厚度小到一定程度时,量子阱的直接带发光受到抑制,其发光主要源于Ge虚拟衬底。     

利用ArF准分子激光退火获得小锗量子点的研究

使用ArF准分子激光脉冲对UHV/CVD条件下生长的Ge量子点进行退火处理,获得了底宽为20～25nm的光致量子点(LIQD),远小于退火前的量子点大小.LIQD的密度约为6×1010cm-2.分析表明,在ArF准分子激光脉冲作用下,退火样品只有表面扩散,并没有体扩散.激光脉冲对表面Ge原子的扩散控制导致了Ge量子点形貌发生了巨大的改变.该方法为获得高密度小尺寸的Ge量子点提供了新的途径.采用原子力显微镜对光致量子点的表面形貌进行了研究.     

Growth and characterizations of InP self-assembled quantum dots embedded in InAIP grown on GaAs substrates

We report the characteristics of InP self-assembled quantum dots embedded in In_0.5Al_0.5P on GaAs substrates grown by metalorganic chemical vapor deposition. The InP quantum dots show increased average dot sizes and decreased dot densities, as the growth temperature increases from 475°C to 600°C with constant growth time. Above the growth temperature of 600°C, however, dramatically smaller and densely distributed self-assembled InP quantum dots are formed. The small InP quantum dots grown at 650°C are dislocation-free “coherent” regions with an average size of ∼20 nm (height) and a density of ∼1.5 × 10⁸ mm⁻². These InP quantum dots have a broad range of luminescence corresponding to red or organge in the visible spectrum.     

利用ArF准分子激光退火获得小锗量子点的研究

使用ArF准分子激光脉冲对UHV/CVD条件下生长的Ge量子点进行退火处理,获得了底宽为20～25nm的光致量子点(LIQD),远小于退火前的量子点大小.LIQD的密度约为6×1010cm-2.分析表明,在ArF准分子激光脉冲作用下,退火样品只有表面扩散,并没有体扩散.激光脉冲对表面Ge原子的扩散控制导致了Ge量子点形貌发生了巨大的改变.该方法为获得高密度小尺寸的Ge量子点提供了新的途径.采用原子力显微镜对光致量子点的表面形貌进行了研究.     

Ge/Si Self-Assembled Quantum Dots and Their Optoelectronic Device Applications

In recent years, quantum dots have been successfully grown by self-assembling processes. For optoelectronic device applications, the quantum-dot structures have advantages such as reduced phonon scattering, longer carrier lifetime, and lower detector noise due to low-dimensional confinement effect. Comparing to traditional optoelectronic III-V and other materials, self-assembled Ge quantum dots grown on Si substrates have a potential to be monolithically integrated with advanced Si-based technology. In this paper, we describe the growth of self-assembled, guided Ge quantum dots, and Ge quantum-dot superlattices on Si. For dot growth, issues such as growth conditions and their effects on the dot morphology are reviewed. Then vertical correlation and dot morphology evolution are addressed in relation to the critical thickness of Ge quantum-dot superlattices. In addition, we also discuss the quantum-dot p-i-p photodetectors (QDIPs) and n-i-n photodetectors for mid-infrared applications, and the quantum-dot p-i-n photodetectors for 1.3-1.55 mum for communications applications. The wavelength of SiGe p-i-p QDIP can be tuned by the size as grown by various patterning methods. Photoresponse is demonstrated for an n-i-n structure in both the mid-infrared and far-infrared wavelength ranges. The p-i-n diodes exhibit low dark current and high quantum efficiency. The characteristics of fabricated light-emitting diode (LED) devices are also discussed, and room-temperature electroluminescence is observed for Ge quantum-dot LED. The results indicate that Ge dot materials are potentially applicable for mid-infrared (8-12 mum) detectors as well as fiber-optic (1.3-1.55 mum) communications.     

Self-assembling Ge(Si)/Si(100) quantum dots

The morphological evolution of self-assembled epitaxial quantum dots on Si(100) is reviewed. This intensely investigated material system continues to provide fundamental insight guiding the growth of nanostructured electronic materials. Self-assembled quantum dots are faceted, three-dimensional islands which grow atop a planar wetting layer. Pure Ge growth at higher substrate temperatures results in narrower island size distributions but activates additional strain-relief mechanisms which will alter the optical and electronic properties of the dots. Optical and electrical characterization has shown that electrons and holes are confined to different regions of the dot. This results in a spatially indirect, type II recombination mechanism. Emerging device applications which exploit properties of these nanoscale Ge islands are discussed.     

Effect of Bi isovalent dopants on the formation of homogeneous coherently strained InAs quantum dots in GaAs matrices

The distribution of hydrostatic strains in Bi³⁺-doped InAs quantum dots embedded in a GaAs matrix are calculated in the context of the deformation-potential model. The dependences of strains in the material of spherical InAs quantum dots with substitutional (Bi → As) and interstitial (Bi) impurities on the quantum-dot size are derived. The qualitative correlation of the model with the experiment is discussed. The data on the effect of doping on the morphology of self-assembled InAs:Bi quantum dots in a GaAs matrix are obtained.     

A real-time quantitative assessment of self-assembled quantum dots by reflection high-energy electron diffraction

A method for in-situ quantitative characterization of quantum dots during growth is provided using the readily available reflection high-energy electron diffraction (RHEED). RHEED patterns of uncapped self-assembled InAs/GaAs quantum dots are investigated theoretically and experimentally. Previously predicted intensity fringes along chevron tails of quantum dot's RHEED diffraction spots are observed experimentally. Post-growth atomic force microscopic images and theoretical RHEED images of the same are obtained parallel to experimental data. The bounding facets of the quantum dots are determined using the angle between the chevrons. The size (height) of the quantum dots is determined using the periodicity of intensity fringes along the chevrons during growth.     

Growth of ternary InAlP and InGaP self-assembled quantum dots by metalorganic chemical vapor deposition

We report the characteristics of ternary InAlP and InGaP self-assembled quantum dots grown by metalorganic chemical vapor deposition. The structural and optical properties of these ternary quantum dots are compared with the characteristics of binary InP quantum dots grown under similar conditions. Because these ternary quantum dots have different bandgaps, strain, and composition compared to binary InP quantum dots, the ternary quantum-dot optical and physical properties are markedly different. The quantum-dot structures are grown uncapped (exposed QDs) and capped (embedded QDs) and characterized by atomic force microscopy (AFM) and photoluminescence (PL). InAlP quantum dots have higher densities and smaller sizes and InGaP quantum dots have smaller densities, as compared with InP quantum dots grown under similar conditions. Also, a random and broad size distribution is observed for InGaP quantum dots and the luminescence from InGaP dots is broader than for InP quantum dots.     

Statistical analysis of AFM topographic images of self-assembled quantum dots

To obtain statistical data on quantum-dot sizes, AFM topographic images of the substrate on which the dots under study are grown are analyzed. Due to the nonideality of the substrate containing height differences on the order of the size of nanoparticles at distances of 1–10 μm and the insufficient resolution of closely arranged dots due to the finite curvature radius of the AFM probe, automation of the statistical analysis of their large dot array requires special techniques for processing topographic images to eliminate the loss of a particle fraction during conventional processing. As such a technique, convolution of the initial matrix of the AFM image with a specially selected matrix is used. This makes it possible to determine the position of each nanoparticle and, using the initial matrix, to measure their geometrical parameters. The results of statistical analysis by this method of self-assembled InAs quantum dots formed on the surface of an AlGaAs epitaxial layer are presented. It is shown that their concentration, average size, and half-width of height distribution depend strongly on the In flow and total amount of deposited InAs which are varied within insignificant limits.