Oxygen addition to fluorine based SiN etch process: Impact on the electrical properties of AlGaN/GaN 2DEG and transistor characteristics

Early passivated AlGaN/GaN heterostructure field effect transistors (HFETs) have shown superior device performance compared to their unpassivated counterparts. The opening of gate trenches in the passivation layer by a fluorine based dry-etch process is the crucial step to obtain high-performance devices. Even though oxygen addition to this process has been reported, its effect on the device characteristics has not been studied yet. In this paper, we report the impact of oxygen addition to a fluorine based plasma on two-dimensional electron gas (2DEG) properties as well as on device characteristics of passivated AlGaN/GaN HFETs. It is shown that oxygen addition reduces the fluorine-induced degradation of the 2DEG density. Yet, recovery of the 2DEG density is prevented. Additionally, it is shown that oxygen addition increases the current collapse and therefore decreases the RF performance.     

Role of barrier and buffer layer defect states in AlGaN/GaN HEMT structures

We have used low energy electron-excited nanoscale luminescence spectroscopy (LEEN) to detect the defects in each layer of AlGaN/GaN HEMT device structures to correlate their effect on two-dimensional electron gas (2DEG) confinement. Also, we have used Auger electron spectroscopy (AES) to detect the chemical composition as a function of lateral position on a growth wafer and to correlate chemical effects with electronic properties. We investigated several high-quality AlGaN/GaN heterostructures of varying electrical properties using incident electron beam energies of 0.5–15 keV to probe electronic state transitions within each of the heterostructure layers. The LEEN depth profiles reveal differences between sucessful and failed structures and highlight the importance of acceptor deep defect levels in the near 2DEG region. Variations in the GaN and AlGaN band edge emissions, as well as the yellow defect emission across an AlGaN/GaN heterostructure growth wafer have been observed. AES and LEEN spectroscopy of the growth wafer suggest that variation in the cation concentration may play a role in the mechanism responsible for the deep aceceptor level emission in the AlGaN barrier layer.     

Time-dependent degradation of AlGaN/GaN heterostructures grown on silicon carbide

The AlGaN/GaN heterostructure field-effect transistors (HFETs) were grown on 4H-SiC substrates by metal-organic chemical-vapor deposition (MOCVD) with a range of Al compositions (30–35%) and AlGaN barrier thicknesses. Films with higher strains exhibited a time-dependent degradation of the two-dimensional electron gas (2DEG) that varied from days to weeks. Atomic force microscopy (AFM) measurements of the degraded films revealed a hexagonal cracking pattern with an increase in the medium-scale surface roughness. The localized strain relaxation of AlGaN barriers and increased roughness of the AlGaN/GaN interface and AlGaN surface result in a broad shoulder at the lower angle of the AlGaN peak and a loss of satellite fringes in the (0006) reflection x-ray diffraction (XRD) curve. This degradation raises serious questions with regard to reliability and survivability of AlGaN HFETs and may complicate device fabrication.     

MOCVD生长AlGaN/GaN/Si(111)异质结材料

利用MOCVD在Si(111)衬底上生长了无裂纹的GaN外延薄膜和AlGaN/GaN异质结构。通过优化Si衬底的浸润处理时间、AlN层厚度等参数获得了无裂纹的GaN外延薄膜,研究了SiN缓冲层和插入层厚度对AlGaN/GaN异质结电学性质的影响,2DEG的迁移率和面密度分别达到1410cm2/V.s和1.16×1013cm-2。     

Influence of dual-frequency plasma-enhanced chemical-vapor deposition Si<Subscript>3</Subscript>N<Subscript>4</Subscript> passivation on the electrical characteristics of AlGaN/GaN heterostructure field-effect transistors

The influence of dielectric stress on the direct current (DC) electrical characteristics of AlGaN/GaN heterostructure field-effect transistors (HFETs) has been investigated. Dual-frequency plasma deposition was used to vary the amount of stress induced by a passivating dielectric on the surface of the devices. Initial data suggested a strong influence from the induced dielectric stress, but the low-frequency, radio-frequency (RF) excitation of the plasma deposition process was found to induce a severe nonreversible damage to the exposed AlGaN surface through N ion bombardment. The consequence is a drastic reduction of the sheet carrier concentration and mobility of the two-dimensional electron gas (2DEG). Subsequently, an alternative damage-free technique using a helium precursor was used to obtain compressive films. Based on the results, uniform dielectric stress has a minimal impact on the polarization charges within the AlGaN barrier.     

分子束外延AlGaN/GaN异质结场效应晶体管材料

用自组装的氨源分子束外延 (NH3-MBE)系统和射频等离子体辅助分子束外延 (PA-MBE)系统在 C面蓝宝石衬底上外延了优质 Ga N以及 Al Ga N/Ga N二维电子气材料。Ga N膜 (1 .2 μm厚 )室温电子迁移率达3 0 0 cm2 /V· s,背景电子浓度低至 2× 1 0 1 7cm- 3。双晶 X射线衍射 (0 0 0 2 )摇摆曲线半高宽为 6arcmin。 Al Ga N/Ga N二维电子气材料最高的室温和 77K二维电子气电子迁移率分别为 73 0 cm2 /V·s和 1 2 0 0 cm2 /V· s,相应的电子面密度分别是 7.6× 1 0 1 2 cm- 2和 7.1× 1 0 1 2 cm- 2 ;用所外延的 Al Ga N/Ga N二维电子气材料制备出了性能良好的 Al Ga N/Ga N HFET(异质结场效应晶体管 ) ,室温跨导为 5 0 m S/mm(栅长 1 μm) ,截止频率达 1 3 GHz(栅长 0 .5μm)。该器件在 3 0 0°C出现明显的并联电导 ,这可能是材料中的深中心在高温被激活所致     

AlGaN/GaN heterostructure field-effect transistor model includingthermal effects

A new AlGaN/GaN heterostructure field-effect transistor (HFET) model, in the framework of the gradual channel approximation and based on Monte Carlo simulations of the electron transport properties, is presented. The effects on the dc HFET output characteristics arising from contact resistances, from the ungated access channels between the gate and the source and between the gate and the drain, and from self-heating are analyzed. By examining the channel potential, the ungated regions are shown to have nonlinear characteristics. The solution method uses implicit analytical relationships for the current in the gated and ungated segments of the channel that are connected by matching boundary conditions. Thermal effects on the transport parameters associated with self-heating are included self-consistently. The model results are in very good agreement with experimental data from AlGaN/GaN HFETs fabricated on sapphire substrates. The model also identifies several device design parameters that need to be adjusted to obtain optimized performance in terms of output current and transconductance     

AlGaN/GaN异质结构中二维电子气的高温输运性质

采用高温Hall测量仪对一个全应变和一个部分应变弛豫的AlGaN/GaN异质结构中2DEG的高温输运特性进行了研究,温度变化范围从室温到680K.研究结果表明:在高温段2DEG的迁移率主要受LO声子散射限制; 在室温,异质界面处的非均匀压电极化场对2DEG迁移率的散射也是一个主要的散射机制.同时,计算结果显示,随着温度升高,更多的电子跃迁到更高的子带,在更高的子带,其波函数逐渐扩展到AlGaN层内部以及GaN体内更深的位置,导致LO声子散射的屏蔽效应减弱且来自AlGaN层内的合金无序散射增强.     

边欧姆工艺对AlN/GaN 异质结场效应晶体管极化梯度库仑场散射的影响

Using the measured capacitance–voltage and current–voltage characteristics of the rectangular Al N/Ga N heterostructure field-effect transistors(HFETs) with the side-Ohmic contacts, it was found that the polarization Coulomb field scattering in the Al N/Ga N HFETs was greatly weakened after the side-Ohmic contact processing, however, it still could not be ignored. It was also found that, with side-Ohmic contacts, the polarization Coulomb field scattering was much stronger in Al N/Ga N HFETs than in Al Ga N/Al N/Ga N and In0:17Al0:83N/Al N/Ga N HFETs, which was attributed to the extremely thinner barrier layer and the stronger polarization of the Al N/Ga N heterostructure.     

AlGaN/GaN/AlGaN双异质结材料生长及性质研究

基于能带理论设计并利用MOCVD技术在76.2 mm蓝宝石衬底上生长了不同GaN沟道层厚度的AlGaN/GaN/AlGaN双异质结材料.室温霍尔测试结果表明:双异质结材料的二维电子气面密度随沟道层厚度增加有所升高并趋于饱和;二维电子气迁移率则随沟道厚度增加明显升高.200 nm厚GaN沟道的双异质结材料方块电阻平均值3...     

InAlN/AlN/GaN HEMT器件特性研究

通过利用MOCVD生长的高质量蓝宝石衬底InAlN/AlN/GaN异质结材料,获得了高的二维电子气面密度,其值为1.65×10<'13>cm<'-2>.通过该结构制备了0.15 μm栅长InAlN/AIN/GaN HEMT器件,获得了相关的电学特性:最大电流密度为1.3A/mm,峰值跨导为260mS/ram,电流增益截...     

Electron mobility in an AlGaN/GaN two-dimensional electron gas. I. Carrier concentration dependent mobility

The transport properties of two-dimensional electron gas (2-DEG) at the AlGaN/GaN interface were studied by characterizing the 2-DEG mobility dependence on carrier concentration, n/sub s/, and temperature. High-quality AlGaN/GaN heterostructures were grown, and heterostructure field effect transistors (HFETs) using a Fat FET geometry were fabricated. Measurements of 2-DEG mobility were performed by magnetoresistance and capacitance-conductance. In order to understand the dominant transport factors, the mobility was modeled using different scattering mechanisms and compared to our results. It is found that mobility dependence on n/sub s/ shows a bell-shape behavior over the whole temperature range. For low n/sub s/ the mobility is dominated by Coulomb interaction from interface charge, and at high n/sub s/ the mobility is dominated by interface roughness. Using previously reported experimental values of interface charge and interface roughness in our modeling, we show good agreement with mobility measurement results. Scattering from interface states in AlGaN/GaN heterostructures, seems to be related to the high polarization field in the heterointerface. At temperatures higher than 200K polar optical phonon scattering dominates the transport, yet both interface charge and roughness affect the mobility at the low and high n/sub s/, respectively.     

SiO/sub 2//AlGaN/InGaN/GaN MOSDHFETs

The characteristics of a novel nitride based field-effect transistor combining SiO/sub 2/ gate isolation and an AlGaN/InGaN/GaN double heterostructure design (MOSDHFET) are reported. The double heterostructure design with InGaN channel layer significantly improves confinement of the two-dimensional (2-D) electron gas and compensates strain modulation in AlGaN barrier resulting from the gate voltage modulations. These decrease the total trapped charge and hence the current collapse. The combination of the SiO/sub 2/ gate isolation and improved carrier confinement/strain management results in current collapse free MOSDHFET devices with gate leakage currents about four orders of magnitude lower than those of conventional Schottky gate HFETs.     

Electrical Spin Injection into the 2D Electron Gas in AlN/GaN Heterostructures with Ultrathin AlN Tunnel Barrier

The spin injection into 2D electron gas (2DEG) in AlN/GaN heterostructures is studied by magneto-transport measurements. An ultrathin AlN layer at the hetero-interface acts as a barrier to form high-quality 2DEG in the triangular quantum well and a tunneling barrier for the spin injection to overcome the conductance mismatch issue. In this study, Hanle signals and inversed Hanle signals are observed, proving that the spin injection is achieved in the 2DEG in the AlN/GaN heterostructure rather than in the interfacial states. The spin-relaxation time in 2DEG at 8 K is found to be as long as 860 ps, which almost keeps constant with bias and decreases with increasing temperature. The spin-relaxation process is illustrated as Rashba spin-orbit coupling dominated D'yakonov Perel’ mechanisms above 8 K. These results show the promising potential of 2DEG in AlN/GaN heterostructures for spin field-effect transistor applications.     

间歇供氨高温AlN缓冲层对AlGaN/GaN异质结的影响

研究了以间歇供氨的方法直接高温生长的氮化铝为缓冲层的AlGaN/GaN材料,高温氮化铝的应用可以有效的提高晶体质量和表面形貌,并且二维电子气的浓度和迁移率也得到改善。     

Self-heating in high-power AlGaN-GaN HFETs

We compare self-heating effects in AlGaN-GaN heterostructure field effect transistors (HFETs) grown on sapphire and SiC substrates. Heat dissipation strongly affects the device characteristics soon after the application of the source-drain voltage (in less than 10^-7 s). Our results show that in HFET's with the total epilayer thickness less than 1.5 μm, the thermal impedance, Θ is primarily determined by the substrate material and not by the material of the active layer. For our devices grown on 6H-SiC substrates, we measured Θ of approximately 2°C·mm/W, which was more than an order of magnitude smaller than Θ=25°C mm/W measured for similar AlGaN/GaN HFET's grown on sapphire. Our results demonstrate that AlGaN-GaN HFET's grown on SiC substrates combine advantages of superior electron transport properties in AlGaN/GaN heterostructures with excellent thermal properties of SiC, which should make these devices suitable for high-power electronic applications     

Flicker noise of GaN-based heterostructure field-effect transistors with Si-doped AlGaN carrier injection layer

Aluminum gallium nitride/gallium nitride (AlGaN/GaN) heterostructure field effect transistors (HFETs) with and without Si-doped AlGaN layer were fabricated and investigated. HFETs with the Si-doped AlGaN carrier-injection layer show better DC performance, and the transconductance is 150 mS/mm. However, the HFETs with Si-doped AlGaN layer present the deviation from the 1/f noise at low frequency. The Lorentz shape was observed in the noise spectrum. It suggests that traps might be more pronounced in this kind of structure. Therefore, the DC characteristics of HFETs can be improved by the insertion of Si-doped AlGaN layer, but it can result in more low-frequency noise with the carrier-injection layer.     

effect of the parameters of AlN/GaN/AlGaN and AlN/GaN/InAlN heterostructures with a two-dimensional electron gas on their electrical properties and the characteristics of transistors on their basis

The effect of the layer thickness and composition in AlGaN/AlN/GaN and InAlN/AlN/GaN transistor heterostructures with a two-dimensional electron gas on their electrical and the static parameters of test transistors fabricated from such heterostructures are experimentally and theoretically studied. It is shown that the use of an InAlN barrier layer instead of AlGaN results in a more than twofold increase in the carrier concentration in the channel, which leads to a corresponding increase in the saturation current. In situ dielectric-coating deposition on the InAlN/AlN/GaN heterostructure surface during growth process allows an increase in the maximum saturation current and breakdown voltages while retaining high transconductance.     

沟道电场分布对AlN/GaN HFETs极化库仑场散射的影响

Based on the measured capacitance–voltage(C–V) curves and current–voltage(I–V) curves for the prepared differently-sized Al N/Ga N heterostructure field-effect transistors(HFETs), the I–V characteristics of the Al N/Ga N HFETs were simulated using the quasi-two-dimensional(quasi-2D) model. By analyzing the variation in the electron mobility for the two-dimensional electron gas(2DEG) with the channel electric field, it is found that the different polarization charge distribution generated by the different channel electric field distribution can result in different polarization Coulomb field(PCF) scattering. The 2DEG electron mobility difference is mostly caused by the PCF scattering which can reach up to 899.6 cm2/(V s)(sample a), 1307.4 cm2/(V s)(sample b),1561.7 cm2/(V s)(sample c) and 678.1 cm2/(V s)(sample d), respectively. When the 2DEG sheet density is modulated by the drain–source bias, the electron mobility for samples a, b and c appear to peak with the variation of the 2DEG sheet density, but for sample d, no peak appears and the electron mobility rises with the increase in the2 DEG sheet density.     

Mobility spectrum analysis of anisotropic electron transport in N-polar GaN/AlGaN heterostructures on vicinal sapphire substrates

In this work, we present results of a study of anisotropic two-dimensional electron gas (2DEG) transport in N-polar GaN/AlGaN heterostructures grown on slightly mis-oriented sapphire substrates. High-resolution mobility spectrum analysis of magnetic-field dependent Hall-effect and resistivity indicate an isotropic 2DEG sheet carrier density, yet significant anisotropy was observed in carrier mobility. A single electron species with a narrow mobility distribution was found to be responsible for conduction parallel to the multi-atomic steps resulting from growth on the vicinal substrates; whilst in the perpendicular direction two distinct electrons peaks are evident at T ? 150 K, which merge near room temperature. The linewidth of the mobility distributions for transport in the perpendicular direction was found to be significantly broader than that of the single electron in the parallel direction. The broader mobility distribution and the lower average mobility for the 2DEG in the perpendicular direction are attributable to interface roughness scattering associated with the GaN/AlGaN interfacial steps.