一种宽动态范围低失配的电荷泵

采用TSMC 0.18 μm混合CMOS工艺,设计了一种应用在GNSS接收机中低杂散锁相环(PLL)的宽动态范围低失配电荷泵。分析了电荷泵非理想因素和压控振荡器(VCO)调谐增益对参考杂散的影响,发现提高电荷泵电流匹配精度和减小VCO调谐增益均可有效抑制锁相环的参考杂散。采用加负反馈的源极开关型电荷泵,以实现电荷泵充放电电流的精确匹配。利用电荷泵输出电压来控制运算放大器的不同输出支路,以拓宽电荷泵的输出电压动态范围,从而降低PLL输出频率范围对VCO调谐增益的要求。仿真结果表明,当电源电压为1.8 V、电荷泵电流为100 μA时,可以实现充放电电流精确匹配,输出电压范围达到0.02~1.78 V,参考杂散为-66.3 dBc。     

3 GHz低杂散锁相环中的低失配电荷泵

基于SMIC 40 nm CMOS工艺,提出了一种改进型电荷泵电路。在传统电荷泵锁相环中,电荷泵存在较大的电流失配,导致锁相环产生参考杂散,使锁相环输出噪声性能恶化。设计的电荷泵电路在电流源处引入反馈,降低了电流失配。仿真结果表明,在供电电压为1.1 V,电荷泵充放电电流为0.1 mA,输出电压在0.3~0.7 V范围变化时,电荷泵的电流失配率小于0.83 %,锁相环的输出参考杂散为-65.5 dBc。     

2.4GHz频率综合器中低杂散锁相环的设计

在带电荷泵的锁相环频率综合器中,设计低杂散锁相环的关键是减少鉴频鉴相器和电荷泵的非理想特性以及提高压控振荡器的性能.采用TSMC 0.18 μm CMOS工艺,设计了一种改进型锁相环电路.仿真结果显示,在1.8V基准电压供电时,电荷泵电流在0.3～1.6V电压范围内匹配度小于1μA,电流失配率小于0.2％,压控振荡器在中心频率2.4 GHz频偏1 MHz时的相位噪声为-124.3 dBc/Hz@1 MHz,环路参考杂散降为-60 dBm.     

一种低杂散锁相环频率综合器

基于SMIC 0.13 μm CMOS工艺,设计了一种锁定频率范围为0.25~1.25 GHz的低杂散锁相环频率合成器。该电路采用一种改进的高精度电荷泵,以减小电荷共享、电流失配等非理想效应,降低了相位误差,减少了输出信号的参考杂散;采用压控电阻器作为延迟单元,设计了一种输出频率广、相位噪声低的压控振荡器。Spectre仿真显示,输出电平在0.3~1.1 V范围时,电荷泵的充放电电流失配仅为0.2 %,锁相环锁定后的杂散小于-90 dBm,满足了低杂散的设计要求。     

应用于30 GHz锁相环的高性能电荷泵设计

基于IBM 0.13 μm CMOS工艺,设计了一款应用于30 GHz低杂散锁相环的电荷泵电路。该电荷泵采用带隙基准为电流源和运算放大器提供偏置,采用复制支路和比较器实现上下电流源的静态匹配,将输入输出轨对轨运算放大器接成单位增益缓冲器来避免电荷共享效应,通过加入互补开关管来减小时钟馈通和电荷注入效应。后仿真结果表明,在电源电压为2.5 V,电荷泵电流为200 μA,调谐范围为0.5~2 V时,充放电电流的最大静态失配小于0.1%;在750 kHz环路带宽下,计算得到锁相环参考杂散小于-72 dBc,满足IEEE 802.15.3c标准对60 GHz本振信号杂散的要求。     

一种低杂散的小数分频锁相环

基于0.18 μm CMOS工艺,设计了一种锁定频率范围在1.8~2.4 GHz的电荷泵锁相环。采用高性能的鉴频鉴相器、电荷泵以及三阶Σ-Δ调制器,减小了输出时钟的参考杂散。在Σ-Δ调制器中引入线性反馈移位寄存器(LFSR),生成伪随机序列,进一步降低了小数杂散。仿真结果表明,在0.3~1.5 V输出电压范围内,锁相环的电流失配比仅为0.1%,小数杂散为-50 dBc @1 MHz。     

低相位噪声和低参考杂散CMOS锁相环的优化设计与实现

基于Simulink建立的CMOS电荷泵锁相环的动态模型,对电荷泵锁相环的环路参数与环路稳定性的关系进行了仿真与分析,根据分析结果确定了4GHz锁相环的环路参数,并围绕低相位噪声和低参考杂散设计了锁相环各单元电路结构。该锁相环采用SMIC 0.18m CMOS工艺进行了流片,芯片面积为675μm×700μm。测试的VCO在控制电压为0.3~1.5V时,振荡频率为3.98~4.3GHz;当分频比为1036,参考信号频率为4MHz,锁定状态下锁相环的相位噪声测量值为-120.5dBc/Hz@100kHz及-127.5dBc/Hz@1MHz;电路参考杂散约为-70dB,整体性能优良。     

低杂散锁相环中的电荷泵设计

用TSMC 0.18μm CMOS工艺设计并实现了一种电荷泵电路.传统的电荷泵电路中充放电电流有较大的电流失配,电流失配导致相位偏差,从而引起杂散并降低了锁相环的锁定范围.文中采用与电源无关的基准电流源电路,运用运算放大器和自偏置高摆幅共源共栅电流镜电路实现了充放电电流的高度匹配,从而降低了杂散.测试结果表明:电源电压1.8V时,电荷泵电流为0.475mA,在0.3～1.6V输出电压范围内电流失配小于10mA,功耗为6.8mW.     

低杂散锁相环中的电荷泵设计

用TSMC0.18μm CMOS工艺设计并实现了一种电荷泵电路，传统的电荷泵电路中充放电电流有较大的电流失配,电流失配导致相位偏差,从而引起杂散并降低了锁相环的锁定范围，文中采用与电源无关的基准电流源电路,运用运算放大器和自偏置高摆幅共源共栅电流镜电路实现了充放电电流的高度匹配,从而降低了杂散。测试结果表明：电源电压1.8V时,电荷泵电流为0.475mA,在0.3-1.6V输出电压范围内电流失配小于10mA,功耗为6.8mW。     

GPS接收机中1.57GHz CMOS锁相环的设计

设计了一种用于GPS接收机中采用CMOS工艺实现的1.57GHz锁相环.其中,预分频器采用高速钟控锁存器(LATCH)的结构,工作频率超过2GHz.VCO中采用LC谐振回路,具有4段连续的调节范围,输出频率范围可以达到中心频率的20%.电荷泵采用一种改进型宽摆幅自校准电路,可以进一步降低环路噪声.锁相环采用0.25μmRFCOMS工艺实现.测量表明VCO输出在偏移中心频率1MHz处的相位噪声为-110dBc/Hz,锁相环输出在偏移中心频率10kHz处的相位噪声小于-90dBc/Hz.供电电压为2.5V时,功耗小于15mW.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.