甚长波量子阱红外探测器中的双激发态工作机理

通过对甚长波量子阱红外探测器的变温变偏压光谱实验,发现了光电流谱峰值响应波长与半高宽随偏置电压和温度变化均会发生变化,尤其以小偏压下峰值移动明显.结合器件能带结构计算的结果,提出了甚长波量子阱红外探测器中双激发态工作模型,并阐明了其中束缚态-准束缚态跃迁模式中准束缚态的物理特性,包括隧穿特性和热离化特性,以及不同工作条件下这两种物理过程在形成光电流时的主导性.同时,验证了甚长波量子阱红外探测器件的第一激发态随外界工作条件的变化会呈现出准束缚到准连续的变化特性.最后,揭示了在甚长波量子阱红外探测器工作中束缚态-准束缚态跃迁工作模式对于降低器件暗电流、提升器件工作温度、提高器件探测率的有效性.     

等离激元微腔耦合长波红外量子阱高消光比偏振探测器（特邀）

长波红外偏振探测器能够大幅提升对热成像目标的识别能力。受制于衍射极限的物理限制,目前的微线栅偏振片型长波红外偏振探测器的偏振消光比基本上只能做到最高10∶1左右。文中采用金属/介质/金属的等离激元微腔结构,将量子阱红外探测激活层相嵌在微腔之中。由于上、下金属之间的近场耦合形成了在双层金属区域的横向法布里-珀罗共振模式,构成等离激元微腔。文中利用微腔的模式选择特性及其与量子阱子带间跃迁的共振耦合,将量子阱子带跃迁不能直接吸收的垂直入射光耦合进入等离激元微腔并转变为横向传播,从而能够被量子阱子带吸收,实现了在长波红外13.5 μm探测波长附近偏振消光比大于100∶1的结果。相关工作为发展我国高消光比长波红外偏振成像焦平面提供了全新的物理基础和技术路径。     

InGaAs/GaAs量子点红外探测器

与量子阱红外探测器相比,量子点红外探测器具有不制作表面光栅就能在垂直入射红外光照射下工作以及工作温度更高等优势。然而,目前阻碍量子点红外探测器性能提高的技术瓶颈主要来自组装量子点较差的大小均匀性、较低的量子点密度以及垂直入射下子带跃迁吸收效率低等原因。利用分子束外延技术研究了如何从量子点材料生长和器件设计两方面来克服这些困难,并且制作了几种不同结构的InGaAs/GaAs量子点红外探测器。 在77 K时,这些器件在垂直入射条件下观察到了很强的光电流信号。     

格兰式偏光分束棱镜光强分束比的入射角效应

为了分析自然光斜入射格兰式分束棱镜时光强分束比随入射角度、棱镜结构角及入射波长的变化关系,根据几何关系、菲涅耳公式及相位匹配条件从理论上推导出光强分束比的数学表达式,并通过了实验验证。结果表明,光强分束比随入射角度、棱镜结构角及波长变化呈非线性关系。所得结果为格兰式棱镜在光学器件应用中提供了有用的信息。     

局域光场增强的量子阱红外探测器（特邀）

量子阱红外探测器是继碲镉汞红外探测器之后又一重要的可以在中、长波段和甚长波段工作的红外探测器件。它在长波红外探测、多色探测及其焦平面技术方面表现出比碲镉汞红外探测器更具特色的优势,对量子阱红外探测器的研究将在很大程度上推动我国红外探测器技术的发展。这一探测器的突出优势是其材料均匀性好,制备技术成熟。但是由于量子效率偏低,且无法直接吸收垂直入射红外光,所以需要针对不同的红外探测波段,设计和制备各类光栅或微腔结构来进行光耦合及局域光场增强以有效提升探测器性能。如何更有效提升量子阱红外探测器的光耦合效率,降低暗电流,提高器件工作温度是仍然是目前研究的重点。文中着重介绍和总结了近5年来研究的局域光场增强的新型量子阱红外探测器,从提高探测器光耦合效率、降低器件暗电流和提高工作温度等方面重点讨论各种量子阱红外探测器的新结构和新机理,同时展望了这一探测器的未来发展方向。     

用Ⅲ-Ⅴ族氮化物制成的红外探测器

本发明提供一种量子阱红外光电探测器,它包括一层衬底、一层缓冲层、第一层导电层、一个多量子阱、一层任选阻挡层和第二层导电层。其中,衬底是用一种单晶体制作的,在器件制备完毕后可以去除掉。其余的膜层则是由Ⅲ-Ⅴ族氮化物构成的。这种量子阱红外光电探测器的优点是,能够敏感正入射和斜入射的近红外至甚远红外波长的光。     

量子阱红外探测器光耦合模式的发展状况

根据子带跃迁的量子力学选择定则,量子阱红外探测器对垂直于阱层的辐射无响应,只有利用光耦合模式,把正入射的光束转变成量子阱可吸收的形式,红外探测器的量子效率才能提高.文中介绍了几种主要光耦合模式及其发展现状,指出各耦合模式的设计思想和适用范围,并进行了比较.     

GaAs/AlGaAs多量子阱空间光调制器入射角度特性研究

研究了GaAs/AlGaAs多量子阱(MQW)空间光调制器(SLM)在不同入射角度下的调制特性。对腔模位置与入射角度的关系进行了理论计算和实验验证,两者具有较好的一致性。当入射角在0°～75°之间变化时,腔模从871nm变化至845nm,可调节范围达26nm。当入射光从垂直入射变化为约45°入射时,SLM对比度从(CR)3.8提高到16.3,调制电压从9.5V下降至6.5V。理论分析和实验结果表明,入射角度调节能够有效提高GaAs/AlGaAs MQW SLM调制性能。     

GaAs/Al_xGa_(1-x)As量子阱红外探测器光谱特性的研究

采用MBE法制备了不同结构参数及不同阱中掺杂浓度的GaAs/AlxGa1-xAs量子阱红外探测器外延材料。通过对量子阱红外探测器材料特性和器件特性的实验测试及理论分析,研究了量子阱红外探测器的响应光谱特性,并通过薛定谔方程和泊松方程的求解,对掺杂对量子阱能级的影响做了研究。结果表明,由于应力导致的能带非抛物线性使得阱中能级发生了变化,从而引起吸收峰向高能方向发生了漂移,而阱中进行适度的掺杂没有对量子阱能级造成影响,光致发光谱实验结果与之吻合较好。在光电流谱的实验分析基础之上,分析了量子阱阱宽、Al组分与峰值探测波长λ的关系,为量子阱红外探测器的设计优化提供了参考。     

外腔面发射激光器自发辐射谱的热特性

热效应是限制外腔面发射激光器(VECSEL)输出功率和光束质量的主要原因。为了优化VECSEL增益芯片有源区量子阱的设计,降低激光器的热效应,提高斜效率和输出功率,采用光致荧光谱方法,对设计波长980nm VECSEL自发辐射谱的热特性进行了实验研究。取得了不同热沉温度下边发射和面发射谱随温度的变化数据。结果表明,反映有源区量子阱自身特性的边发射谱峰值波长随温度升高的红移速率是0.5nm/K,而受到增益芯片多层结构调制的面发射谱峰值波长随温度升高的红移速率只有0.1nm/K;由于受到VECSEL增益芯片中微腔的限制,面发射谱分离为多个模式,分别与微腔的腔模对应。可见对量子阱的发射波长及微腔腔长做预偏置优化处理,可以显著改善激光器的输出性能。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.