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1.
从物理机制上分析了超高速InP/InGaAs SHBT碰撞电离与温度的关系,通过加入表示温度的参数和简化电场计算,得到一种改进的碰撞电离模型.同时针对自有工艺和器件特性,采用SDD(symbolically defined device)技术建立了一个包括碰撞电离和自热效应的InP/InGaAs SHBT的直流模型.模型内嵌入HP-ADS中仿真并与测试结果进行比较,准确地拟合了InP/InGaAs SHBT的器件特性.  相似文献   

2.
从InP湿法腐蚀各向异性特性实验出发,利用传统的基极-发射极自对准工艺和改进的基极-发射极工艺制作了两种InP/InGaAs SHBT自对准结构,比较了两种自对准工艺对减小基极与发射极台面间距的效果,为制作高频率特性InP/InGaAs SHBT提供了工艺途径.  相似文献   

3.
从InP湿法腐蚀各向异性特性实验出发,利用传统的基极-发射极自对准工艺和改进的基极-发射极工艺制作了两种InP/InGaAs SHBT自对准结构,比较了两种自对准工艺对减小基极与发射极台面间距的效果,为制作高频率特性InP/InGaAs SHBT提供了工艺途径.  相似文献   

4.
InP/InGaAs SHBT器件自对准结构设计和工艺实现   总被引:1,自引:1,他引:0  
从InP湿法腐蚀各向异性特性实验出发,利用传统的基极-发射极自对准工艺和改进的基极-发射极工艺制作了两种InP/InGaAs SHBT自对准结构,比较了两种自对准工艺对减小基极与发射极台面间距的效果,为制作高频率特性InP/InGaAs SHBT提供了工艺途径.  相似文献   

5.
带有复合掺杂层集电区的InP/InGaAs/InP DHBT直流特性分析   总被引:1,自引:0,他引:1  
设计了一种新结构InP/InGaAs/InP双异质结双极晶体管(DHBT),在集电区与基区之间插入n -InP层,以降低集电结的导带势垒尖峰,克服电流阻挡效应.采用基于热场发射和连续性方程的发射透射模型,计算了n -InP插入层掺杂浓度和厚度对InP/InGaAs/InP DHBT集电结导带有效势垒高度和I-V特性的影响.结果表明,当n -InP插入层掺杂浓度为3×1019cm-3、厚度为3nm时,可以获得较好的器件特性.采用气态源分子束外延(GSMBE)技术成功地生长出InP/InGaAs/InP DHBT结构材料.器件研制结果表明,所设计的DHBT材料结构能有效降低集电结的导带势垒尖峰,显著改善器件的输出特性.  相似文献   

6.
设计了一种新结构InP/InGaAs/InP双异质结双极晶体管(DHBT),在集电区与基区之间插入n+-InP层,以降低集电结的导带势垒尖峰,克服电流阻挡效应.采用基于热场发射和连续性方程的发射透射模型,计算了n+-InP插入层掺杂浓度和厚度对InP/InGaAs/InP DHBT集电结导带有效势垒高度和I-V特性的影响.结果表明,当n+-InP插入层掺杂浓度为3×1019cm-3、厚度为3nm时,可以获得较好的器件特性.采用气态源分子束外延(GSMBE)技术成功地生长出InP/InGaAs/InP DHBT结构材料.器件研制结果表明,所设计的DHBT材料结构能有效降低集电结的导带势垒尖峰,显著改善器件的输出特性.  相似文献   

7.
基于泊松方程和载流子连续性方程,导出了InGaAs/InP SAGCM-APD(吸收、渐变、电荷、倍增层分离结构雪崩光电二极管)特性的数学模型,利用数值计算工具对其进行了数值模拟,得到了APD内部电场分布、增益特性、暗电流特性、过剩噪声和增益带宽特性等的数值结果.模拟结果与实际器件特性测量结果相符合,表明运用该模型与数值模拟方法可对不同结构参数的InGaAs/InP SAGCM-APD进行结构设计、工艺改进和特性分析.  相似文献   

8.
一种InGaAs/InP复合沟道高电子迁移率晶体管模拟的新方法   总被引:1,自引:1,他引:0  
采用一种新方法对InGaAs/InP复合沟道高电子迁移率晶体管进行了模拟.该方法通过流体力学模型和密度梯度模型的联合求解,得到了沟道内的电子密度分布.与一些传统方法相比,该方法收敛性更好,速度更快,且同样适用于其他类型高电子迁移率晶体管器件的模拟.利用仿真对InGaAs/InP复合沟道高电子迁移率晶体管进行了深入研究.  相似文献   

9.
采用一种新方法对InGaAs/InP复合沟道高电子迁移率晶体管进行了模拟.该方法通过流体力学模型和密度梯度模型的联合求解,得到了沟道内的电子密度分布.与一些传统方法相比,该方法收敛性更好,速度更快,且同样适用于其他类型高电子迁移率晶体管器件的模拟.利用仿真对InGaAs/InP复合沟道高电子迁移率晶体管进行了深入研究.  相似文献   

10.
介绍了InP/InGaAs/InP双异质结双极晶体管(DHBT)材料生长、器件结构与设计、制作工艺和性能测试以及在振荡器中的应用等方面的研究.采用发射极-基极自对准工艺制作了InP/InGaAs/InP DHBT器件,发射极尺寸为1.5μm×10μm的器件小电流直流增益β约25,集电极-发射极击穿电压BVCEO≥10V,截止频率,ft和最高振荡频率,fmax分别为50和55GHz;  相似文献   

11.
An HBT model for InP-based single HBTs (SHBTs) was developed based on the conventional Gummel-Poon large-signal BJT model available in HSPICE. Several typical characteristics observed from InP-based SHBTs, such as soft breakdown and collector transit-time delay effects, were modeled through a macro modeling approach. Excellent agreement has been achieved between the experimental and calculated results based on the model  相似文献   

12.
InP-based single heterojunction bipolar transistors (SHBTs) for high-speed circuit applications were developed. Typical common emitter DC current gain (/spl beta/) and BV/sub CEO/ were about 17 and 10 V, respectively. Maximum extrapolated f/sub max/ of 478 GHz with f/sub T/ of 154 GHz was achieved for 0.5 /spl times/ 10 /spl mu/m/sup 2/ emitter size devices at 300 kA/cm/sup 2/ collector current density and 1.5 V collector bias. This is the highest f/sub max/ ever reported for any nontransferred substrate HBTs, as far as the authors know. This paper highlights the optimized conventional process, and the authors have great hopes for the process that offers inherent advantages for the direct implementation to high-speed electronic circuit fabrication.  相似文献   

13.
谐振隧穿二极管(RTD)具有高频、低功耗、负阻、双稳态、自锁等优点,在超高速数字电路领域具有非常好的应用前景.加之InP材料固有的优越特性,使得InP基谐振隧穿器件成为目前研究的重点.研究并试制了InP基RTD实验样品,对其直流特性进行了测试分析,器件的最大电流峰谷比(PVCR)达到了17.8.  相似文献   

14.
The breakdown and speed characteristics of InP/InGaAs single and double HBTs are presented. Temperature-dependent two- and three-terminal measurements suggest that avalanche impact ionization is the dominant breakdown mechanism in InGaAs collector HBTs. Monte Carlo techniques and 1D drift-diffusion modeling are used for speed and breakdown simulation, respectively. Special doping profiles are evaluated for improving the breakdown-speed characteristics of single HBTs (SHBTs) with conventional uniformly doped InGaAs collectors. Double HBTs (DHBTs) outperform all SHBTs in terms of speed-breakdown tradeoffs as long as they use graded base-collector junctions or they operate under sufficiently high collector-emitter voltage conditions. A cutoff frequency of 200 GHz was found to be feasible with graded DHBTs, and breakdown voltages up to 4.6 V were evaluated with a 3000-Å-thick collector. Nongraded DHBTs can be optimized to perform better in terms of speed-breakdown tradeoffs provided that a high collector doping is used  相似文献   

15.
研制成功了一种无微空气桥的亚微米InP基异质结双极晶体管(HBT).发展了小于100nm的发射极侧向腐蚀工艺,实现了亚微米的InP基HBT.发射极宽度的减小有效提高了频率特性,发射极面积为0.8μm×15μm的HBT的电流增益截止频率达到了238GHz.发展了基极-集电极的侧向过腐蚀工艺,有效减小了结面积,提高了最大振荡频率.Kirk电流密度达到了3.1mA/μm2.据我们所知,电流增益截止频率是目前国内三端器件中最高的,Kirk电流密度是国内报道的HBT中最高的.这对于HBT器件在超高速电路中的应用具有十分重要的意义.  相似文献   

16.
An InP-based high-speed optical modulator is presented. The Schottky-i-n waveguide structure on InP-based material was used to reduce the switching voltage Vpi and the excess loss, while maintaining high-modulation efficiencies. To minimize residual amplitude modulation and to improve power handling capability, the bulk electrooptic effect in InGaAlAs was utilized for phase shifting. As a result, a simple structure InAlAs-InGaAlAs Mach-Zehnder optical modulator with traveling-wave electrodes was fabricated and characterized. This device achieved a switching voltage Vpi of 3.6 V, extinction ratio (>23 dB) and high-speed operation at 1.55-mum wavelength  相似文献   

17.
Recent efforts are being focused on improving the breakdown of InP-based heterojunction bipolar transistors (HBTs) towards high-power applications. A fundamental understanding of the temperature dependence of breakdown and its physics mechanism in these devices is important. In this work, a detailed characterization of temperature-dependent collector breakdown behavior in InP DHBTs (DHBTs) with an InGaAs/InP composite collector is carried out. A physics model for the prediction of temperature-dependent breakdown in lnP/InGaAs composite collector is developed. We found that, although the variation of impact ionization coefficient due to the change of temperature may affect the device breakdown, the temperature-dependence of breakdown in the lnGaAs/InP composite collector could be significantly affected by the carrier transport in the InGaAs region. As temperature is increased, the increase in the contribution of InGaAs layer to the junction breakdown due to the reduction of electron energy relaxation length could be the root cause of the reduction of junction breakdown voltage. Good agreement between the physics model and experimental data demonstrate the validities of the proposed physics model to predict the temperature dependent breakdown characteristics for InP DHBTs.  相似文献   

18.
This paper provides an overview on recent advances of InP-based photodetectors for high-speed fiber-optic applications, with emphasis on evanescently coupled waveguide photodiodes, balanced receivers, and distributed traveling wave photodetectors.   相似文献   

19.
通过合理的外延层材料结构设计和改进的器件制备工艺,制备出功率增益截止频率(fmax)为183GHz的晶格匹配InP基In0.53Ga0.47As-In0.52Al0.48As HEMT。该fmax为国内HEMT器件最高值,还报道了器件的结构、制备工艺以及器件的直流和高频特性。  相似文献   

20.
通过合理的外延层材料结构设计和改进的器件制备工艺,制备出功率增益截止频率(fmax)为183GHz的晶格匹配InP基In0.53Ga0.47As-In0.52Al0.48As HEMT.该fmax为国内HEMT器件最高值.还报道了器件的结构、制备工艺以及器件的直流和高频特性.  相似文献   

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