原位退火对HVPE生长的GaN外延层光学性质和结构的影响

研究了原位退火对用氢化物外延方法在(0001)面蓝宝石衬底上生长的氮化镓(GaN)外延薄膜的结构和光学性能的影响.测试表明,氨气气氛下在生长温度进行的原位退火,明显提高了GaN外延膜的质量.X射线衍射(XRD)分析表明,随着原位退火时间的增加,(0002)面和(1012)面摇摆曲线的半峰宽逐渐变窄.喇曼散射谱显示样品退火后E2(high)峰位向低频区移动;随着退火时间的延长,趋向于块状GaN的峰位.可见,原位退火使GaN外延膜中的双轴应力明显减少.光致发光的测试结果与XRD和喇曼散射谱的结论一致.表明原位退火能有效提高GaN外延膜的结构和光学性能.     

掺碳氮化镓的光学性质

利用喇曼光谱和光致发光谱,对采用氢化气相外延淀积方法在MOCVD GaN衬底上生长的掺碳GaN样品的光学性质进行了研究.结果发现C3H8流量的增加导致载流子浓度的升高,喇曼谱出现蓝移,E1(LO)声子的Raman强度变弱.同时光致发光谱中蓝光带和黄光带发光强度随着掺碳浓度的增加先增强后减弱,这与掺杂碳的自补偿效应有关.高碳掺杂量的GaN材料的结构与光学性质均显著下降.     

掺碳氮化镓的光学性质

利用喇曼光谱和光致发光谱,对采用氢化气相外延淀积方法在MOCVD GaN衬底上生长的掺碳GaN样品的光学性质进行了研究.结果发现C3H8流量的增加导致载流子浓度的升高,喇曼谱出现蓝移,E1(LO)声子的Raman强度变弱.同时光致发光谱中蓝光带和黄光带发光强度随着掺碳浓度的增加先增强后减弱,这与掺杂碳的自补偿效应有关.高碳掺杂量的GaN材料的结构与光学性质均显著下降.     

Si(111)衬底上GaN外延材料的应力分析

对Si(111)衬底上GaN外延材料的应力随着低温AlN插入层数的变化进行了分析研究。通过喇曼散射谱在高频E2(TO)模式下的测试分析发现,随着低温AlN插入层数的增加,GaN材料的E2(TO)峰位逐渐接近体GaN材料的E2(TO)峰位(无应力体GaN材料的E2(TO)峰位为568cm-1),计算得出GaN材料的应力从1.09GPa减小到0.42GPa。同时,使用室温光荧光谱进行了分析验证。结果表明,Si衬底上GaN外延材料受到的是张应力,通过低温AlN插入层技术可以有效降低GaN材料的应力,并且最终实现了表面光亮的厚层无裂纹GaN材料。     

GaAs(100)衬底上热壁外延生长的ZnSe薄膜光学声子散射光谱研究

本文给出n型GaAs(100)衬底上热壁外延生长的Znse薄膜室温喇曼散射分析.Znse纵光学(LO)声子喇曼峰的线宽测量表明作者已在GaAs(100)衬底上用封闭式热壁外延法长出了高质量ZnSe单晶膜.较差质量外延膜在背散射喇曼谱中出现的横光学(TO)声子峰被归之于外延膜生长过程中与孪生有关的微观取向错误的出现.首次在意到GaAs表面化学腐蚀处理使n型GaAs的LO声子-等离子激元耦合模喇曼强度有成倍提高,并证明这是因为化学腐蚀使GaAs表面氧化层厚度减小,增加了入射激光束在GaAs基质材料中的穿透深度.     

GaAs(001)衬底上MOCVD生长的立方相GaN外延薄膜的光学性质研究

本文报道了利用MOCVD方法,在GaAs衬底(001)面制备的立方GaN薄膜的光学性质.利用光致发光(PL)光谱的半高宽确定制备的样品具有不同的晶体质量.利用喇曼散射(RS)光谱研究了立方GaN薄膜中的光学声子模式.横向(TO)和纵向(LO)声子在立方GaN中的散射峰分别位于552cm-1和739cm-1.另外还观察到来自界面无序层的TOB和LOB.根据喇曼频移和选择定则可识别GaN中的相组成.其来自六方相GaN的E2声子模,可作为识别立方GaN中六方相的标志.随着退火温度的升高,样品中的界面层的效应减弱,六方相增加     

应变对PbSe材料晶格振动的影响

在晶格失配的BaF2衬底上用分子束外延技术生长了不同厚度的PbSe单晶薄膜,PbSe外延薄膜的喇曼光谱测量到位于136～143cm-1之间的布里渊区中心纵光学声子(LO)振动,位于83～88cm-1之间的纵光学声子与横光学声子的耦合模(LO-TO)振动,以及位于268～280cm-1之间的2LO声子振动.而且PbSe薄膜的LO声子频率随薄膜厚度的不同明显移动,随着薄膜的厚度减小声子频率线性增大,这是由外延膜与衬底之间的失配应力不同引起的.为了理解PbSe声子振动模喇曼活性的物理原因,还比较分析了PbSe体单晶的喇曼光谱,同样,PbSe体单晶样品也呈现出喇曼活性的散射峰.     

应变对PbSe材料晶格振动的影响

在晶格失配的BaF2衬底上用分子束外延技术生长了不同厚度的PbSe单晶薄膜,PbSe外延薄膜的喇曼光谱测量到:位于136～143cm-1之间的布里渊区中心纵光学声子(LO)振动,位于83～88cm-1之间的纵光学声子与横光学声子的耦合模(LO-TO)振动,以及位于268～280cm-1之间的2LO声子振动.而且PbSe薄膜的LO声子频率随薄膜厚度的不同明显移动,随着薄膜的厚度减小声子频率线性增大,这是由外延膜与衬底之间的失配应力不同引起的.为了理解PbSe声子振动模喇曼活性的物理原因,还比较分析了PbSe体单晶的喇曼光谱,同样,PbSe体单晶样品也呈现出喇曼活性的散射峰.     

HVPE生长的高质量GaN纳米柱的光学性能

GaN纳米材料因具有优异的晶体质量和突出的光学性能及发射性能,日益受到关注.研究了一种利用氢化物气相外廷(HVPE)系统生长高质量的GaN纳米柱的方法.使用镍作为催化剂,在蓝宝石衬底上生长出了GaN纳米柱.在不同生长时间和不同HC1体积流量下制备了多组样品,使用扫描电子显微镜(SEM)、X射线衍射(XRD)和光致发光(PL)谱对样品进行了分析表征.测试结果表明,在较低的HC1体积流量下,生长2 min的样品具有较高的晶体质量和较好的光学性质.讨论了不同生长阶段的GaN纳米结构发光特性的变化规律,认为纳米结构所产生的表面态密度大小差异会造成带边峰位的红移和展宽.     

AlGaN缓冲层结构对Si基GaN材料性能的影响

Si衬底与GaN之间较大的晶格失配和热失配引起的张应力使GaN外延层极易产生裂纹,如何补偿GaN所受到的张应力是进行Si基GaN外延生长面临的首要问题.采用金属有机化合物化学气相沉积(MOCVD)技术在4英寸(1英寸=2.54 cm)Si (111)衬底上制备了GaN外延材料并研究了不同AlGaN缓冲层结构对Si基GaN外延材料性能的影响,并采用高分辨X射线衍射仪(HRXRD)、原子力显微镜(AFM)、喇曼光谱以及光学显微镜对制备的GaN材料的性能进行了表征.采用3层A1GaN缓冲层结构制备了表面光亮、无裂纹的GaN外延材料,其(002)晶面半高宽为428 arcsec,表面粗糙度为0.194 nm.结果表明,采用3层A1GaN缓冲层结构可以有效地降低GaN材料的张应力和位错密度,进而遏制表面裂纹的出现,提高晶体质量.     

Zone-center optical phonons in wurtzite InAlN crystal

An experimental study of the optical phonons is presented for InAlN epilayers lattice-matched with GaN by means of Raman scattering,and theoretical simulations are done to investigate the zone-center optical phonons of InAlN alloy by using the modified random element isodisplacement(MREI)model.The calculated findings show that the LO and TO branches of InAlN crystal both exhibit nonlinear properties.A comparison is made between the theoretical results and the experimental data,and it shows that they are both consistent for the A 1 (LO)phonons of InAlN epilayers.     

Growth of GaN on Buffer Layers with Different Polarities by Hydride Vapor-Phase Epitaxy

This paper reports the properties of GaN grown by the hydride vapor-phase epitaxy (HVPE) technique on buffer layers with different polarities. The N-, mixed-, and Ga-polarity buffer layers were grown by molecular-beam epitaxy (MBE) on sapphire (0001) substrates; then, thicker GaN epilayers were grown on these by HVPE. The surface morphology, structural, and optical properties of these HVPE-GaN epilayers were characterized by atomic force microscopy (AFM), x-ray diffraction (XRD), scanning electron microscopy, and photoluminescence (PL) spectroscopy. The results indicate that the crystallinity of these HVPE-GaN epilayers depends on the polarity of the buffer layer.     

Structural,optical, and surface science studies of 4H-SiC epilayers grown by low pressure chemical vapor deposition

A series of epitaxial 4H-SiC thin films grown by low pressure chemical vapor deposition (LPCVD) were characterized using various techniques, including x-ray diffraction (XRD), Fourier transform infrared (FTIR) reflectance, Raman scattering, and x-ray photoelectron spectroscopy (XPS). The epilayers were grown on heavily doped n-type 4H-SiC substrates using different gas compositions. XRD showed that the thin films were single crystal. Raman scattering identified the films to be 4H polytype. FTIR reflectivity spectra indicated improvement in the film quality over that of the substrate and atmospheric pressure-grown epilayers. XPS scans revealed the existence of Si, C, and O along with C-contaminant species in the form of CH and carbon oxides. Variations in crystalline quality, optical, and surface properties with the growth conditions were studied. This study also provides an important comparison between low and atmospheric pressure-grown 4H-SiC epilayers.     

InGaN/GaN和InGaN/AlGaN多量子阱中应变对光致发光特性的影响

对蓝宝石衬底上的InGaN/GaN和InGaN/AlGaN多量子阱结构和经激光剥离去除衬底的InGaN/GaN和InGaN/AlGaN多量子阱结构薄膜样品,进行了光致发光谱、高分辨XRD和喇曼光谱测量.PL测量结果表明,相对于带有蓝宝石衬底的样品,InGaN/GaN多量子阱薄膜样品的PL谱峰值波长发生较小的蓝移,而InGaN/AlGaN多量子阱薄膜样品的PL谱峰值波长发生明显的红移;喇曼光谱的结果表明,激光剥离前后E2模的峰值从569.1减少到567.5cm-1.这说明激光剥离去除衬底使得外延层整体的压应力得到部分释放,但InGaN/GaN与InGaN/AlGaN多量子阱结构中阱层InGaN的应力发生了不同的变化.XRD的结果证实了这一结论.     

Al沉积时间对Si衬底GaN材料的影响

通过改变高温AlN形核层生长时提前通入TMAl的时间,分别在Si(111)衬底上生长了4个1μm厚的GaN样品,并对每个样品的GaN外延材料进行了分析研究。通过显微镜观察发现,Al的沉积时间为12 s时,GaN材料表面光亮,基本没有裂纹。另外通过喇曼谱和光荧光谱(PL)测试得出,随着生长初期Al沉积时间的增加(8～15 s),GaN外延层的水平应力逐渐减小(由1.28 GPa减小到0.67 GPa),Al的沉积时间为12 s时GaN外延材料的应力较小。同时,GaN材料(002)和(102)晶面的X射线衍射摇摆曲线表明,Al的沉积时间为12 s时GaN外延材料的晶体质量最好。     

Silicon effect on GaN surface morphology

Si-doped GaN epitaxial layers have been grown at 1050 °C on optimized-AlN buffered (0001) sapphire substrates by atmospheric pressure metalorganic vapor phase epitaxy. In order to investigate the Si effect on the surface morphology of GaN epilayers, several samples were grown by varying the silane partial pressure. When the silane partial pressure increases above 1.7×10⁻⁸ atm, the surface quality becomes rough. This shows the Si surfactant effect. A correlation between an in situ laser reflectometry and ex situ optical and atomic force microscopy characterizations on the one hand and between electrical properties and surface quality on the other hand were made. As the electron concentration increases, the surface becomes more and more rough and the mobility drops dramatically.     

原位SiN_x掩膜生长GaN材料的应力及其对光学性质的影响(英文)

研究了以金属有机化学气相沉积方法生长在SiNx掩模层的GaN的应力状态,以及应力对光学性质的影响。通过微区拉曼光谱对应力进行了表征,结果显示,随着SiNx掩模淀积时间的增加,其上生长的GaN应力会相应地,释放。相应地,低温光致发光测试显示,施主束缚激子发光峰峰位出现明显的红移。我们认为,随着SiNx掩模淀积时间的增加,掩模覆盖度的增大,促进了侧向外延的生长,释放了压应力,进而影响了材料的光学性质。     

退火温度对硅基GaN薄膜质量的影响

采用电泳沉积法在Si(111)衬底上制备GaN薄膜,并研究退火温度对GaN薄膜晶体质量、表面形貌和发光特性的影响。傅立叶红外吸收谱(FTIR)、X射线衍射(XRD)和扫描电镜(SEM)的测试结果表明所得样品为六方纤锌矿结构的GaN多晶薄膜,随退火温度的升高,晶粒尺寸增大,结晶化程度提高。室温下光致发光谱的测试发现了位于367 nm处的强发光峰和437 nm处的弱发光峰,其发光强度随退火温度的升高而增强,但发光峰的位置并不发生移动。     

Influence of crystalline defects on transport properties of GaN grown by ammonia-molecular beam epitaxy and magnetron sputter epitaxy

GaN layers have been grown using an MBE/MSE (molecular beam epitaxy/magnetron sputter epitaxy) dual-mode system. The layers grown by the two techniques exhibited a large difference in crystalline quality and presented a broad spectrum of structural, optical, and transport properties that are useful for an analysis of the role of crystalline defects in GaN epilayers. The model of electron scattering by charged threading dislocations was applied in a theoretical fit of the mobility data. The theoretical fit in combination with x-ray diffraction and photoluminescence studies reveal the correlation between dislocation density, electron mobility, doping characteristics and yellow luminescence.