基于90nmCMOS工艺的低功耗宽带压控振荡器设计

A low power VCO with a wide tuning range and low phase noise has been designed and realized in a standard 90 nm CMOS technology. A newly proposed current-reuse cross-connected pair is utilized as a negative conductance generator to compensate the energy loss of the resonator. The supply current is reduced by half compared to that of the conventional LC-VCO. An improved inversion-mode MOSFET(IMOS) varactor is introduced to extend the capacitance tuning range from 32.8% to 66%. A detailed analysis of the proposed varactor is provided. The VCO achieves a tuning range of 27–32.5 GHz, exhibiting a frequency tuning range(FTR) of 18.4%and a phase noise of –101.38 d Bc/Hz at 1 MHz offset from a 30 GHz carrier, and shows an excellent FOM of –185d Bc/Hz. With the voltage supply of 1.5 V, the core circuit of VCO draws only 2.1 m A DC current.     

采用PMOS底部电流源的低功耗电流自调整压控振荡器

This paper presents the design and implementation of a current self-adjusted VCO with low power consumption. In the proposed VCO, a bottom PMOS current source instead of a top one is adopted to decrease the tail noise. A current self-adjusted technique without additional external control signals is taken to ensure the VCO starts up in the whole band while keeping the power consumption relatively low. Meanwhile, the phase noise of the VCO at the low frequency （high Cvar） can be reduced by the technique. The circuit is implemented in 0.18 μm CMOS technology. The proposed VCO exhibits low power consumption of 〈1.6 mW at a 1.5 V supply voltage and a tuning range from 11.79 to 12.53 GHz. The measured phase noise at 1 MHz offset from the frequency 11.79 GHz is-104.7 dBc/Hz, and the corresponding FOM is -184.2 dBc/Hz.     

Design and realization of an ultra-low-power low-phase-noise CMOS LC-VCO

A fully integrated cross-coupled LC tank voltage-controlled oscillator(LC-VCO) using transformer feedback is proposed to achieve a low phase noise and ultra-low-power design even at a supply below the threshold voltage. The ultra-low-power VCO is implemented in the mixed-signal and RF 1P6M 0.18-μm CMOS technology of SMIC. The measured phase noise is-125.3 dBc/Hz at an offset frequency of 1 MHz from a carrier of 2.433 GHz,while the VCO core circuit draws only 640μW from a 0.4-V supply.The designed VCO can...     

压控振荡器相位噪声、功耗和频率调谐特性的设计优化

To meet the requirements of the low power Zigbee system, VCO design optimizations of phase noise, power consumption and frequency tuning are discussed in this paper. Both flicker noise of tail bias transistors and up-conversion of flicker noise from cross-coupled pair are reduced by improved self-switched biasing technology, leading to low close-in phase noise. Low power is achieved by low supply voltage and triode region biasing. To linearly tune the frequency and get constant gain, distributed varactor structure is adopted. The proposed VCO is fabricated in SMIC 0.18-μm CMOS process. The measured linear tuning range is from 2.38 to 2.61 GHz. The oscillator exhibits low phase noise of -77.5 dBc/Hz and -122.8 dBc/Hz at 10 kHz and 1 MHz offset, respectively, at 2.55 GHz oscillation frequency while dissipating 2.7 mA from 1.2 V supply voltage, which well meet design specifications.     

应用于60-GHz无线通信的全差分锁相环频率综合器

A 40-GHz phase-locked loop(PLL) frequency synthesizer for 60-GHz wireless communication applications is presented. The electrical characteristics of the passive components in the VCO and LO buffers are accurately extracted with an electromagnetic simulator HFSS. A differential tuning technique is utilized in the voltage controlled oscillator(VCO) to achieve higher common-mode noise rejection and better phase noise performance. The VCO and the divider chain are powered by a 1.0 V supply while the phase-frequency detector(PFD)and the charge pump(CP) are powered by a 2.5 V supply to improve the linearity. The measurement results show that the total frequency locking range of the frequency synthesizer is from 37 to 41 GHz, and the phase noise from a 40 GHz carrier is –97.2 d Bc/Hz at 1 MHz offset. Implemented in 65 nm CMOS, the synthesizer consumes a DC power of 62 m W, including all the buffers.     

A wideband 0.13 μm CMOS LC-VCO for IMT-advanced and UWB applications

This paper presents an LC voltage controlled oscillator(VCO) in a dual-band frequency synthesizer for IMT-advanced and UWB applications.The switched current source,cross-coupled pair and noise filtering technique are adopted in this VCO design to improve the performance of the phase noise,power consumption,voltage amplitude,and tuning range.In order to achieve a wide tuning range,a reconfigurable LC tank with 4 bits switch control is adopted in the core circuit design.The size of the entire chip with pad is 1.11 0.98 mm2.The test results show that the current dissipation of the VCO at UWB and IMT-Advanced band is 3 mA and 4.5 mA in a 1.2 V supply.The tuning range of the designed VCO is 3.86-5.28 GHz and 3.14-3.88 GHz.The phase-noise at 1 MHz frequency offset from a 3.5 GHz and 4.2 GHz carrier is-123 dBc/Hz and-119 dBc/Hz,respectively.     

一种三阶环形压控振荡器的分析设计

This paper describes a large tuning range low phase noise voltage-controlled ring oscillator(ring VCO)based on a different cascade voltage logic delay cell with current-source load to change the current of output node.The method for optimization is presented.Furthermore,the analysis of performance of the proposed ring VCO is confirmed by the measurement results.The three-stage proposed ring VCO was fabricated in the 180-nm CMOS process of SMIC.The measurement results show that the oscillator frequency of the ring VCO is from 0.770 to5.286 GHz and the phase noise is 97.93 dBc/Hz at an offset of 1 MHz from 5.268 GHz with a total power of15.1 mW from a 1.8 V supply while occupying only 0.00175 mm2of the core die area.     

基于SiGe BiCMOS技术的低功耗23G VCO

A 23 GHz voltage controlled oscillator(VCO) with very low power consumption is presented.This paper presents the design and measurement of an integrated millimeter wave VCO.This VCO employs an on-chip inductor and MOS varactor to form a high Q resonator.The VCO RFIC was implemented in a 0.18μm 120 GHz f_t SiGe hetero-junction bipolar transistor(HBT) BiCMOS technology.The VCO oscillation frequency is around 23 GHz,targeting at the ultra wideband(UWB) and short range radar applications.The core of the VCO circuit consumes 1 mA current from a 2.5 V power supply and the VCO phase noise was measured at around -94 dBc/Hz at a 1 MHz frequency offset.The FOM of the VCO is -177 dBc/Hz.     

A 900 MHz fractional-N synthesizer for UHF transceiver in 0.18μm CMOS technology

A 900 MHz fractional-N synthesizer is designed for the UHF transceiver. The VCO with a 4 bits capacitor bank covers 823–1061 MHz that implements 16(24)sub-bands. A 7/8 dual-modulus prescaler is implemented with a phase-switching circuit and high-speed flip–flops, which are composed of source coupled logic. The proposed synthesizer phase-locked loop is demonstrated with a 50 k Hz band width by a low 12.95 MHz reference clock, and offers a better phase noise and band width tradeoff. To reduce the out-band phase noise, a 4-levels 3-order single-loop sigma–delta modulator is applied. When its relative frequency resolution is settled to 10-6, the testing results show that the phase noises are –120.6 d Bc/Hz at 1 MHz and –95.0 d Bc/Hz at 100 k Hz. The chip is2.1 mm2 in UMC 0.18μm CMOS. The power is 36 m W at a 1.8 V supply.     

具有自校准压控振荡器和精确自动频率校准算法的低噪声频率合成器

A low noise phase locked loop （PLL） frequency synthesizer implemented in 65 nm CMOS technology is introduced. A VCO noise reduction method suited for short channel design is proposed to minimize PLL output phase noise. A self-calibrated voltage controlled oscillator is proposed in cooperation with the automatic frequency calibration circuit, whose accurate binary search algorithm helps reduce the VCO tuning curve coverage, which reduces the VCO noise contribution at PLL output phase noise. A low noise, charge pump is also introduced to extend the tuning voltage range of the proposed VCO, which further reduces its phase noise contribution. The frequency synthesizer generates 9.75-11.5 GHz high frequency wide band local oscillator （LO） carriers. Tested 11.5 GHz LO bears a phase noise of-104 dBc/Hz at 1 MHz frequency offset. The total power dissipation of the proposed frequency synthesizer is 48 mW. The area of the proposed frequency synthesizer is 0.3 mm^2, including bias circuits and buffers.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Noise character analysis and the restraint of self-pulsation laser diodes

We calculate the Langevin noise sources of self-pulsation laser diodes, analyze the effects of active region noise and saturable-absorption region noise on the power fluctuation as well as period fluctuation, and propose a novel method to restrain the noise effects. A visible SIMULINK model is established to simulate the system, The results indicate that the effects of noise in absorption region can be ignored; that with the increase of DC injecting current, the noise effects enhance power jitter, and nevertheless, the period jitter is decreased; and that with external sinusoidal current modulating the self-pulsation laser diode, the noise-induced power jitter and period jitter can be suppressed greatly. This work is valuable for clock recovery in all-optical network.