（YbTbBi）3Fe5O12块状单晶生长及其磁学性能

用且熔剂法生长出（ＹｂＴｂＢｉ）３Ｆｅ５Ｏ１２块状单晶，测量了该单晶在１．０～１．７μｍ范围的Ｆａｒａｄａｙ旋转谱及透射谱，当温度为１０～８０℃，λ＝１．５５μｍ时，测得该单晶的Ｆａｒａｄｙ旋转温度系数为２．０×１０＾－２（°）．ｍｍ＾－１．Ｋ＾－１，所得结果表明：（ＹｂＴｂＢｉ）３Ｆｅ５Ｏ１２单晶既有较大的Ｆａｒａｄａｙ旋转角，又有很小的温度系数。     

新型掺Bi的YIG磁光薄膜

对用于磁光法拉第旋转器件的掺Ｂｉ的ＹＩＧ薄膜进行了介绍与分析，这种新型磁光薄膜（ＹｂＴｂＢｉ）３（ＦｅＧａ）５Ｏ１２是采用液相外延技术在ＣａＭｇＺｒ：ＧＧＧ晶片的（１１１）方向生长的，通过合理的配方及工艺生长出了成份均匀，光吸收小，在波长λ＝１．３１μｍ和λ＝１．５５μｍ时，插损分别为０．３ｄＢ和０．２ｄＢ，法拉第旋转角分别为２４００°／ｃｍ和１６００°／ｃｍ的薄膜，经抛光至２９０μｍ的厚度，法拉     

两步快退火改善InP（Fe）中MeV硅注入层的品质

２ＭｅＶ、（１～２）×１０１４ｃｍ－２硅离子注入ＳＩ－ＩｎＰ（Ｆｅ）造成负的（－３．４×１０－４～－２．９×１０－４）晶格应变，光快速退火的激活能为０．２６ｅＶ。８８０℃／１０ｓ退火可得到１００％的施主激活。间断两步退火（３７５℃／３０ｓ＋８８０℃／１０ｓ）使注入层单晶恢复完全，较大程度（２０％～３５％）地改善了载流子的迁移率。四能量叠加注入已能在０．５～３．０μｍ的深度区域形成满足某些器件要求的低电阻（７．５Ω）高浓度［（２～３）×１０１８ｃｍ－３］的ｎ型导电层。     

1.3μm和1.55μm Si_(1-x)Ge_x波长信号分离器与Si_(1-x)Ge_x/Si应变超晶格探测器的集成

对１．３μｍ和１．５５μｍ波长的Ｓｉ１－ｘＧｅｘ波长信号分离器（ＷＳＤ）和Ｓｉ１－ｘＧｅｘ／Ｓｉ应变超晶格（ＳＬＳ）红外探测器的集成结构进行了系统的分析和优化设计．优化结果为：（１）对Ｓｉ１－ｘＧｅｘＷＳＤ，Ｇｅ含量ｘ＝０．０５．波导的脊高和腐蚀深度分别为３μｍ和２．６μｍ．对应于λ１＝１．３μｍ和λ２＝１．５５μｍ波长的波导脊宽分别为１１μｍ和８．５μｍ．（２）对Ｓｉ１－ｘＧｅｘ／ＳｉＳＬＳ探测器，Ｇｅ含量ｘ＝０．５．探测器的厚度为５５０ｎｍ，由２３个周期的６ｎｍＳｉ０．５Ｇｅ０．５＋１７ｎｍＳｉ组成．     

还原再氧化型半导体陶瓷电容器材料的研究

通过实验研究了Ｎｄ２Ｏ３、Ｎｂ２Ｏ５、Ｓｍ２Ｏ３添加量对还原再氧化型ＢａＴｉＯ３半导体陶瓷电容器材料性能的影响，同时优化了烧结工艺，获得了Ｃ＞０．５μＦ／ｃｍ２，ｔｇδ＜３．５×１０－２，ρ＞４×１０１１Ω·ｃｍ，｜△Ｃ／Ｃ｜（－２５～＋８５℃）＜＋３０－８０％，Ｖｂ＞４２０Ｖ的实用半导体陶瓷电容器材料     

高场应力下FLOTOXMOS管的性能退化研究

利用氧化层动态电流弛豫谱分析方法,测试分析了在周期性电场应力下ＦＬＯＴＯＸＭＯＳ管隧道氧化层中陷阱电荷的特性,为研究陷阱电荷对ＦＬＯＴＯＸ ＥＥＰＲＯＭ 阈值电压的影响提供了实验依据。在＋ １１ Ｖ、－ １１ Ｖ 周期性老化电压下所产生的氧化层陷阱电荷饱和密度分别为－ １．８×１０１１ ｃｍ － ２和－ １．４×１０１１ ｃｍ － ２,平均俘获截面分别为５．８×１０－ ２０ ｃｍ ２ 和７．２×１０－ ２０ ｃｍ ２,有效电荷中心距分别为３．８ ｎｍ 和４．３ ｎｍ ,界面陷阱电荷饱和密度分别为６．５４×１０９ ｃｍ － ２ｅＶ－ １和－ ３．８×１０９ ｃｍ － ２ｅＶ－ １,平均俘获截面分别为１．１２×１０－ １９ ｃｍ ２ 和４．９×１０－ １９ ｃｍ ２。     

低损耗高温型R特性高压电容器瓷料的研制

采用Ｂｉ（３＋）、Ｐｂ（２＋）、Ｍｇ（２＋）与主晶相ＳｒＴｉＯ３固溶，并添加适量的Ｎｂ２Ｏ５、ＳｉＯ２、Ｙ２Ｏ３对ＳｒＴｉＯ３进行改性，研制出εｒ≥２２００，１ｋＨｚ时ｔｇδ≤０．１０×１０（－２），１０ｋＨｚ时ｔｇδ≤０．３０×１０（－２），－２５～＋８５℃｜△Ｃ／Ｃ｜≤１５％，Ｅｂ（ＤＣ）＞９Ｖ／μｍ，Ｒｉ＞１０（１２）Ω，耐高温（可达＋１２５℃），高频性能好的新型介质材料。该瓷料适合制作工作频率高、表面温升低的低损耗、耐高温的高压瓷介电容器。     

掺氧经铋六角钡铁氧体的磁性

已制得组成ＢａＯ（６－ｘ）Ｆｅ２Ｏ３ＸＢｉ２Ｏ３的Ｂａ－Ｍ角铁氧体。式中Ｏ≤Ｘ≤０．４。与Ｂｉ２Ｏ３含量有关的晶格参数没有明显变化。当Ｘ＝０．１５饱和磁化强度有最大值，而矫顽力值在Ｘ＝０．１５左右为最小。这一结果可由Ｂｉ＾５＋的存在使晶格中Ｆｅ＾２＋增多加以说明。     

半绝缘InP的优化生长条件以及掩埋的1.55μm激光器

研究了低压ＭＯＣＶＤ下生长压力和Ｆｅ源／Ｉｎ源摩尔流量比对半绝缘ＩｎＰ电阻率的影响．得到了用ＬＰ－ＭＯＣＶＤ生长掺Ｆｅ半绝缘ＩｎＰ的优化生长条件．在优化生长条件下得到的Ｆｅ－ＩｎＰ的电阻率为２．０×１０８Ω·ｃｍ,击穿电场４×１０４Ｖ／ｃｍ．用半绝缘Ｆｅ－ＩｎＰ掩埋１．５５μｍ多量子阱激光器,激光器的高频调制特性明显优于反向ｐｎ结掩埋的激光器,３ｄＢ调制带宽达４．８ＧＨｚ．     

GSMBE原位生长SiGeHBT材料

采用ＧＳＭＢＥ工艺生长的单晶ＳｉＧｅＨＢＴ结构材料,经Ｘ射线双晶衍射,透射电镜和扩展电阻深度分布测量说明：该材料晶体完整性好,无应力弛豫,界面平整陡峭．发射区Ｎ型掺杂浓度２e１９～１e２０ｃｍ－３,厚度１００～２００ｎｍ;基区ＳｉＧｅ合金Ｇｅ组分０．０５～０．２０,Ｐ型掺杂浓度５e１８ｃｍ－３,厚度４０～１００ｎｍ;集电极浓度～１e１６ｃｍ－３．达到了生长ＳｉＧｅＨＢＴ材料的条件．     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.